A Capacitive Type Humidity Sensor Using a Polyimide Film for Hermeticity Measurement of Micro Packages |
Kim, Yong-Ho
(Department of Mechanical Engineering, Yonsei University)
Kim, Yong-Jun (Department of Mechanical Engineering, Yonsei University) Kim, Kyung-Il (Department of Chemical Engineering, Yonsei University) Kim, Joong-Hyun (Department of Chemical Engineering, Yonsei University) |
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