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3-D Measurement of LED Packages Using Phase Measurement Profilometry  

Koo, Ja-Myoung (Dept. of Electrical and Electronics Engineering, Korea University of Technology and Education)
Cho, Tai-Hoon (School of Computer Engineering, Korea University of Technology and Education)
Publication Information
Journal of the Semiconductor & Display Technology / v.10, no.1, 2011 , pp. 17-22 More about this Journal
Abstract
LEDs(Light Emitting Diodes) are becoming widely used and increasingly in demand. Quality inspection of the LEDs has become more important. Two-dimensional inspection systems are limited in inspection capability, so threedimensional(3-D) inspection systems are needed. In this paper, a cost-effective and simple 3-D measurement system of LED packages using phase measuring profilometry(PMP) is proposed. The proposed system uses a pico projector to project sinusoidal fringe patterns and to shift phases instead of piezocrystal. It was evaluated using extremely accurate gauge blocks, yielding excellent repeatability of about 12 um(3-sigma). 3-D measurements of various LED packages were performed to demonstrate the applicability and efficiency of the proposed system.
Keywords
LED inspection; 3-D measurement system; phase measurement profilometry; PMP;
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