• 한국재료학회지
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• 제30권2호
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• pp.99-104
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• 2020

Recent discoveries of ferroelectric properties in ultrathin doped hafnium oxide (HfO₂) have led to the expectation that HfO₂ could overcome the shortcomings of perovskite materials and be applied to electron devices such as Fe-Random access memory (RAM), ferroelectric tunnel junction (FTJ) and negative capacitance field effect transistor (NC-FET) device. As research on hafnium oxide ferroelectrics accelerates, several models to analyze the polarization switching characteristics of hafnium oxide ferroelectrics have been proposed from the domain or energy point of view. However, there is still a lack of in-depth consideration of models that can fully express the polarization switching properties of ferroelectrics. In this paper, a Zr-doped HfO₂ thin film based metal-ferroelectric-metal (MFM) capacitor was implemented and the polarization switching dynamics, along with the ferroelectric characteristics, of the device were analyzed. In addition, a study was conducted to propose an applicable model of HfO₂-based MFM capacitors by applying various ferroelectric switching characteristics models.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제53권7호
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• pp.377-381
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• 2004

A discharge plasma reactor using a ferroelectric pellet packed bed is now used as a removal means of pollutant gases, such as NOx, SOx and VOCs. When an ac voltage is applied to this plasma reactor, then the pellets are polarized, and great electric fields are formed at each top and bottom contact points of the ferroelectric pellets. Thus the points of each pellet become covered with intense corona discharges, where an electrophysicochemical reaction is taking place strongly However these strong discharges also elevate the temperature of the pellets greatly and concurrently decrease the output ozone generation, as a result, the overall removal efficiency of gas becomes decreased greatly A new configuration of discharge plasma reactor using a ferroelectric pellet layer and a wire-to-wire electrode has been proposed and investigated experimentally. It is found that an intensive microdischarge is taking place on the surface of ac corona-charged ferroelectric pellet layer of the proposed reactor, which concurrently enhances the efficiency of plasma generation greatly And, this type of configuration of plasma reactor utilizing a wire-to-wire electrode and a ferroelectric pellet layer could be used as one of effective plasma reactors to remove pollutant gas.

• 전기전자학회논문지
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• 제25권4호
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• pp.770-773
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• 2021

본 논문에서는 tapering과 ferroelectric(HfO₂)구조가 적용된 3D NAND flash memory의 프로그램 이후 시간경과에 따른 retention특징을 분석했다. Nitride에 trap된 전자는 시간이 지남에 따라 lateral charge migration이 발생한다. 프로그램 이후 시간이 지남에 따라 trap된 전자가 tapering에 의해 두꺼워진 채널 쪽으로 lateral charge migration이 더 많이 발생하는 것을 확인했다. 또한 Oxide-Nitride-Ferroelectric (ONF) 구조는 polarization에 의해 lateral charge migration이 완화되기 때문에 기존 Oxide-Nitride-Oxide (ONO) 구조 보다 문턱전압(V_th)의 변화량이 줄어든다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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• pp.1236-1239
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• 2004

We developed a new cholesteric material for bistable LCDs. The material consists of dispersion of sub-micron ferroelectric particles in cholesteric host. We found that the doping of the cholesteric with ferroelectric particles in small concentration (< 1% by weight) strongly improved basic characteristics of the transition between poly-domain planar texture and focal conic texture. Decrease of the driving voltage, increase of the reflection contrast and the steepness of the transition is associated with giant steady dipole and dielectric constant of the ferroelectric particles.

• 대한전자공학회논문지
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• 제26권7호
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• pp.83-89
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• 1989

강유전성 $PbTiO_3$ 박막을 rf스터링으로 기판온도 $100{\sim}150^{\circ}C$에서 형성시켰다. 이 박막의 구조는 X선 회절결과 비정질 형태로 파이로클로어 구조를 갖고 있었다. 이 박막을 열에 의해 어닐링한 경우는 $550^{\circ}C$에서, 레이저의 주사로 어닐링한 경우는 레이저 출력이 50watts일때 가장 우수한 결정 구조를 구할 수 있었다. 집합에서의 계면 특성을 구하기 위하여 MFS(metal-ferroelectric-semiconductor)및 MFOS(metal-ferroelectric-oxide-semiconductor) 구조를 형성하여 C-V특성을 조사하였다. 이때 MFS보다 MFOS의 경우가 Si표면에 sputter에 의한 결함이 작음을 알 수 있었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2000년도 추계학술발표강연 및 논문개요집
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• pp.39-39
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• 2000

• 한국결정성장학회지
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• 제14권4호
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• pp.151-154
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• 2004

Issues of ferroelectric high-density memories (>64 Mb) indispensable for upcoming ubiquitous era have been on the cell integration less than $0.1\;\mu\textrm{m}^2$ and reliabilities. Thus nanoscale control of microstructures of ferroelectric films with large switching polarization has been one of the issues to obtain the uniform electrical properties for realization of high-density memories. In this study the grain orientations and distributions of BT-based films by spin-on coatings were examined by FEG-SEM/EBSD. Ferroelectric domain characteristics by PFM were also performed to study the dependence of reliabilities on the grain orientations and distributions. It is believed that understandings of the nucleation and growth mechanisms of the a- or b-axis oriented films during the thermal processes such as RTA and furnace annealing affecting on grain orientation and uniformity could be possible based on our experimental results.

• 한국표면공학회지
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• 제35권3호
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• pp.127-132
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• 2002

High speed performance of ferroelectric Pb(Zr,Ti)$O_3$ (PZT) based capacitors is reported. La substitution up to 10% was performed to systematically lower the coercive and saturation voltages of epitaxial ferroelectric capacitors grown on Si using a ($Ti_{0.9}$ /$Al_{0.1}$ )N/Pt conducting barrier composite. Ferroelectric capacitors substituted with 10% La show significantly lower coercive voltage compared to capacitors with 0% and 3% La. This is attributed to a systematic decrease in the tetragonality (i.e., c/a ratio) of the ferroelectric phase. Furthermore, the samples doped with 10% La showed dramatically better retention and pulse width dependent polarization compared to the capacitors with 0% and 3% La. These capacitors show promise as storage elements in low power high density memory architectures.

• 열처리공학회지
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• 제15권3호
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• pp.113-117
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• 2002

Fatigue characteristics of ferroelectric $Pb(Zr,Ti)O_3$ (PZT) based capacitors through donor doping is reported in this paper. La substitution up to 10% were carried out to study systematically the fatigue behaviors of epitaxial ferroelectric capacitors grown on Si using $(Ti_{0.9}Al_{0.1})N/Pt$ conducting barrier composite. Ferroelectric capacitors substituted with 10% La show sufficient low voltage switched polarization and fatigue free performance. Systematic decrease in the tetragonality of the ferroelectric phase (i.e., c/a ratio) results in the corresponding reduction in coercive voltage, sufficient remnant polarization at 1.5-3V, and good fatigue property.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 추계학술대회 논문집
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• pp.335-338
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• 1998

Ferroelectric Sr$_2$(Nb,Ta)$_2$O$_{7}$ (SNTO) thin films were prepared by chemical solution deposition processes. SNTO thin films were spin-coated on Pt/Ti/SiO$_2$/(100)Si substrates. After multiple coating, dried thin films were heat-treated for decomposition of residual organics and crystallization. B site-rich impurity phase, i.e. [Sr(Nb,Ta)$_2$O$_{6}$], was found after annealing, where its appearance was dependent on process temperature indicating the possible reaction with substrate. Dielectric and other relevant electrical properties were measured and the results showed a little possibility in ferroelectric gate random access memory devices.s.s.