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http://dx.doi.org/10.5369/JSST.2008.17.3.178

Catalytic combustion type hydrogen micro gas sensor using thin film heater and nano crystalline SnO2  

Han, Sang-Do (Korea Institute of Energy Research (KIER))
Hong, Dae-Ung (Hynix Semiconductor Co. LTD)
Han, Chi-Hwan (Korea Institute of Energy Research (KIER))
Chun, Il-Soo (Korea Institute of Energy Research (KIER))
Publication Information
Journal of Sensor Science and Technology / v.17, no.3, 2008 , pp. 178-182 More about this Journal
Abstract
Planar type micro catalytic combustible gas sensor was developed by using nano crystalline $SnO_2$ Pt thin film as micro heater was deposited by thermal evaporation method on the alumina substrate. The thickness of the Pt heater was around 160 nm. The sensor showed high reliability with prominent selectivity against various gases(Co, $C_3H_8,\;CH_4$) at low operating temperature($156^{\circ}C$). The sensor with nano crystalline $SnO_2$ showed higher sensitivity than that without nano crystalline $SnO_2$. This can be explained by more active adsorption and oxidation of hydrogen by nano crystalline $SnO_2$ particles. The present planar-type catalytic combustible hydrogen sensor with nano crystalline $SnO_2$ is a good candidate for detection of hydrogen leaks.
Keywords
catalytic combustion sensor; nano crystalline $SnO_2$; micro gas sensor$H_2$ sensitivity$H_2$ selectivity;
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