• Title/Summary/Keyword: measurement systems

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An Algorithm for Discontinuous Surface Profile Measurement using Wavelength Scanning Interferometer (파장 주사 간섭계를 이용한 불연속면의 표면 형상 측정 알고리즘)

  • 우현구;강철무;조형석
    • Journal of Institute of Control, Robotics and Systems
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    • v.9 no.7
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    • pp.507-514
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    • 2003
  • Inspection and shape measurement of three-dimensional objects are widely needed in industries for quality monitoring and control. Recently the shape measurement using interferometric principle is found to be a successful methodology among other visual or optical technologies. Especially, the measuring method using wavelength scanning interferometer(WSI) has a great advantage in comparison with other conventional jnterferometric methods in that the absolute distance from the reference surface can be directly obtained from the amount of jnterferometric phase change. However, the measurement methods using WSI proposed by other researchers have low measurement resolution so far because they can't measure fractional phase change. To avoid this shortcoming we propose a new algorithm in this paper, which can obtain a small amount of even fractional phase change by sinusoidal function fitting. To evaluate the effectiveness of the proposed sinusoidal function fitting algorithm, a series of measuring experiments are conducted for discontinuously shaped specimens which have various height. The proposed algorithm shows much more enhanced measurement resolution than other existing conventional algorithms such as zero crossing algorithm and Fourier transform algorithm.

The Effects of IS Strategic Alignment on the Development of IT Infrastructure: The Roles of Strategic Performance Measurement Systems (정보화 전략과 기업 전략의 연계가 정보기술 하부구조 구축에 미치는 영향: 전략적 성과평가시스템의 역할)

  • Choe, Jong-Min
    • The Journal of Information Systems
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    • v.22 no.1
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    • pp.89-116
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    • 2013
  • The influence factors on the development of information technology(IT) infrastructure for knowledge management(KM) were not empirically investigated and identified. This study empirically examines the relationships among strategic performance measurement systems(SPMS), organizational learning, the strategic alignment of business strategy with information systems(IS) strategy, which is the necessary condition to provide the kinds of knowledge required for the successful realization of business strategy, and the active construction of IT infrastructure for KM. This study demonstrates that SPMS directly affects the organizational learning, with which the members of an organization acquire the types of knowledge about strategic goals or objectives and the ways attaining these goals, and indirectly influences the IS strategic alignment through organizational learning. Thus, the alignment between business strategy and IS strategy can be facilitated and activated by the adoption and implementation of SPMS. According to the results of this study, it is observed that the IS strategic alignment and organizational learning positively affect the activation of the development of KM IT infrastructure in a firm. The results of this study also shows that the construction of KM IT infrastructure, which supports the realization of KM activities, such as knowledge creation, transfer and sharing, can enhance the strategic position of a firm, and the intensified competitiveness of a firm can lead to the improvement of performance.

Automated measurement and analysis of sidewall roughness using three-dimensional atomic force microscopy

  • Su‑Been Yoo;Seong‑Hun Yun;Ah‑Jin Jo;Sang‑Joon Cho;Haneol Cho;Jun‑Ho Lee;Byoung‑Woon Ahn
    • Applied Microscopy
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    • v.52
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    • pp.1.1-1.8
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    • 2022
  • As semiconductor device architecture develops, from planar field-effect transistors (FET) to FinFET and gate-all-around (GAA), there is an increased need to measure 3D structure sidewalls precisely. Here, we present a 3-Dimensional Atomic Force Microscope (3D-AFM), a powerful 3D metrology tool to measure the sidewall roughness (SWR) of vertical and undercut structures. First, we measured three different dies repeatedly to calculate reproducibility in die level. Reproducible results were derived with a relative standard deviation under 2%. Second, we measured 13 different dies, including the center and edge of the wafer, to analyze SWR distribution in wafer level and reliable results were measured. All analysis was performed using a novel algorithm, including auto fattening, sidewall detection, and SWR calculation. In addition, SWR automatic analysis software was implemented to reduce analysis time and to provide standard analysis. The results suggest that our 3D-AFM, based on the tilted Z scanner, will enable an advanced methodology for automated 3D measurement and analysis.

Measurement of Electrical Insulating Oil Oxidation by Evaluating the UV Fluorescence Emission Ratio (자외선 형광 방출비 평가에 의한 전기 절연유의 산화측정)

  • Wicaksono, Britantyo;Kong, Hosung;Han, Hung-Gu
    • Tribology and Lubricants
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    • v.29 no.1
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    • pp.51-55
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    • 2013
  • In this work, a new fluorescence emission measurement technology was introduced and experimentally compared with other measurement methods, such as the titration method and IR spectroscopy, to validate it for the oil oxidation measurement of electrical insulating oil. The oxidation characteristics of insulating oil were found to be fairly represented by the titration method and IR spectroscopy, and the results are comparable to a change in the fluorescence emission ratio that is defined as the shift in fluorescence intensity in the measured wavelength range. The result also shows that by the measurement of fluorescence emission ratio, it is possible to detect the oxidation of oil relatively earlier than by other methods. This study suggests that the developed technology can provide sufficient information for evaluating the insulating oil quality, and that the developed FER sensor can be used as an effective condition monitoring device of electrical insulating oil oxidation.

A Development of Recoil & Counter Recoil Motion Measurement System Using LVDT

  • Park, Ju-Ho;Hong, Sung-Soo;Joon Lyou
    • Transactions on Control, Automation and Systems Engineering
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    • v.2 no.3
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    • pp.214-219
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    • 2000
  • This paper presents a recoil and counter recoil motion measurement system using linear variable differential transformers (LVDT). The output of the LVDT is obtained from the differential voltage of the secondary transformers. Since a transducer core is attached to the motion body, the output is directly proportional to the movement length of the core. Displacement, velocity and acceleration are measured from the LVDT. With a comparison between the measurement result and the reference value obtained by the highly accurate Vernier calipers, it is proved that the measurement system with the LVDT is applicable to the test of the moving part of the mechanism with better accuracy.

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Development of a Noncontact Three Dimensional Foot Form Measurement System with a Stereo Vision Method (스테레오 비젼을 이용한 비접촉 3차원 족형 측정 시스템 설계)

  • 김시경
    • Journal of Institute of Control, Robotics and Systems
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    • v.10 no.11
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    • pp.1017-1021
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    • 2004
  • In this paper, a cost-effective integrated 3D system for measuring and sizing foot is proposed. The proposed system employs two CCDs and a laser line projector which are capable of accurately measuring foot. The measurement is based upon the biologically motivated stereo vision principle providing ruggedness against minor system distortions. According to the tolerance, calibration between two different views are implicitly applied. Furthermore, the measurement system employs a measurement base, a frame grabber, a CCD moving cart, a stepping motor and computer. Analysis and design procedure is presented for the calculation of the 3D foot data and the proposed system. Experimental results on the proposed system would verify the concept and system operation.

Centralized Kalman Filter with Adaptive Measurement Fusion: its Application to a GPS/SDINS Integration System with an Additional Sensor

  • Lee, Tae-Gyoo
    • International Journal of Control, Automation, and Systems
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    • v.1 no.4
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    • pp.444-452
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    • 2003
  • An integration system with multi-measurement sets can be realized via combined application of a centralized and federated Kalman filter. It is difficult for the centralized Kalman filter to remove a failed sensor in comparison with the federated Kalman filter. All varieties of Kalman filters monitor innovation sequence (residual) for detection and isolation of a failed sensor. The innovation sequence, which is selected as an indicator of real time estimation error plays an important role in adaptive mechanism design. In this study, the centralized Kalman filter with adaptive measurement fusion is introduced by means of innovation sequence. The objectives of adaptive measurement fusion are automatic isolation and recovery of some sensor failures as well as inherent monitoring capability. The proposed adaptive filter is applied to the GPS/SDINS integration system with an additional sensor. Simulation studies attest that the proposed adaptive scheme is effective for isolation and recovery of immediate sensor failures.

Development of 2 Division Illuminance Measurement Mobile Systems (차량을 이용한 2분할 조도측정시스템의 개발)

  • Jo, Deok-Soo;Lee, Chang-Mo;Jung, Seung-Gyun;Seok, Doe-Il;Kim, Hoon
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.22 no.1
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    • pp.1-6
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    • 2008
  • It is important to grasp the accurate lighting level for appropriate maintenance of the road lighting equipment. It is developed 2 division illuminance measurement systems. This system has a small size and no need to block the way and achieves the speedy measurement and high accuracy data in automatically measurement. As a result, this system can save expense and time to measure roadway lighting.

3-D Measurement of LED Packages Using Phase Measurement Profilometry (위상측정법을 이용한 LED Package의 3차원 형상 측정)

  • Koo, Ja-Myoung;Cho, Tai-Hoon
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.1
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    • pp.17-22
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    • 2011
  • LEDs(Light Emitting Diodes) are becoming widely used and increasingly in demand. Quality inspection of the LEDs has become more important. Two-dimensional inspection systems are limited in inspection capability, so threedimensional(3-D) inspection systems are needed. In this paper, a cost-effective and simple 3-D measurement system of LED packages using phase measuring profilometry(PMP) is proposed. The proposed system uses a pico projector to project sinusoidal fringe patterns and to shift phases instead of piezocrystal. It was evaluated using extremely accurate gauge blocks, yielding excellent repeatability of about 12 um(3-sigma). 3-D measurements of various LED packages were performed to demonstrate the applicability and efficiency of the proposed system.

Adaptive predictive control of systems with multiplexed measurements (멀티플렉스방식의 측정장치가 있는 시스템의 적응예측제어)

  • 지규인
    • 제어로봇시스템학회:학술대회논문집
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    • 1993.10a
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    • pp.145-149
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    • 1993
  • This paper considers the adaptive predictive control problem of a system characterized by a multiplexed measurements and multirate sampling mechanism. Plant outputs are measured in various sampling rates through a multiplexed measurement system where a single common instrument is shared by several controllers. In general, output measurement sampling rate is assumed to be slower that input update rate. An adaptive predictive control algorithm is developed for systems with multiplexed measurements.

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