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http://dx.doi.org/10.14346/JKOSOS.2017.32.6.29

A Study on the Optimal Make of X-ray Ionizer using the Monte Carlo N-Particle Extended Code(II)  

Jeong, Phil Hoon (Division of Fire Protection & Safety Engineering, Electrical & Electronics Engineering, Busan Kyungsang College)
Lee, Dong Hoon (Department of Safety Engineering, Pukyong National University)
Publication Information
Journal of the Korean Society of Safety / v.32, no.6, 2017 , pp. 29-33 More about this Journal
Abstract
In order to solve this sort of electrostatic failure in Display and Semiconductor process, Soft X-ray ionizer is mainly used. Soft X-ray Ionizer does not only generate electrical noise and minute particle but also is efficient to remove electrostatic as it has a wide range of ionization. There exist variable factors such as type of tungsten thickness deposited on target, Anode voltage etc., and it takes a lot of time and financial resource to find optimal performance by manufacturing with actual X-ray tube source. Here, MCNPX (Monte Carlo N-Particle Extended) is used for simulation to solve this kind of problem, and optimum efficiency of X-ray generation is anticipated. In this study, X-ray generation efficiency was compared according to target material thickness using MCNPX and actual X-ray tube source under the conditions that tube voltage is 5 keV, 10 keV, 15 keV and the target Material is Tungsten(W). At the result, In Tube voltage 5 keV and distance 100 mm, optimal target thickness is $0.05{\mu}m$ and fastest decay time appears + decay time 0.28 sec. - deacy time 0.30 sec. In Tube voltage 10keV and distance 100 mm, optimal target Thickness is $0.16{\mu}m$ and fastest decay time appears + decay time 0.13 sec. - deacy time 0.12 sec. In the tube voltage 15 keV and distance 100 mm, optimal target Thickness is $0.28{\mu}m$ and fastest decay time appears + decay time 0.04 sec. - deacy time 0.05 sec.
Keywords
decay time; ion balance; target material; soft x-ray ionizer; monte carlo N-particle extended; x-ray generation;
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Times Cited By KSCI : 2  (Citation Analysis)
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