Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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Measurements of Thermal Characteristics for a Micro-Fabricated Thermal Mass Air Flow Sensor With Real-Time Controller

실시간 제어기를 이용한 마이크로 열식 질량공기 유량센서의 열특성 측정

  • Published : 2009.08.01
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Abstract

A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.

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References

  1. Nguyen, N. T., 1997, 'Micromachined Flow Sensors - A review,' Flow Meas. Instrum., Vol. 8, No. 1, pp. 7~16 https://doi.org/10.1016/S0955-5986(97)00019-8
  2. Ashauer, M., Glosch, H., Hedrich, F., Hey, N., Sandmaier, H. and Lang, W., 1999, 'Thermal Flow Sensor for Liquids and Gases Based on Combinations of Two Principles,' Sensors and Actuators, A 73, pp. 7~13 https://doi.org/10.1016/S0924-4247(98)00248-9
  3. Buchner, R., Sosna, C., Maiwald, M., Benecke W., and LangW., 2006, 'A High-Temperature Thermopile Fabrication Process for Thermal Flow Sensors,' Sensors and Actuators, A 130, pp. 262~266 https://doi.org/10.1016/j.sna.2006.02.009
  4. Brunn, H. H., 1995, Hot-Wire Anemometry, Principles and Signal Analysis, Oxford University Press
  5. Park, B. K. and Lee, J. S., 2008, 'Microfabrication and Thermal Characteristics of a Thermal Mass Air Flow Sensor for Real-Time Applications,' Transactions of the KSME B, Vol. 32, No. 7, pp. 542~548 https://doi.org/10.3795/KSME-B.2008.32.7.542
  6. Lammerink, T. S. J., Tas, N. R., Elwenspoek, M. and Fluitman, J. H. J., 1993, 'Micro-Liquid Flow Sensor,' Sensors and Actuators, A 37, pp. 45~50 https://doi.org/10.1016/0924-4247(93)80010-E
  7. Elwenspoek, M., 1999, 'Thermal Flow Micro Sensors,' Proceeding of IEEE Semiconductor Conference, pp. 423~435 https://doi.org/10.1109/SMICND.1999.810580
  8. Madou, M. J., 2002, Fundamentals of Microfabrication, Second edition, CRC Press
  9. Park, B. K., Lee, J. S., and Oh, D. W., 2007, 'Flow Sensing Devices and Micro Mass Flowmeter with Configurations of Cooling Air Channels,' KR Pat., 10-0692072, G01F 1/69
  10. Bolton, W., 2004, Mechatronics: Electronic Control Systems in Mechanical and Electrical Engineering, Third edition, Prentice Hall
  11. Dijkstra, M., et al., 2008, 'Miniaturized Thermal Flow Sensor with Laminar Integrated Sensor Structures on Semicircular Surface Channels,' Sensors and Actuators, A 148, pp. 1~6 https://doi.org/10.1016/j.sna.2007.12.005
  12. Abbaspour-Sani, E., and Javan, D., 2007, 'Analytical Study of Resistive MEM Gas Flow Meters' Microsystem Technologies, 14, pp. 89~94 https://doi.org/10.1007/s00542-007-0403-4

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