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http://dx.doi.org/10.3795/KSME-B.2009.33.8.573

Measurements of Thermal Characteristics for a Micro-Fabricated Thermal Mass Air Flow Sensor With Real-Time Controller  

Park, Byung-Kyu (서울대학교 SNU-IAMD)
Lee, Joon-Sik (서울대학교 기계항공공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers B / v.33, no.8, 2009 , pp. 573-579 More about this Journal
Abstract
A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.
Keywords
Thermal Air Flow Sensor; Real-Time Controller; Temperature Difference Control; Microfabrication;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By SCOPUS : 1
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