• Title/Summary/Keyword: electrostatic problem

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The Electrical Characteristics of the Antistatic Wafer Carrier (대전 방지용 웨이퍼 캐리어의 전기적 특성)

  • Chea, Jong-Yun;Yoon, Jong-Kuk;Kang, Ok-Gu;Ryu, Bong-Jo;Koo, Kyung-Wan
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.63 no.2
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    • pp.319-324
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    • 2014
  • The wafer carrier is made of PP, PC, PE resin which have excellent heat and chemical resistance and electrical properties. However, particle generation has become a problem due to static electricity generated in the carrier. Some conductive material such as carbon black (CB) and carbon fiber (CF) are added for the purpose of anti-static, however, additional for motility and particle contamination problems due to high carbon content occurs. In this paper, the electrical characteristics and workability are observed and compared by adding low Carbon Nono Tube(CNT) to each PP, PC and PE resin to solve the problem.

Design & implementation of differential sensor using electrostatic capacitance method for detecting Ringer's solution exhaustion (링거액 소진 감지를 위한 정전용량방식의 차동센서 설계 및 제작)

  • Sim, Yo-Sub;Kim, Cheong-Worl
    • Journal of Sensor Science and Technology
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    • v.19 no.5
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    • pp.391-397
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    • 2010
  • This paper proposes a differential structure sensor for detecting Ringer's solution exhaustion, in which three C-type electrodes of 10 mm width are disposed on a ringer hose at a distance of 5 mm each other in the direction of Ringer's solution flow. In the center of middle electrode, two capacitances are formed at the proposed sensor. When ringer hose is filled with Ringer's solution, there is no difference between two capacitances. But capacitance difference exist under the Ringer's solution shortage, because the shortage causes the hose filled with air from the top position electrode. The capacitance difference got to maximum 1.81 pF, when air was filled between top and middle electrode and the last of hose was filled with 10 % dextrose injection Ringer's solution. The capacitance difference varied with hose-wraparound coverage of electrodes as well as the width of them. For hose-wraparound electrode coverage of 90 % and 70 %, the maximum capacitance difference was 1.81 pF and 1.56 pF, respectively. A differential charge amplifier converted the capacitance difference to electric signal, and minimized electrodes' adhering problem and external noise coupling problem.

Electrostatically-Driven Polysilicon Probe Array with High-Aspect-Ratio Tip for an Application to Probe-Based Data Storage (초소형 고밀도 정보저장장치를 위한 고종횡비의 팁을 갖는 정전 구동형 폴리 실리콘 프로브 어레이 개발)

  • Jeon Jong-Up;Lee Chang-Soo;Choi Jae-Joon;Min Dong-Ki;Jeon Dong-Ryeol
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.6 s.183
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    • pp.166-173
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    • 2006
  • In this study, a probe array has been developed for use in a data storage device that is based on scanning probe microscope (SPM) and MEMS technology. When recording data bits by poling the PZT thin layer and reading them by sensing its piezoresponse, commercial probes of which the tip heights are typically shorter than $3{\mu}m$ raise a problem due to the electrostatic forces occurring between the probe body and the bottom electrode of a medium. In order to reduce this undesirable effect, a poly-silicon probe with a high aspect-ratio tip was fabricated using a molding technique. Poly-silicon probes fabricated by the molding technique have several features. The tip can be protected during the subsequent fabrication processes and have a high aspect ratio. The tip radius can be as small as 15 nm because sharpening oxidation process is allowed. To drive the probe, electrostatic actuation mechanism was employed since the fabrication process and driving/sensing circuit is very simple. The natural frequency and DC sensitivity of a fabricated probe were measured to be 18.75 kHz and 16.7 nm/V, respectively. The step response characteristic was investigated as well. Overshoot behavior in the probe movement was hardly observed because of large squeeze film air damping forces. Therefore, the probe fabricated in this study is considered to be very useful in probe-based data storages since it can stably approach toward the medium and be more robust against external shock.

A Study on the Optimal Make of X-ray Ionizer using the Monte Carlo N-Particle Extended Code(II) (Monte Carlo N-Particle Extended Code를 이용한 연 X선 정전기제거장치의 최적제작에 관한 연구(II))

  • Jeong, Phil Hoon;Lee, Dong Hoon
    • Journal of the Korean Society of Safety
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    • v.32 no.6
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    • pp.29-33
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    • 2017
  • In order to solve this sort of electrostatic failure in Display and Semiconductor process, Soft X-ray ionizer is mainly used. Soft X-ray Ionizer does not only generate electrical noise and minute particle but also is efficient to remove electrostatic as it has a wide range of ionization. There exist variable factors such as type of tungsten thickness deposited on target, Anode voltage etc., and it takes a lot of time and financial resource to find optimal performance by manufacturing with actual X-ray tube source. Here, MCNPX (Monte Carlo N-Particle Extended) is used for simulation to solve this kind of problem, and optimum efficiency of X-ray generation is anticipated. In this study, X-ray generation efficiency was compared according to target material thickness using MCNPX and actual X-ray tube source under the conditions that tube voltage is 5 keV, 10 keV, 15 keV and the target Material is Tungsten(W). At the result, In Tube voltage 5 keV and distance 100 mm, optimal target thickness is $0.05{\mu}m$ and fastest decay time appears + decay time 0.28 sec. - deacy time 0.30 sec. In Tube voltage 10keV and distance 100 mm, optimal target Thickness is $0.16{\mu}m$ and fastest decay time appears + decay time 0.13 sec. - deacy time 0.12 sec. In the tube voltage 15 keV and distance 100 mm, optimal target Thickness is $0.28{\mu}m$ and fastest decay time appears + decay time 0.04 sec. - deacy time 0.05 sec.

Development of the Organic Solar Cell Technology using Printed Electronics (인쇄전자 기술을 이용한 유기 태양전지 기술 개발)

  • Kim, Jungsu;Yu, Jongsu;Yoon, Sungman;Jo, Jeongdai;Kim, Dongsoo
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.05a
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    • pp.113.1-113.1
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    • 2011
  • PEMS (printed electro-mechanical system) is fabricated by means of various printing technologies. Passive and active compo-nents in 2D or 3D such as conducting lines, resistors, capacitors, inductors and TFT(Thin Film Transistor), which are printed withfunctional materials, can be classified in this category. And the issue of PEMS is applied to a R2R process in the manu-facturing process. In many electro-devices, the vacuum process is used as the manufacturing process. However, the vacuum process has a problem, it is difficult to apply to a continuous process such as a R2R(roll to roll) printing process. In this paper, we propose an ESD (electro static deposition) printing process has been used to apply an organic solar cell of thin film forming. ESD is a method of liquid atomization by electrical forces, an electrostatic atomizer sprays micro-drops from the solution injected into the capillary with electrostatic force generated by electric potential of about several tens kV. ESD method is usable in the thin film coating process of organic materials and continuous process as a R2R manufacturing process. Therefore, we experiment the thin films forming of PEDOT:PSS layer and active layer which consist of the P3HT:PCBM. The organic solar cell based on a P3HT/PCBM active layer and a PEDOT:PSS electron blocking layer prepared from ESD method shows solar-to-electrical conversion efficiency of 1.42% at AM 1.5G 1sun light illumination, while 1.86% efficiency is observed when the ESD deposition of P3HT/PCBM is performed on a spin-coated PEDOT:PSS layer.

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Effects of the ESD Protection Performance on GPNS(Gate to Primary N+ diffusion Space) Variation in the NSCR_PPS Device (NSCR_PPS 소자에서 게이트와 N+ 확산층 간격의 변화가 정전기 보호성능에 미치는 영향)

  • Yang, Jun-Won;Seo, Yong-Jin
    • Journal of Satellite, Information and Communications
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    • v.10 no.4
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    • pp.6-11
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    • 2015
  • The ESD(electrostatic discharge) protection performance of PPS(PMOS pass structure) embedded N-type silicon controlled rectifier(NSCR_PPS) device with different GPNS(Gate to Primary $N^+$ Diffusion Space) structure was discussed for high voltage I/O applications. A conventional NSCR_PPS standard device with FPW(Full P-Well) structure and non-CPS(Counter Pocket Source) implant shows typical SCR-like characteristics with low on-resistance(Ron), low snapback holding voltage(Vh) and low thermal breakdown voltage(Vtb), which may cause latch-up problem during normal operation. However, our proposed NSCR_PPS devices with modified PPW(Partial P-Well) structure and optimal CPS implant demonstrate the improved ESD protection performance as a function of GPNS variation. GPNS was a important parameter, which is satisfied design window of ESD protection device.

Shape Design Optimization of Electrode for Maximal Dielectrophoresis Forces (최대 유전영동력을 위한 전극의 형상 최적설계)

  • Jeong, Hong-Yeon;Cho, Seonho
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.32 no.4
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    • pp.223-231
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    • 2019
  • A continuum-based design sensitivity analysis(DSA) method is developed for electrostatic problems. To consider high order objective functions, we use 9-node finite element basis functions for analysis and DSA methods. As the design variables are parameterized with B-spline functions, smooth boundary variations are naturally obtained. To solve mesh entanglement problems during the optimization process, a mesh regularization scheme is employed. By minimizing the Dirichlet energy functional, mesh uniformity can be automatically achieved. In numerical examples for maximizing dielectrophoresis forces, the numerical results are compared with well-known electrode geometries and the obtained characteristics are discussed.

Comparison of particle collection characteristics in a wire-cylindrical wet electrostatic precipitator with and without a water film (와이어-실린더형 습식 전기집진기의 수막 유무에 따른 집진 특성 비교)

  • Woo, Chang Gyu;Cho, Won Ki;Kim, Hak-Joon;Kim, Yong-Jin;Han, Bangwoo
    • Particle and aerosol research
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    • v.14 no.4
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    • pp.89-95
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    • 2018
  • People's environmental concerns for fine particles in Korea lead to the strong necessity of improving the performance of environmental control systems. Wet electrostatic precipitators (ESPs) are considered as one of the alternatives to overcome the limit of previous dry ESPs, the re-entrainment of collected particles during rapping and back corona problem for high electrical resistivity dusts etc. In this study, a wire-cylindrical ESP with a thin water film has been developed. Particle collection characteristics were compared in the ESP with operations of water film on and off. Particle collection efficiencies at various applied voltages as well as voltage-current curves were almost the same in the ESP with and without a water film. Particle collection performance for PM1.0, PM2.5 and PM10 in the wet ESP with a water film was constantly maintained with operation time even in the high dust loading environment. This results indicate that a uniform water film in our wet ESP was successfully formed with a very thin layer without any dry spot and therefore could continuously clean the collected particles on the inner wall of the ESP without any performance degradation.

The contactless elevator button using the electrostatic capacity (정전 용량을 이용한 비접촉식 엘리베이터 버튼)

  • Bang, Gul-Won
    • Journal of Industrial Convergence
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    • v.19 no.6
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    • pp.67-72
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    • 2021
  • The elevator installed in the building consists of an elevator call button and an input button for selection to the target floor. The elevator button is input only when the elevator user directly presses it. Such passenger input can be infected with an infectious disease due to contamination of the button. A non-contact button is required as a means for solving this problem, which detects the proximity of an object by applying a capacitive method. It implements a function of measuring the body's body temperature by attaching an infrared heat sensor, and provides a sterilization function of a button by attaching a UV-LED. A button was selected, a body temperature was measured through an infrared temperature measurement sensor, and UV-LED was turned on and sterilized when there was no user. The contactless elevator button is expected to be effective in preventing infectious diseases as it can prevent infection of viruses carrying infectious diseases and can detect body temperature to select positive patients of CIVID 19.

Structure Optimization of ESD Diodes for Input Protection of CMOS RF ICs

  • Choi, Jin-Young
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.17 no.3
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    • pp.401-410
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    • 2017
  • In this work, we show that the excessive lattice heating problem due to parasitic pnp transistor action in the diode electrostatic discharge (ESD) protection device in the diode input protection circuit, which is favorably used in CMOS RF ICs, can be solved by adopting a symmetrical cathode structure. To explain how the recipe works, we construct an equivalent circuit for input human-body model (HBM) test environment of a CMOS chip equipped with the diode protection circuit, and execute mixed-mode transient simulations utilizing a 2-dimensional device simulator. We attempt an in-depth comparison study by varying device structures to suggest valuable design guidelines in designing the protection diodes connected to the $V_{DD}$ and $V_{SS}$ buses. Even though this work is based on mixed-mode simulations utilizing device and circuit simulators, the analysis given in this work clearly explain the mechanism involved, which cannot be done by measurements.