• Title/Summary/Keyword: high doping concentration

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Examination of Diffusion Process for High-speed Avalanche Photodiode Fabrication

  • Ilgu Yun;Hyun, Kyujg-Sook;Kwon, Yong-Hwan;Pyun, Kwang-Eui
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.11
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    • pp.954-958
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    • 2000
  • The characterization of zinc diffusion processes applied for high-speed avalanche photodiodes has been examined. The different diffusion process conditions for InP test structures were explored. The zinc diffusion profiles, such as the diffusion depth and the zinc dopant concentration, were examined using secondary ion mass spectrometry with varying the process variables and material parameters. It is observed that the diffusion profiles are severly impacted on the process parameters, such as the amount of Zn$_3$P$_2$ source and the diffusion time, as well as material parameters, such as doping concentration of diffusion layer. These results can be utilized for the high-speed avalanche photodiode fabrication.

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Optimization of Double Gate Vertical Channel Tunneling Field Effect Transistor (DVTFET) with Dielectric Sidewall

  • WANG, XIANGYU;Cho, Wonhee;Baac, Hyoung Won;Seo, Dongsun;Cho, Il Hwan
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.17 no.2
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    • pp.192-198
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    • 2017
  • In this paper, we propose a novel double gate vertical channel tunneling field effect transistor (DVTFET) with a dielectric sidewall and optimization characteristics. The dielectric sidewall is applied to the gate region to reduced ambipolar voltage ($V_{amb}$) and double gate structure is applied to improve on-current ($I_{ON}$) and subthreshold swing (SS). We discussed the fin width ($W_S$), body doping concentration, sidewall width ($W_{side}$), drain and gate underlap distance ($X_d$), source doping distance ($X_S$) and pocket doping length ($X_P$) of DVTFET. Each of device performance is investigated with various device parameter variations. To maximize device performance, we apply the optimum values obtained in the above discussion of a optimization simulation. The optimum results are steep SS of 32.6 mV/dec, high $I_{ON}$ of $1.2{\times}10^{-3}A/{\mu}m$ and low $V_{amb}$ of -2.0 V.

Fabrication and Characteristics of Li-doped ZnO Thin Films for SAW Filter Applications

  • Ha, Jae-Soo;Kim, Kwang-Ho
    • The Korean Journal of Ceramics
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    • v.3 no.2
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    • pp.110-115
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    • 1997
  • Li-doped ZnO films were prepared on Corning 1737 glass substrate by an rf magnetron sputtering technique using ZnO targets with various $Li_2CO_3$ contents ranging from 0 to 10 mol%. The effects of Li doping on the crystallinity and electrical properties of ZnO films were studied for their SAW filter applications. The film resistivity largely increased without suppressing the c-axis orientation and crystallinity with a small addition of Li. Heat treatment of the film at 40$0^{\circ}C$ induced that the film resistivity, c-axis orientation and crystallinity slightly increased. However, heat treatment of the film at 50$0^{\circ}C$ resulted in much lower resistivity than that of as-deposited film due to the increase of electron concentration caused by the evaporationof Li atoms from the ZnO film. Large addition of Li into the ZnO film rather diminished the film resistivity and suppressed the c-axis growth. It was concluded that a small doping of Li into the ZnO film and heat treatment at 40$0^{\circ}C$ caused the film resistivity to be high enough for SAW filter applications without suppression of the c-axis orientation and crystallinity.

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Significant enhancement of critical current density by effective carbon-doping in MgB2 thin films

  • Ranot, Mahipal;Lee, O.Y.;Kang, W.N.
    • Progress in Superconductivity and Cryogenics
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    • v.15 no.2
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    • pp.12-15
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    • 2013
  • The pure and carbon (C)-doped $MgB_2$ thin films were fabricated on $Al_2O_3$ (0001) substrates at a temperature of $650^{\circ}C$ by using hot-filament-assisted hybrid physical-chemical vapor deposition technique. The $T_c$ value for pure $MgB_2$ film is 38.5 K, while it is between 30 and 35 K for carbon-doped $MgB_2$ films. Expansion in c-axis lattice parameter was observed with increase in carbon doping concentration which is in contrast to carbon-doped $MgB_2$ single crystals. Significant enhancement in the critical current density was obtained for C-doped $MgB_2$ films as compared to the undoped $MgB_2$ film. This enhancement is most probably due to the incorporation of C into $MgB_2$ and the high density of grain boundaries, both help in the pinning of vortices and result in improved superconducting performance.

Mn-doping Effect on the Blackness and NIR Reflectance of Fe2O3 Cool Pigments (Mn 도핑이 Fe2O3 쿨 안료의 흑색도 및 NIR 반사율에 미치는 영향)

  • Hwang, Jin Soo;Jung, Kyeong Youl
    • Journal of Powder Materials
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    • v.28 no.1
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    • pp.38-43
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    • 2021
  • A high NIR-reflective black pigment is developed by Mn doping of Fe2O3. The pigment powders are prepared by spray pyrolysis, and the effect of the Mn concentration on the blackness and optical properties is investigated. Mn doping into the crystal lattice of α-Fe2O3 is found to effectively change the powder color from red to black, lowering the NIR reflectance compared to that of pure Fe2O3. The pigment doped with 10% Mn, i.e., Fe1.8Mn0.2O3, exhibits a black color with an optical bandgap of 1.3 eV and a Chroma value of 1.14. The NIR reflectance of the prepared Fe1.8Mn0.2O3 black pigment is 2.2 times higher than that of commercially available carbon black, and this material is proven to effectively work as a cool pigment in a temperature rise experiment under near-infrared illumination.

A New Trench Termination for Power Semiconductor Devices (전력소자를 위한 새로운 홈구조 터미네이션)

  • Min, W.G.;Park, N.C.
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1337-1339
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    • 1998
  • The trench termination scheme is introduced for high voltage devices. The curvature of the depletion region at field limiting ring is critical factor to determine the breakdown voltage. The smooth curvature of the depletion junction alleviate the electric field crowding effect around this region. In the trench field limiting ring, the radius of the depletion region is smaller than conventional field limiting ring, but the distance between every trench is spaced small enough to punchthrough before initiation of local breakdown. The trench field limiting ring on silicon can ne formed by RIE followed by oxidation on side wall surface of the trench, and polysilicon filling. The combined termination of this trench floating field ring and field plate have been designed and analyzed. The breakdown simulation by 2-dimensional TCAD shows that the cylindrical junction breakdown voltage for substrate doping might be 99 percent of the ideal breakdwon voltage for substrate doping concentration of $3\times10^{14}cm^{-3}$ with about $100{\mu}m$ of lateral termination width.

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The Fabrication of the White Organic Light Emitting Devices by varying the Doping Concentrations of DCM in ITO/$\alpha$-NPD:DCM/$\alpha$-NPD/BCP/$Alq_3$/Al (ITO/$\alpha$-NPD:DCM/$\alpha$-NPD/BCP/$Alq_3$/Al 구조에서의 DCM의 도핑농도에 따른 유기 백색발광소자 구현)

  • 최성진;조재영;윤석범;오환술
    • Proceedings of the IEEK Conference
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    • 2003.07b
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    • pp.999-1002
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    • 2003
  • In this study, the white organic light emitting device was fabricated using ITO/a-NPD:DCM/a-NPD/BCP/Alq3/Al structure. Blue emission by a-NPD and orange emission by energy transfer between a-NPD and DCM embodied the white emission. The optimal structure of the white OLED is ITO/a-NPD:DCM(50$\square$)/a-NPD(150$\AA$)/BCP(100$\square$)/Alq$_3$(200$\square$)/Al. We varied the doping concentration of DCM properly and obtained high purity white emitting light. The CIE coordinate and maximum luminance of the devices was obtained (0.310, 0.333) and 400cd/$m^2$ at 11Volt.

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Local oxidation of 4H-SiC using an atomic force microscopy (Atomic Force Microscopy을 이용한 4H-SiC의 Local Oxidation)

  • Jo, Yeong-Deuk;Bahng, Wook;Kim, Sang-Cheol;Kim, Nam-Kyun;Koo, Sang-Mo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.04b
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    • pp.79-80
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    • 2009
  • The local oxidation using an atomic force microscopy (AFM) is useful for Si-base fabrication of nanoscale structures and devices. SiC is a wide band-gap material that has advantages such as high-power, high-temperature and high-frequency in applications, and among several SiC poly types, 4H-SiC is the most attractive poly type due to the high electron mobility. However, the AFM local oxidation of 4H-SiC for fabrication is still difficult, mainly due to the physical hardness and chemical inactivity of SiC. In this paper, we investigated the local oxidation of 4H-SiC surface using an AFM. We fabricated oxide patterns using a contact mode AFM with a Pt/Ir-coated Si tip (N-type, $0.01{\sim}0.025\;{\Omega}cm$) at room temperature, and the relative humidity ranged from 40 to 50%. The height of the fabricated oxide pattern ($1{\sim}3\;nm$) on SiC is similar to that of typically obtained on Si ($10^{15}{\sim}10^{17}\;cm^{-3}$). We perform the 2-D simulation to further analyze the electric field between the tip and the surface. Whereas the simulated electric field on Si surface is constant ($5\;{\times}\;10^7\;V/m$), the electric field on SiC surface increases with increasing the doping concentration from ${\sim}10^{15}$ to ${\sim}10^{17}\;cm^{-3}$. We demonstrated that a specific electric field ($4\;{\times}\;10^7\;V/m$) and a doping concentration (${\sim}10^{17}\;cm^{-3}$) is sufficient to switch on/off the growth of the local oxide on SiC.

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The Concentrations and TEQ Levels of PCDFs and PCDDs in Human Adipose Tissue and First Breast Milk of Korean (체지방 조직 및 초유중에 잔류되어 있는 다이옥신 함유도에 관한 연구)

  • Kim, Yunje;Lee, Sun Young;Han, Soon Young;Park, Kui Lea;Kil, Kwang Sup;Yang, Kyu Hwan;Kim, Eun Kyung;Kim, Myungsoo
    • Analytical Science and Technology
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    • v.14 no.6
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    • pp.504-509
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    • 2001
  • The concentrations and TEQ levels of PCDFs/PCDDs in human aipose tissue and first breast milk were analyzed by high resolution gas chromatography/high resolution mass spectrometry. The human adipose tissue samples measured in this study have been collected at hospital in Seoul. The total concentration and TEQ level of PCDFs were showed 5.812 pg/g and 1.485 pgTEQ/g. The total concentration and TEQ level of PCDDs were showed 26.648 pg/g and 1.176 pgTEQ/g, respectively. This paper also reported dioxin levels in 20 breast milks of Korean mothers from hospital in Seoul National University. Total concentration and TEQ levels of PCDFs were showed 7.019 pg/mL and 0.177 pgTEQ/mL, respectively. Total concentrations and TEQ levels of PCDDs were showed 14.224 pg/mL and 0.693 pgTEQ/mL, respectively. According to the contribution of dioxin congeners in samples, PCDDs was higher than PCDFs. And OCDD had the highest concentration.

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Optimization of Tunneling FET with Suppression of Leakage Current and Improvement of Subthreshold Slope (누설전류 감소 및 Subthreshold Slope 향상을 위한 Tunneling FET 소자 최적화)

  • Yoon, Hyun-kyung;Lee, Jae-hoon;Lee, Ho-seong;Park, Jong-tae
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2013.10a
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    • pp.713-716
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    • 2013
  • The device performances of N-channel Tunneling FET have been characterized with different intrinsic length between drain and gate($L_{in}$), drain and source doping, permittivity and oxide thickness when the total effective channel length is constant. N-channel Tunneling FET of SOI structure have been used in characterization. $L_{in}$ was from 30nm to 70nm, dose concentration of drain and source were from $2{\times}10^{12}cm^{-2}$ to $2{\times}10^{15}cm^{-2}$ and from $1{\times}10^{14}cm^{-2}$ to $3{\times}10^{15}cm^{-2}$, permittivity was from 3.9 to 29, and oxide thickness was from 3nm to 9nm. The device performances were characterized by Subthreshold slope(S-slope), On/off ratio, and leakage current. From the simulation results, the leakage current have been reduced for long $L_{in}$ and low drain doping. S-slope have been reduced for high source doping, high permittivity and thin oxide thickness. With considering the leakage current and S-slope, it is desirable that are long $L_{in}$, low drain doping, high source doping, high permittivity and thin oxide thickness to optimize device performance in n-channel Tunneling FET.

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