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http://dx.doi.org/10.5695/JKISE.2016.49.4.376

Effect of Inductively Coupled Plasma on the Microstructure, Structure and Mechanical Properties of VN Coatings  

Chun, Sung Yong (Department of Advanced Materials Science and Engineering Mokpo National University)
Lee, So Yeon (Department of Advanced Materials Science and Engineering Mokpo National University)
Publication Information
Journal of the Korean institute of surface engineering / v.49, no.4, 2016 , pp. 376-381 More about this Journal
Abstract
The effects of ICP (Inductively Coupled Plasma) power, ranging from 0 to 200 W, on the crystal structure, microstructure, surface roughness and mechanical properties of magnetron sputtered VN coatings were systematically investigated with FE-SEM, AFM, XRD and nanoindentation. The results show that ICP power has a significant influence on coating microstructure and mechanical properties of VN coatings. With the increasing of ICP power, coating microstructure evolves from a porous columnar structure to a highly dense one. Average crystal grain size of single phase cubic fcc VN coatings was decreased from 10.1 nm to 4.0 nm with increase of ICP power. The maximum hardness of 28.2 GPa was obtained for the coatings deposited at ICP power of 200 W. The smoothest surface morphology with Ra roughness of 1.7 nm was obtained from the VN coating sputtered at ICP power of 200 W.
Keywords
Inductively Coupled Plasma; VN coatings; Nanocrystalline; Grain size; Crystal structure;
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Times Cited By KSCI : 5  (Citation Analysis)
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