Fabrication of low power NO micro gas senor by using CMOS compatible process
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Shin, Han-Jae
(School of Electrical Engineering and Computer Science, Kyungpook National University)
Song, Kap-Duk (MEMS/NANO Fabrication Center, Busan Techno Park) Lee, Hong-Jin (School of Electrical Engineering and Computer Science, Kyungpook National University) Hong, Young-Ho (Department of Digital Electronic Engineering, Kyungwoon University) Lee, Duk-Dong (School of Electrical Engineering and Computer Science, Kyungpook National University) |
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