• Title/Summary/Keyword: dense morphology

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A Comparative Study of TiAlN Coatings Deposited by DC and Pulsed DC Asymmetric Bipolar Magnetron Sputtering (DC 스퍼터법과 비대칭 바이폴라 펄스 DC 스퍼터법으로 증착된 TiAlN 코팅막의 물성 비교연구)

  • Chun, Sung-Yong;Lee, Tae Yang
    • Journal of the Korean institute of surface engineering
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    • v.47 no.4
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    • pp.168-173
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    • 2014
  • The paper presents the comparative results of TiAlN coatings deposited by DC and pulsed DC asymmetric bipolar magnetron sputtering systems. The results show that, with the decreasing duty cycle and increasing pulse frequency, the coating morphology changes from a columnar to a dense structure, with finer grains. Pulsed sputtered TiAlN coatings showed higher hardness, higher residual stress, and smaller grain sizes than dc prepared TiAlN coatings. Moreover residual stress of pulsed sputtered TiAlN coatings increased on increasing pulse frequency. Meanwhile, the surface roughness decreased continuously with increasing pulsed DC frequency up to 50 kHz.

A Comparative Study of NbN Coatings Deposited by DC and Pulsed DC Asymmetric Bipolar Magnetron Sputtering (DC 스퍼터법과 비대칭 바이폴라 펄스 DC 스퍼터법으로 증착된 NbN 코팅막의 물성 비교연구)

  • Chun, Sung-Yong;Oh, Bok-Hyun
    • Journal of the Korean institute of surface engineering
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    • v.48 no.4
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    • pp.136-141
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    • 2015
  • The paper presents the comparative results of NbN coatings deposited by DC and pulsed DC asymmetric bipolar magnetron sputtering systems. The results show that, with the decreasing duty cycle and increasing pulse frequency, the coating morphology changes from a columnar to a dense structure, with finer grains. The Pulsed sputtered NbN coatings showed higher hardness, higher residual stress, and smaller grain sizes than those of DC prepared NbN coatings. Moreover residual stress of pulsed sputtered NbN coatings increased on increasing pulse frequency. Meanwhile, the surface roughness decreased continuously with increasing pulsed DC frequency up to 50 kHz.

Microstructure, Crystal Structure and Mechanical Properties of VN Coatings Using Asymmetric Bipolar Pulsed dc Sputtering (비대칭 바이폴라 펄스 스퍼터법으로 증착된 VN 코팅막의 미세구조, 결정구조 및 기계적 특성에 관한 연구)

  • Chun, Sung-Yong;Jeong, Pyeong-Geun
    • Journal of the Korean institute of surface engineering
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    • v.49 no.5
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    • pp.461-466
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    • 2016
  • Nanocrystalline vanadium nitride (VN) coatings were deposited using asymmetric bipolar pulsed dc sputtering to further understand the influence of the pulsed plasmas on the crystal structure, microstructure and mechanical properties. Properties of VN coatings were investigated with FE-SEM, XRD and nanoindentation. The results show that, with the increasing pulse frequency and decreasing duty cycle, the coating morphology changed from a porous columnar to a dense structure, with finer grains. Asymmetric bipolar pulsed dc sputtered VN coatings showed higher hardness, elastic modulus and residual compressive stress than dc sputtered VN coatings. The results suggest that asymmetric bipolar pulsed dc sputtering technique is very beneficial for the reactive sputtering deposition of VN coatings.

Structural Characteristisrics and Adhesion of Chemicaly Vapor Deposited TiN Films on Stainless Steels (화학증착된 TiN 박막의 구조적 특성 및 결합력에 관한 연구)

  • 이민섭;이성래;백영현
    • Journal of the Korean institute of surface engineering
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    • v.22 no.1
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    • pp.17-25
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    • 1989
  • The structural Charactesties and adhesion of chemically vapor deposited TiN film on stain less steels have been investated as functions of deposition temperature, surface roughness of sub state, and types of substrates. The grain zine and the lattice parameter of TiN film decreased with decreasing roughness of substates. The(200) preferred orientation was developed dominatly and the lattlice parameter decreased as temperature intereased reardless of the surdless roughnessand type of the substrates used. The surface morphology of TiN film changed from bushed crystal to a plate and then to pyamidal dense crystals with an increase in the deposition temperature. The adhesion of TiN films increased with coating thinkness and decreased with surface roughness in general. The calculations using a Bejamin & Weaver's model have been compard. Maximum valuse of adhesion energy calculated using Laguier's model were W304=331Jm-2,w410=113Jm-2,andW430=107jm-2

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Preparation of $CeO_2$ Based Solid Electrolyte Thin Films by Electrochemical Vapor Deposition (전기화학증착법에 의한 $CeO_2$계 고체전해질 박막의 제조)

  • 박동원;김대룡
    • Journal of the Korean Ceramic Society
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    • v.34 no.10
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    • pp.1067-1073
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    • 1997
  • The yttria doped ceria (YDC) thin films were fabricated by electrochemical vapor deposition on the porous $\alpha$-Al2O3 substrate. The growth rates of the films obeyed a parabolic rate law, which constant was 259.0 $m^2$/hr at 120$0^{\circ}C$. As deposition temperature (above 110$0^{\circ}C$) increased, dense thin films were enhanced. Mole fraction of XYC13 had an effect upon surface morphologies. Electrical conductivity was increased with deposition temperature. The conductivity of YDC film prepared at XYC13=7.9$\times$10-2 was about 0.097 S/cm at 104$0^{\circ}C$ and the activation energy of conduction was calculated to be 26.6 kcal/mol.

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Dehydrodivanillin: Multi-dimensional NMR Spectral Studies, Surface Morphology and Electrical Characteristics of Thin Films

  • Gaur, Manoj;Lohani, Jaya;Balakrishnan, V.R.;Raghunathan, P.;Eswaran, S.V.
    • Bulletin of the Korean Chemical Society
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    • v.30 no.12
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    • pp.2895-2898
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    • 2009
  • The complete structural characterization of dehydrodivanillin, an important natural product of interest to the food, cosmetics and aroma industries, has been carried out using multi-dimensional NMR spectroscopic techniques, and its previously $reported^{13}$C-NMR values have been reassigned. Dense and granular thin films of dehydrodivanillin have been grown by sublimation under high vacuum and studied using Scanning Electron Microscopy (SEM), electrical and optical techniques. The transmittance spectra of the films indicate a wide optical band gap of more than 3 eV. Typical J-V characteristics of Glass/ITO/dehydrodivanillin/Al structure exhibited moderate current densities ${\sim}10^{-4}\;A/cm^2$ at voltages > 25 V with an appreciable SCLC mobility of the order of $10^{-6}\;cm^2$/V-s.

Batch-type fabrication process of YBCO coated conductor using oxide-precursor-based MOD method (산화물 전구체 기반의 MOD방법을 이용한 YBCO 고온초전도 선재의 batch-type 제조 공정)

  • Chung Kook-chae;Yoo Jai-moo;Ko Jae-Woong;Kim Young-Kuk
    • Progress in Superconductivity and Cryogenics
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    • v.7 no.3
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    • pp.9-12
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    • 2005
  • [ $Y_1Ba_2Cu_3O_{7-8}$ ] (YBCO) coated conductor has been fabricated by batch-type process using oxide-precursor-based metal-organic deposition (MOD) method. The batch-type process can be scaled up more simply to Produce long-length YBCO conductor than the reel-to-reel process. Also, it has less handling problems and is adequate to the ambient gas environment. In this work, YBCO oride powder was used as a starting precursor for MOD method. After reel-to-reel dip coating process, me ter-long-buffered metal tape was wound around a cylinder and underwent calcination and annealing processes. Annealed YBCO films showed good c-axis alignment and dense surface morphology with no cracks, but exhibited very low critical current density of $10^5\;A/cm^2$.

Activation Effect on Palladium Electroless Plating of Porous Stainless Steel Support (팔라듐 무전해 도금을 위한 활성화 처리에 대한 연구)

  • 허장은;우상국;서동수;한성욱;한인섭;서두원
    • Proceedings of the Korea Society for Energy Engineering kosee Conference
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    • 1999.05a
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    • pp.165-170
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    • 1999
  • Palladium membranes have high selectivity of separation and removal of hydrogen to chemical process at high temperature. For the development of hydrogen permeable membrane, palladium was deposited on porous stainless steel support by electroless plating method. In this work, the activation effect on the surface of stainless steel support has been investigated for the effective palladium plating. The morphology and microstructure were characterized by SEM and the composition was analyzed by EDX. It is found that the composition of deposited nuclei on the stainless steel support was changed in accordance with activation cycles. It is also observed that Sn-enriched nuclei has been changed to Pd-enriched nuclei over the fifteenth activation. The uniform deposition of the dense palladium layer on porous stainless steel support has been performing with Sn-enriched nuclei and comparing with Pd-enriched nuclei.

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A Study on the Pd-Ni Alloy Hydrogen Membrane Using the Sputter Deposition (스퍼터 증착 방식으로 제조된 Pd-Ni 합금 수소 분리막 연구)

  • Kim Dong-Won;Park Jeong-Won;Kim Sang-Ho;Park Jong-Su
    • Journal of the Korean institute of surface engineering
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    • v.37 no.5
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    • pp.243-248
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    • 2004
  • A palladium-nikel(Pd-Ni) alloy composite membrane has been fabricated on microporous nickel support formed with nickel powder. Plasma surface treatment process is introduced as pre-treatment process instead of HCI activation. Pd coating layer was prepared by dc magnetron sputtering deposition after $H_2$ plasma surface treatment. Palladium-nickel alloy composite layer had a fairly uniform and dense surface morphology. The membrane was characterized by permeation experiments with hydrogen and nitrogen gases at temperature of 773 K and pressure of 2.2psi. The hydrogen permeance was 6 ml/minㆍ$\textrm{cm}^2$ㆍatm and the selectivity was 120 for hydrogen/nitrogen($H_2$/$N_2$) mixing gases at 773 K.

Property of Spin-sprayed ZnO Film on PC Substrate (스핀 스프레이법으로 PC 기판에 제작한 산화아연 박막의 특성)

  • Hoong, Jeongsoo;Matsushita, Nobuhiro;Katsumata, Ken-ichi;Park, Yongseo;Kim, Kyunghwan
    • Journal of the Semiconductor & Display Technology
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    • v.17 no.3
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    • pp.27-30
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    • 2018
  • In this study, ZnO film was deposited on polycarbonate substrate by spin-spray method at low substrate temperature of $85^{\circ}C$. Surface morphology of ZnO films was changed by adding citrate from rod to dense structure. As-deposited ZnO film indicated high transmittance above 80%. In case of the resistivity, as-deposited ZnO film had high resistivity due to the existence of organic substance in the film. However, organic substance was removed and resistivity was decreased to $3.9{\times}10^{-2}{\Omega}{\cdot}cm$, after UV irradiation.