Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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3-D Measurement of LED Packages Using Phase Measurement Profilometry

위상측정법을 이용한 LED Package의 3차원 형상 측정

  • Koo, Ja-Myoung (Dept. of Electrical and Electronics Engineering, Korea University of Technology and Education) ;
  • Cho, Tai-Hoon (School of Computer Engineering, Korea University of Technology and Education)
  • 구자명 (한국기술교육대학교 전기전자공학과) ;
  • 조태훈 (한국기술교육대학교 컴퓨터공학부)
  • Received : 2011.01.05
  • Accepted : 2011.02.28
  • Published : 2011.03.31
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Abstract

LEDs(Light Emitting Diodes) are becoming widely used and increasingly in demand. Quality inspection of the LEDs has become more important. Two-dimensional inspection systems are limited in inspection capability, so threedimensional(3-D) inspection systems are needed. In this paper, a cost-effective and simple 3-D measurement system of LED packages using phase measuring profilometry(PMP) is proposed. The proposed system uses a pico projector to project sinusoidal fringe patterns and to shift phases instead of piezocrystal. It was evaluated using extremely accurate gauge blocks, yielding excellent repeatability of about 12 um(3-sigma). 3-D measurements of various LED packages were performed to demonstrate the applicability and efficiency of the proposed system.

Keywords

References

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