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http://dx.doi.org/10.5695/JKISE.2016.49.5.461

Microstructure, Crystal Structure and Mechanical Properties of VN Coatings Using Asymmetric Bipolar Pulsed dc Sputtering  

Chun, Sung-Yong (Department of Advanced Materials Science and Engineering, Mokpo National University)
Jeong, Pyeong-Geun (Department of Advanced Materials Science and Engineering, Mokpo National University)
Publication Information
Journal of the Korean institute of surface engineering / v.49, no.5, 2016 , pp. 461-466 More about this Journal
Abstract
Nanocrystalline vanadium nitride (VN) coatings were deposited using asymmetric bipolar pulsed dc sputtering to further understand the influence of the pulsed plasmas on the crystal structure, microstructure and mechanical properties. Properties of VN coatings were investigated with FE-SEM, XRD and nanoindentation. The results show that, with the increasing pulse frequency and decreasing duty cycle, the coating morphology changed from a porous columnar to a dense structure, with finer grains. Asymmetric bipolar pulsed dc sputtered VN coatings showed higher hardness, elastic modulus and residual compressive stress than dc sputtered VN coatings. The results suggest that asymmetric bipolar pulsed dc sputtering technique is very beneficial for the reactive sputtering deposition of VN coatings.
Keywords
Pulsed Sputtering; VN; Asymmetric Bipolar; Duty cycle; Pulse frequency;
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Times Cited By KSCI : 4  (Citation Analysis)
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