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Property of Spin-sprayed ZnO Film on PC Substrate  

Hoong, Jeongsoo (Department of Electrical Engineering, Gachon University)
Matsushita, Nobuhiro (Department of Materials Science and Engineering, Tokyo Institute of Technology)
Katsumata, Ken-ichi (Photocatalysis International Research Center, Tokyo University of Science)
Park, Yongseo (Department of Electrical Engineering, Gachon University)
Kim, Kyunghwan (Department of Electrical Engineering, Gachon University)
Publication Information
Journal of the Semiconductor & Display Technology / v.17, no.3, 2018 , pp. 27-30 More about this Journal
Abstract
In this study, ZnO film was deposited on polycarbonate substrate by spin-spray method at low substrate temperature of $85^{\circ}C$. Surface morphology of ZnO films was changed by adding citrate from rod to dense structure. As-deposited ZnO film indicated high transmittance above 80%. In case of the resistivity, as-deposited ZnO film had high resistivity due to the existence of organic substance in the film. However, organic substance was removed and resistivity was decreased to $3.9{\times}10^{-2}{\Omega}{\cdot}cm$, after UV irradiation.
Keywords
Spin-spray; ZnO; Transparent electrode; UV; Conductivity;
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Times Cited By KSCI : 1  (Citation Analysis)
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