• Journal of computational fluids engineering
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• v.10 no.1
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• pp.73-79
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• 2005

Micro sensor is very useful for flow measurements in a number of engineering applications. Especially, it is necessary for the development of MEMS. This paper presents the 3D numerical simulation of flows around a micro flow sensor, which is mounted on a flat plate. The effects of the sensor configuration (i.e. bottom gap) and the Reynolds number on the flow field are numerically investigated. The numerical results indicate that the bottom gap clearly affects the flow fields over the top surface of the sensor. The Reynolds numbers also show a significant influence on the flow nature, especially on the recirculation zone at downstream of the sensor. The present results illustrate a certain improvement on the flow field for the sensor installed at O.5mm above the wall with four pillars, comparing with that directly mounted on the wall.

• Journal of Sensor Science and Technology
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• v.17 no.3
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• pp.178-182
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• 2008

Planar type micro catalytic combustible gas sensor was developed by using nano crystalline $SnO_2$ Pt thin film as micro heater was deposited by thermal evaporation method on the alumina substrate. The thickness of the Pt heater was around 160 nm. The sensor showed high reliability with prominent selectivity against various gases(Co, $C_3H_8,\;CH_4$) at low operating temperature($156^{\circ}C$). The sensor with nano crystalline $SnO_2$ showed higher sensitivity than that without nano crystalline $SnO_2$. This can be explained by more active adsorption and oxidation of hydrogen by nano crystalline $SnO_2$ particles. The present planar-type catalytic combustible hydrogen sensor with nano crystalline $SnO_2$ is a good candidate for detection of hydrogen leaks.

• Transactions on Electrical and Electronic Materials
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• v.13 no.1
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• pp.27-30
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• 2012

This paper proposes a micro gas sensor for measuring $H_2S$ gas. This is based on a $SnO_2$-CuO multi-layer thin film. The sensor has a silicon diaphragm, micro heater, and sensing layers. The micro heater is embedded in the sensing layer in order to increase the temperature to an operating temperature. The $SnO_2$-CuO multi layer film is prepared by the alternating deposition method and thermal oxidation which uses an electron beam evaporator and a thermal furnace. To determine the effect of the number of layers, five sets of films are prepared, each with different number of layers. The sensitivities are measured by applying $H_2S$ gas. It has a concentration of 1 ppm at an operating temperature of $270^{\circ}C$. At the same total thickness, the sensitivity of the sensor with multi sensing layers was improved, compared to the sensor with one sensing layer. The sensitivity of the sensor with five layers to 1 ppm of $H_2S$ gas is approximately 68%. This is approximately 12% more than that of a sensor with one-layer.

• Journal of Sensor Science and Technology
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• v.9 no.5
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• pp.334-340
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• 2000

This paper presents the fabrication of a micro electromagnetic flow sensor for the liquid flow rate measurement. The micro electromagnetic flow sensor has some advantages such as a simple structure, no heat generation, a rapid response and no pressure loss. The principle of the micro electromagnetic flow sensor is based on Faraday's law. If conductive fluid passes through a magnetic field, the electromotive force is generated and detected by two electrodes on the wall of the flow channel. The flow sensor consists of two permanent magnets and a silicon flow channel with two electrodes. The dimension of the flow sensor is $9\;mm\;{\times}\;9\;mm\;{\times}\;1\;mm$. The micro flow channel is mainly fabricated by anisotropic etching of two silicon wafers, and the detection electrodes are fabricated by metal evaporation process. The characteristic of the fabricated flow sensor is obtained experimentally. When the flow rates of water with the conductance of $100-200\;{\mu}S/cm$ are 9.1 ml/min and 62 ml/min, the generated electromotive forces are $261\;{\mu}V$ and 7.3 mV, respectively.

• Journal of Sensor Science and Technology
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• v.17 no.1
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• pp.35-40
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• 2008

Low power bridge type micro gas sensors were fabricated by micro machining technology with TMAH (Tetra Methyl Ammonium Hydroxide) solution. The sensing devices with different heater materials such as metal and poly-silicon were obtained using CMOS (Complementary Metal Oxide Semiconductor) compatible process. The tellurium films as a sensing layer were deposited on the micro machined substrate using shadow silicon mask. The low power micro gas sensors showed high sensitivity to NO with high speed. The pure tellurium film used micro gas sensor showed good sensitivity than transition metal (Pt, Ti) used tellurium film.

• Proceedings of the KWS Conference
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• 2005.06a
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• pp.106-108
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• 2005

The instrumented fuel irradiation test at a research reactor is needed to evaluate the performance of the developed nuclear fuel. The fuel elements can be designed to measure the center line temperature of fuel pellets during the irradiation test by using temperature sensor. The thermal sensor was composed of thermocouple and sensor sheath. Micro-laser welding technology was adopted to seal between seal tube and sensor sheath with thickness of 0.15 mm. The soundness of welding area has to be confirmed to prevent fission gas of the fuel from leaking out of the element during the fuel irradiation test. In this study, fundamental data for micro-laser welding technology was proposed to seal temperature sensor sheath of the instrumented fuel element. And, micro-laser welding for dissimilar metals between sensor sheath and seal tube was characterized by investigating welding conditions. Moreover, the micro-laser welding technology is closely related to advanced industry. It is expected that the laser material processing technology will be adopted to various a pplications in the industry.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.8
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• pp.573-579
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• 2009

A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.

• Proceedings of the KIEE Conference
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• 2002.11d
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• pp.240-242
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• 2002

Recently, most machineries have been small size and mobile type. And human body insertion type endoscope and micro robot technology has been developed. Then the motors used in this field are developed in micro size such as about 2mm in diameter. The structure of this motor is similar to a general brushless DC(BLDC) motor but because of small size there is no position sensor such as hall sensor. In this paper, we propose synchronous driving method for micro BLDC motor without position sensor. We design and manufacture this driver and perform experiment to show the effectiveness of the proposed method.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.55 no.2
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• pp.89-93
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• 2006

Recently as a people recognize a safety more about a high and large buildings the importance of a fire-damper which supplies fresh air into the building in case of fire increases greatly. Therefore, in this paper a fire-damper using a micro-controller is designed and fabricated. In the design of fire-damper a pressure sensor is modeled as a capacitor and the p-spice is used as a circuit simulator PIC16F72 is used as a micro-controller to drive a pressure sensor and to display a pressure value from the pressure sensor and to drive a motor to open and close a damper. A photo-coupler is used to protect a motor from a overcurrent.

• Journal of Sensor Science and Technology
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• v.13 no.4
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• pp.287-291
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• 2004

A capacitive type humidity sensor has been fabricated using a polyimide film without hydrophobic elements and its characteristics has been evaluated for hermeticity measurement of micro packages. For a highly sensitive humidity sensor, a polyimide film without hydrophobic elements has been synthesized and used instead of using a commercial one in which 7 group elements such as fluorine or chlorine are included. Sensitivity, stability and hysteresis has been performed to characterize the fabricated sensors. The sensitivity defined as normalized percent capacitance change was 0.3751%RH and hysteresis was 0.77% in the range of 10%RH to 90%RH. Maximum deviation from the average capacitance measured for 120 minutes at 50%RH was 0.25%. The proposed humidity sensor can be used for hermeticity measurement of micro packages.