• Journal of Sensor Science and Technology
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• v.15 no.2
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• pp.148-152
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• 2006

This paper describes the fabrication of SiCN microstructures for super-high temperature MEMS using photopolymerization of pre-ceramic polymer. In this work, polysilazane liquide as a precursor was deposited on Si wafers by spin coating, microstructured and solidificated by UV lithography, and removed from the substrate. The resulting solid polymer microstructures were cross-linked under HIP process and pyrolyzed to form a ceramic of withstanding over $1400^{\circ}C$. Finally, the fabricated SiCN microstructures were annealed at $1400^{\circ}C$ in a nitrogen atmosphere. Mechanical characteristics of the SiCN microstructure with different fabrication process conditions were evaluated. The elastic modules, hardness and tensile strength of the SiC microstructure implemented under optimum process condtions are 94.5 GPa, 10.5 GPa and 11.7 N/min, respectively. Consequently, the SiCN microstructure proposed in this work is very suitable for super-high temperature MEMS application due to very simple fabrication process and the potential possiblity of sophisticated mulitlayer or 3D microstructures as well as its good mechanical properties.

• Journal of the Korean Society for Heat Treatment
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• v.23 no.6
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• pp.301-308
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• 2010

A steel with chemical composition, 0.22% C, 0.25% Si, 1.26% Mn, 0.22% Cr, 0.04% Ti, 0.0042% B, and a microstructure of ferrite and spheroidized cementite has been press-formed to automotive center pillar followed by local-hardening heat-treatment. Hardness, tensile properties, fractography, microstructure and surface roughness of local-hardening heat-treated automotive center pillar have been examined. The directly heated and quenched area had fully martensitic structure with Vickers hardenss in the range of 500 to 510. The heat affected area close to the directly heated area showed dual-phase structure of ferrite and martensite. The width of the heat-treated and heat-affected areas after the local-hardening heat treatment was ranging from 32 mm to 50 mm. The surface of the local-hardening heat-treated center pillar revealed some temper color as a consequence of the oxidation during the heat treatment, but the surface roughness was not affected by the local-hardening heat treatment.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.12
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• pp.2019-2028
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• 1997

It has been well established that resistant force and wear that occur during rolling motion depend on several factors such as material type, hardness, subsurface microstructure, applied load, and speed. The purpose of this work is to investigate the effect of microstructure and the state of deformed layer on the rolling contact characteristics in dry and lubricated rolling contacts. The results of this work show that the rolling resistance behavior depends on the state of the deformed layer. Also, lubrication can reduce the plastic flow at the surface but may still have an effect on the subsurface strain. The cross-sectional view of the microstructure shows that surface traction has a difinite effect on the morphology of the surface region. That is, significant slip seems to have taken place between the ball than those of the dry rolling case. The surface generation effects were significantly less compared to the case of dry rolling contact.

• Korean Journal of Materials Research
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• v.16 no.2
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• pp.137-143
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• 2006

The effects of Cu and Fe additions on the thermal stability, microstructure and mechanical properties of $Al_{85}-Ni_{8.5}-Mm_{6.5},\;Al_{84}-Ni_{8.5}-Mm_{6.5}Cu_1,\;Al_{84}-Ni_{8.5}-M_{m6.5}Fe_1$ alloys, manufactured by gas atomization, degassing and hot-extrusion were investigated. Gas atomization, with a wide super-cooled liquid region, allowed the alloy powders to exhibit varying microstructure depending primarily on the powder size and composition. Al hotextruded alloys consisted of homogeneously-distributed fine-grained fcc-Al matrix and intermetallic compounds. A substitution of 1 at.% Al by Cu increased the thermal stability of the amorphous phase and produced alloy microstructure with smaller fcc-Al grains. On the other hand, the same substitution of 1 at.% Al by Fe decreased the stability of the amorphous phase and produced larger fcc-Al grains. The formation of intermetallic compounds such as $Al_3Ni,\;Al_{11}Ce_3\;and\;Al_{11}La_3$ was suppressed by the addition of Cu or Fe. Among the three alloys examined, the highest Vickers hardness and compressive strength were obtained for $Al_{84}-Ni_{8.5}-M_{m6.5}Cu_1$ alloy, and related to the finest fcc-Al grain size attained from increased thermal stability with Cu addition.

• Journal of the Korean Society for Heat Treatment
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• v.30 no.5
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• pp.197-206
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• 2017

The microstructure of a high-carbon and high-chromium cast steel (HK700) for cold-work die inserts was analyzed by advanced scanning electron microscopy. A continuous network of primary $M_7C_3$ carbide was developed among austenitic matrix after casting. A small amount of $M_2C$ was added to the carbide network owing to the enrichment of Mo and W during the solidification. After quenching in which the austenitization was performed at $1030^{\circ}C$ and double tempering at $520^{\circ}C$, the network structure of $M_7C_3$ was preserved while most of the matrix was transformed to martensite because of additional carbide precipitation. The $M_2C$ in the as-cast microstructure was also transformed to $M_6C$ due to its instability. The continuous network of coarse carbides owing to the absence of hot-working had little influence on the hardness after quenching and tempering, whereas it resulted in severe brittleness upon flexural loading.

• Journal of the Korean Ceramic Society
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• v.43 no.8 s.291
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• pp.492-497
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• 2006

SiC coating has been introduced as protective layer in TRISO nuclear fuel particle of High Temperature Gas cooled Reactor (HTGR) due to excellent mechanical stability at high temperature. In order to inhibit the failure of the TRISO particles, it is important to evaluate the fracture strength of the SiC coating layer. ]n present work, thin silicon carbide coating was fabricated using chemical vapor deposition process with different microstructures and thicknesses. Processing condition and surface status of substrate.affect on the microstructure of SiC coating layer. Sphere indentation method on trilayer configuration was conducted to measure the fracture strength of the SiC film. The fracture strength of SiC film with different microstructure and thickness were characterized by trilayer strength measurement method nanoindentation technique was also used to characterize the elastic modulus and th ε hardness of the SiC film. Relationships between microstructure and mechanical properties of CVD SiC thin film were discussed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.392-393
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• 2006

This paper describes the fabrication of SiCN microstructures for super-high temperature MEMS using photopolymerization of pre-ceramic polymer. In this work. polysilazane liquide as a precursor was deposited on Si wafers by spin coating. microstructured and solidificated by UV lithography. and removed from the substrate. The resulting solid polymer microstructures were cross-linked under HIP process and pyrolyzed to form a ceramic of withstanding over $1400^{\circ}C$. Finally, the fabricated SiCN microstructures were annealed at $1400^{\circ}C$ in a nitrogen atmosphere. Mechanical characteristics of the SiCN microstructure with different fabrication process conditions were evaluated. The elastic modules. hardness and tensile strength of the SiC microstructure implemented under optimum process conditions are 94.5 GPa, 10.5 GPa and 11.7 N/min, respectively. Consequently, the SiCN microstructure proposed in this work is very suitable for super-high temperature MEMS application due to very simple fabrication process and the potential possiblity of sophisticated multlayer or 3D microstructures as well as its good mechanical properties.

• Journal of the Korean institute of surface engineering
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• v.48 no.5
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• pp.205-210
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• 2015

NbN coatings were prepared by ICP (inductively coupled plasma) assisted magnetron sputtering from a Nb metal target in $Ar+N_2$ atmosphere at various ICP powers. Effect of ICP on the microstructure, crystalline structure and mechanical properties of NbN coatings was investigated by field emission electron microscopy, X-ray diffraction, atomic force microscopy and nanoindentation measurements. The results show that ICP power has a significant influence on coating microstructure, structure and mechanical properties of NbN coatings. With the increasing of ICP power, coating microstructure evolves from the columnar structure of DC process to a highly dense one. Crystalline structure of NbN coatings were changed from cubic ${\delta}$-NbN to hexagonal ${\beta}-Nb_2N$ with increase of ICP power. The maximum nano hardness of 25.4 GPa with Ra roughness of 0.5 nm was obtained from the NbN coating sputtered at ICP power of 200 W.

• Journal of the Korean institute of surface engineering
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• v.49 no.4
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• pp.376-381
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• 2016

The effects of ICP (Inductively Coupled Plasma) power, ranging from 0 to 200 W, on the crystal structure, microstructure, surface roughness and mechanical properties of magnetron sputtered VN coatings were systematically investigated with FE-SEM, AFM, XRD and nanoindentation. The results show that ICP power has a significant influence on coating microstructure and mechanical properties of VN coatings. With the increasing of ICP power, coating microstructure evolves from a porous columnar structure to a highly dense one. Average crystal grain size of single phase cubic fcc VN coatings was decreased from 10.1 nm to 4.0 nm with increase of ICP power. The maximum hardness of 28.2 GPa was obtained for the coatings deposited at ICP power of 200 W. The smoothest surface morphology with Ra roughness of 1.7 nm was obtained from the VN coating sputtered at ICP power of 200 W.

• Korean Journal of Metals and Materials
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• v.50 no.3
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• pp.212-217
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• 2012

This study was carried out to investigate the effect of the hot forging ratio on the microstructure and mechanical properties of ultra high carbon steel. The microstructure of ultra high carbon steel with 1.5%wt.C consisted of a proeutectoid cementite network and acicular microstructure in pearlite matrix. With increasing hot forging ratio, the volume and thickness of the network and acicular proeutectoid cementite decreased. Lamella spacing and the thickness of eutectoid cementite decreased with increasing hot forging raito, and were broken up into particle shapes, which then became spheroidized. When the forging ratio was over 65%, the network and acicula shape of the as-cast state disappeared. With increasing hot forging ratio, hardness, tensile strength, elongation and impact value were not changed up to 50%, and then rapidly increased with the increase of the forging ratio.