• 제목/요약/키워드: inter-diffusion

검색결과 161건 처리시간 0.032초

산소가 첨가된 Cr 박막의 NH3 분위기에서의 질화 처리에 의한 구조적 특성 (Structural Characteristics by Nitridation of Oxygen Added Cr Thin Films in NH3 Atmosphere)

  • 김단비;김선태
    • 한국재료학회지
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    • 제31권11호
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    • pp.635-641
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    • 2021
  • Cr thin films with O added are deposited on sapphire substrate by DC sputtering and are nitrided in NH3 atmosphere between 300 and 900 ℃ for various times. X-ray diffraction results show that nitridation begins at 500 ℃, forming CrN and Cr2N. Cr oxides of Cr2O3 are formed at 600 ℃. And, at temperatures higher than 900 ℃, the intermediate materials of Cr2N and Cr2O3 disappear and CrN is dominant. The atomic concentration ratios of Cr and O are 77% and 23%, respectively, over the entire thickness of as-deposited Cr thin film. In the sample nitrided at 600 ℃, a CrN layer in which O is substituted with N is formed from the surface to 90 nm, and the concentrations of Cr and N in the layer are 60% and 40%, respectively. For this reason, CrN and Cr2N are distributed in the CrN region, where O is substituted with N by nitridation, and Cr oxynitrides are formed in the region below this. The nitridation process is controlled by inter-diffusion of O and N and the parabolic growth law, with activation energy of 0.69 eV.

Photo-induced inter-protein interaction changes in the time domain; a blue light sensor protein PixD

  • Terazima, Masahide
    • Rapid Communication in Photoscience
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    • 제4권1호
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    • pp.1-8
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    • 2015
  • For understanding molecular mechanisms of photochemical reactions, in particular reactions of proteins with biological functions, it is important to elucidate both the initial reactions from the photoexcited states and the series of subsequent chemical reactions, e.g., conformation, intermolecular interactions (hydrogen bonding, hydrophobic interactions), and inter-protein interactions (oligomer formation, dissociation reactions). Although time-resolved detection of such dynamics is essential, these dynamics have been very difficult to track by traditional spectroscopic techniques. Here, relatively new approaches for probing the dynamics of protein photochemical reactions using time-resolved transient grating (TG) are reviewed. By using this method, a variety of spectrally silent dynamics can be detected and such data provide a valuable description about the reaction scheme. Herein, a blue light sensor protein TePixD is the exemplar. The initial photochemistry for TePixD occurs around the chromophore and is detected readily by light absorption, but subsequent reactions are spectrally silent. The TG experiments revealed conformational changes and changes in inter-protein interactions, which are essential for TePixD function. The TG experiments also showed the importance of fluctuations of the intermediates as the driving force of the reaction. This technique is complementary to optical absorption detection methods. The TG signal contains a variety of unique information, which is difficult to obtain by other methods. The advantages and methods for signal analyses are described in detail in this review.

Physics-based modelling and validation of inter-granular helium behaviour in SCIANTIX

  • Giorgi, R.;Cechet, A.;Cognini, L.;Magni, A.;Pizzocri, D.;Zullo, G.;Schubert, A.;Van Uffelen, P.;Luzzi, L.
    • Nuclear Engineering and Technology
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    • 제54권7호
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    • pp.2367-2375
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    • 2022
  • In this work, we propose a new mechanistic model for the treatment of helium behaviour at the grain boundaries in oxide nuclear fuel. The model provides a rate-theory description of helium inter-granular behaviour, considering diffusion towards grain edges, trapping in lenticular bubbles, and thermal resolution. It is paired with a rate-theory description of helium intra-granular behaviour that includes diffusion towards grain boundaries, trapping in spherical bubbles, and thermal re-solution. The proposed model has been implemented in the meso-scale software designed for coupling with fuel performance codes SCIANTIX. It is validated against thermal desorption experiments performed on doped UO2 samples annealed at different temperatures. The overall agreement of the new model with the experimental data is improved, both in terms of integral helium release and of the helium release rate. By considering the contribution of helium at the grain boundaries in the new model, it is possible to represent the kinetics of helium release rate at high temperature. Given the uncertainties involved in the initial conditions for the inter-granular part of the model and the uncertainties associated to some model parameters for which limited lower-length scale information is available, such as the helium diffusivity at the grain boundaries, the results are complemented by a dedicated uncertainty analysis. This assessment demonstrates that the initial conditions, chosen in a reasonable range, have limited impact on the results, and confirms that it is possible to achieve satisfying results using sound values for the uncertain physical parameters.

기판온도와 열처리온도의 변화에 따른 Au/Cr, Au/Ni/Cr 및 Au/Pd/Cr 다층박막의 AES 분석 (AES Analysis of Au, Au/Cr, Au/Ni/Cr and Au/Pd/Cr Thin Films by the Change of Substrate Temperature and Annealing Temperature)

  • 유광수;정형진
    • 분석과학
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    • 제6권2호
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    • pp.217-223
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    • 1993
  • 저항가열식 진공중착기를 이용하여 실온(ambient temp.)과 $250^{\circ}C$에서 알루미나 기판 위에 Au/Cr, Au/Ni/Cr 및 Au/Pd/Cr 박막을 제조하였으며, 공기 중에서 $300^{\circ}C$, $450^{\circ}C$, $600^{\circ}C$의 온도로 각각 1시간 동안 열처리하였다. Au, Ni(또는 Pd) 및 Cr 박막의 두께는 각각 $1000{\AA}$, $300{\AA}$, 및 $50{\AA}$이었다. 박막 제조시 기판의 온도와 박막 제조 후 열처리 온도는 각 층의 상호확산으로 인하여 박막의 면저항값에 영향을 주었다. Auger depth profile 분석결과, Au/Cr 시스템에서는 기판의 온도는 $250^{\circ}C$로 하여 박막을 제조할 때 이미 Cr은 Au 표면으로 확산되었으며, 열처리 후에는 Au의 분포도만 변화하였다. Au/Ni/Cr과 Au/Pd/Cr 시스템의 경우 Ni와 Pd 모두 확산현상이 발견되었으며, 특히 Ni(약 45 at.%)는 Au 박막 표면으로 확산되어 산화되었다.

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왕권과 교권의 대립을 통해 본 신대륙의 가톨릭 전파과정 연구 (The study on the diffusion of Catholicism in the New World: focused on the relationship between the king and the pope)

  • 이성훈
    • 비교문화연구
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    • 제37권
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    • pp.7-29
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    • 2014
  • The 'discovery' or 'conquest' of the New World in 1492 was the starting point of world history that irrevocably changed the fate of the Latin American continent. The global stream known as 'Columbian Exchange', which was the widespread inter-continental contacts, inter-civilizational conflicts, or bilateral communication, has rendered multifarious effects throughout many historical periods up to the very contemporary time. The propagation of Catholicism initiated along with this 'discovery' transformed Latin America of nowadays in the region that has the biggest Catholic population in the world. The previous studies in Korea regarding Latin American Catholicism has focused on the spread of Catholicism in relation to the European colonization, rather than analyzing the concrete and detailed ways in which Catholicism exerted tremendous influences in the whole continent. They were less attentive to various historical contexts in which the diffusion of Catholicism differed greatly according to cultural landscapes and political specificities. Thus, this essay attempts to examine the diffusion of Catholicism from the perspective of confrontation between royal authorities and the power of church. The essay points out that the royal communities and institutional authorities which facilitated the intial process of Catholic evangelization maintained antagonistic relationship with ecclesial powers. By delving into the gradual transformation of church systems, it reveals that Catholicism in Latin America became a major field for conquerors in power to attain economic and political dominance. And unlike the initial submission and hospitality, the religious convert of the indigenous people attested to the violent inhumanity and opposition. Therefore, the essay aims to pave a clearer way to the understanding of complicated dynamics and conflicts between Catholicism in Latin America and the establishment of Spanish colonization.

정보통신 기술지식의 파급효과에 대한 실증분석 (An Empirical Analysis on the Diffusion Impact of IT Technological Knowledge)

  • 조형곤;박광만;이영용;박용태;김문수
    • 기술혁신연구
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    • 제8권1호
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    • pp.73-94
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    • 2000
  • The main objective of this research is to examine the spillover effects of technological knowledge from IT industry to other industrial sectors and, based on empirical findings, to draw policy implications and suggest policy directions. To this end, we divide IT industry into IT equipment and IT service, assuming that these two sub-sectors are considerably different each other in terms of technology knowledge flow. Other industries are classified into 17 different sectors based on the KSIC of 1990. As the proxy measure of technological knowledge, the notion of R&D stock is employed. The Input/output(I/O) Table is used to define the inter-industrial flow pattern and to draw the knowledge flow matrix. As the research methodology, cost function model is employed to gauge the spillover effects of technological knowledge of IT industry. Based on the results of analysis, it is found that the economic impact of technology diffusion also exhibits a different pattern between IT equipment and IT service. The diffusion of IT equipment tends to show labor-substitution effect whereas IT service displays labor-creation effect. This fact should be considered in devising industry, education, and labor policy. The expectations from this research are as follows. First, the sectoral pattern, difference between IT equipment and service in particular, identified from this research may shed light on the sector-specific policy direction. It is emphasized that a sector-specific approach, rather than an aggregate approach, is relevant for formulating IT policy. Second, it is expected that the importance of technology diffusion programs and policy measures are recognized among policy makers in IT industry.

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NiSi 접촉과 Cu 플러그/Ti 확산방지층의 동시 형성 연구 (Simultaneous Formation of NiSi Contact and Cu Plug/Ti Barrier)

  • 배규식
    • 한국재료학회지
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    • 제20권6호
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    • pp.338-343
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    • 2010
  • As an alternative to the W plug used in MOSFETs, a Cu plug with a NiSi contact using Ta / TaN as a diffusion barrier is currently being considered. Conventionally, Ni was first deposited and then NiSi was formed, followed by the barrier and Cu deposition. In this study, Ti was employed as a barrier material and simultaneous formation of the NiSi contact and Cu plug / Ti barrier was attempted. Cu(100 nm) / Ti / Ni(20 nm) with varying Ti thicknesses were deposited on a Si substrate and annealed at $4000^{\circ}C$ for 30 min. For comparison, Cu/Ti/NiSi thin films were also formed by the conventional method. Optical Microscopy (OM), Scanning Probe Microscopy (SPM), X-Ray Diffractometry (XRD), and Auger Electron Microscopy (AES) analysis were performed to characterize the inter-diffusion properties. For a Ti interlayer thicker than 50 nm, the NiSi formation was incomplete, although Cu diffusion was inhibited by the Ti barrier. For a Ti thickness of 20 nm and less, an almost stoichiometric NiSi contact along with the Cu plug and Ti barrier layers was formed. The results were comparable to that formed by the conventional method and showed that this alternative process has potential as a formation process for the Cu plug/Ti barrier/NiSi contact system.

Cu 금속배선을 위한 카본-질소-텅스텐 확산방지막 특성 (Characteristics of W-C-N Thin Diffusion Barrier for Cu Interconnection)

  • 이창우
    • 마이크로전자및패키징학회지
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    • 제12권4호통권37호
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    • pp.345-349
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    • 2005
  • 300 mW-cm의 낮은 비저항을 갖는 카본-질소$\_$텅스텐 (W-C-N) 확산방지막을 원자층 증착법으로 제조하였으며, 반응기체로 $WF_6-N_2-CH_4$를 사용하였다. $N_2$$CH_4$ 반응기체를 주입 할 때는 고주파 펄스를 인가하여 플라즈마에 의한 반응물의 분리가 일어나도록 하였다. 다층금속배선에 사용하는 층간 절연층 (TEOS) 위에서 W-C-N 박막은 원자층 증착기구를 따르며, 10에서 100 사이클 동안 증착율이 0.2nm/cycles 로 일정한 값을 가진다. 또한 Cu 배선을 위한 확산방지막으로써 W-C-N 박막은 비정질 상을 가지며, $800^{\circ}C$에서 30분간 열처리해도 Cu의 확산을 충분히 방지할 수 있음을 확인하였다.

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Solid-state sintering mechanism of blended elemental Ti-6Al-4V powders

  • Kim, Youngmoo;Song, Young-Beom;Lee, Sung Ho
    • 한국분말재료학회지
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    • 제25권2호
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    • pp.109-119
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    • 2018
  • The objective of this study is to reveal the sintering mechanism of mixed Ti-6Al-4V powders considering the densification and the homogenization between Ti and Al/V particles. It is found that the addition of master alloy particles into Ti enhances densification by the migration of Al into the Ti matrix prior to the self-diffusion of Ti. However, as Ti particles become coarser, sintering of the powders appears to be retarded due to slower inter-diffusion of the particles due to the reduced surface energies of Ti. Such phenomena are confirmed by a series of dilatometry tests and microstructural analyses in respect to the sintering temperature. Furthermore, the results are also consistent with the predicted activation energies for sintering. The energies are found to have decreased from 299.35 to $135.48kJ{\cdot}mol^{-1}$ by adding the Al/V particles because the activation energy for the diffusion of Al in ${\alpha}-Ti$ ($77kJ{\cdot}mol^{-1}$) is much lower than that of the self-diffusion of ${\alpha}-Ti$. The coarser Ti powders increase the energies from 135.48 to $181.16kJ{\cdot}mol^{-1}$ because the specific surface areas of Ti decrease.

IT수용 및 확산관련 추진동기, IT저항, 변화관리에 관한 다중사례연구: 자동차산업의 PLM적용사례 중심으로 (Multiple Cases Study on the Motivation, IT Resistance and Change Management for IT Acceptance and Diffusion: focused on Automotive Industry PLM Cases)

  • 한석희;이윤철
    • 경영정보학연구
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    • 제10권3호
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    • pp.257-287
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    • 2008
  • IT의 기업 내 수용과 확산의 과정에서 나타나는 추진동기(motivation)와 IT저항 그리고 변화관리의 관계를 Product Lifecycle Management(PLM)를 적용하는 9개 자동차기업의 15개 의 다중사례를 기반으로 다루었다. 이를 통해서 추진동기가 IT의 조직 내 확산에 미치는 영향과 IT저항과의 역학적 관계, 그리고 이 과정에서의 변화관리의 역할과 그 중요성을 고찰하기 위한 탐색적 모델이 제안되었다. 또 추진동기에 영향을 미치는 요인으로서 (1)경쟁, 불확실성, 경향, 상호연결성과 같은 환경적요인, (2)중앙집중성, 규모, 리더, 혁신후원가 및 복잡성과 같은 조직적요인, (3)인지된용의성, 인지된유익성과 같은 기술적 요인들을 살펴보았고, 이와 관련된 주요 명제 6가지를 제안하였다. 여기서 추진동기가 IT저항을 충분히 극복할 경우에 수용 및 확산이 지속되고, 변화관리가 이 과정에서 추진동기에 정(+)의 작용을 하고, IT저항을 줄이는 방향으로 전개되는 것이 중요함이 논의되었으며, 환경요인, 조직요인 및 기술요인이 추진동기에 미치는 영향이 있음이 구체적으로 관찰되었다. 이를 통해서 IT의 조직 내 수용과 확산을 위한 요소들에 대한 정의와 그 시사점을 제시하였고, 특별히 PLM과 관련된 향후의 연구기반을 제공할 수 있었다.