• Title/Summary/Keyword: chip stack

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Cu Filling Characteristics of Trench Vias with Variations of Electrodeposition Parameters (Electrodeposition 변수에 따른 Trench Via의 Cu Filling 특성)

  • Lee, Kwang-Yong;Oh, Teck-Su;Oh, Tae-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.13 no.4
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    • pp.57-63
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    • 2006
  • For chip-stack package applications, Cu filling characteristics into trench vias of $75{\sim}10\;{\mu}m$ width and 3 mm length were investigated with variations of electroplating current density and current mode. At $1.25mA/cm^{2}$ of DC mode, Cu filling ratio higher than 95% was obtained for trench vias of $75{\sim}35{\mu}m$ width. When electroplated at DC $2.5mA/cm^{2}$, Cu filling ratios became inferior to those processed at DC $1.25mA/cm^{2}$. Pulse current mode exhibited Cu filling characteristics superior to DC current mode.

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Interconnection Process and Electrical Properties of the Interconnection Joints for 3D Stack Package with $75{\mu}m$ Cu Via ($75{\mu}m$ Cu via가 형성된 3D 스택 패키지용 interconnection 공정 및 접합부의 전기적 특성)

  • Lee Kwang-Yong;Oh Teck-Su;Won Hye-Jin;Lee Jae-Ho;Oh Tae-Sung
    • Journal of the Microelectronics and Packaging Society
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    • v.12 no.2 s.35
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    • pp.111-119
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    • 2005
  • Stack specimen with three dimensional interconnection structure through Cu via of $75{\mu}m$ diameter, $90{\mu}m$ height and $150{\mu}m$ pitch was successfully fabricated using subsequent processes of via hole formation with Deep RIE (reactive ion etching), Cu via filling with pulse-reverse electroplating, Si thinning with CMP, photolithography, metal film sputtering, Cu/Sn bump formation, and flip chip bonding. Contact resistance of Cu/Sn bump and Cu via resistance could be determined ken the slope of the daisy chain resistance vs the number of bump joints of the flip chip specimen containing Cu via. When flip- chip bonded at $270^{\circ}C$ for 2 minutes, the contact resistance of the Cu/Sn bump joints of $100{\times}100{\mu}m$ size was 6.7m$\Omega$ and the Cu via resistance of $75{\mu}m$ diameter, $90{\mu}m$ height was 2.3m$\Omega$.

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A Study on Reconfigurable Network Protocol Stack using Task-based Component Design on a SoC Platform (SoC 플랫폼에서 태스크 기반의 조립형 재구성이 가능한 네트워크 프로토콜 스택에 관한 연구)

  • Kim, Young-Mann;Tak, Sung-Woo
    • Journal of Korea Multimedia Society
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    • v.12 no.5
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    • pp.617-632
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    • 2009
  • In this paper we propose a technique of implementing the reconfigurable network protocol stack that allows for partitioning network protocol functions into software and hardware tasks on a SoC (System on Chip) platform. Additionally, we present a method that guarantees the deadline of both an individual task and messages exchanging among tasks in order to meet the deadline of real-time multimedia and networking services. The proposed real-time message exchange method guarantees the deadline of messages generated by multimedia services that are required to meet the real-time properties of multimedia applications. After implementing the networking functions of TCP/IP protocol suite into hardware and software tasks, we verify and validate their performance on the SoC platform. Experimental results indicate that the proposed technique improves the performance of TCP/IP protocol suit as well as application service satisfaction in application-specific real-time.

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Development of High Performance LonWorks Fieldbus Control Modules for Network-based Induction Motor Control (네트워크 기반 유도전동기 제어를 위한 고성능 LonWorks 제어모듈 개발)

  • Kim, Jung-Gon;Hong, Won-Pyo
    • Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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    • 2005.05a
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    • pp.319-324
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    • 2005
  • The interface between host processor and the ShortStack Micro Server may be a Serial Communication Interface(SCI). The LonWorks control module with a high performance is developed, which is composed of the 8 bit PIC Microprocessor for host processor and the smart neuron chip for the ShoretStack Micro Server. This intelligent control board is verified as proceeding the various function tests from experimental system with an boost pump and inverter driving systems. It is also confirmed that the developed control module provides stably 0-10VDC linear signal to the input signal of inverter driving system for varying the induction motor speed. Thus, the experimental results show that the fabricating intelligent board carried out very well the various functions in the wide operating ranges of boost pump system. This developed control module expect to apply to industrial fields to require the comparatively exact control and monitoring such as multi-motor driving system with inverter, variable air volume system and the boost pump water supply systems.

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Trend and Prospect for 3Dimensional Integrated-Circuit Semiconductor Chip (3차원 집적회로 반도체 칩 기술에 대한 경향과 전망)

  • Kwon, Yongchai
    • Korean Chemical Engineering Research
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    • v.47 no.1
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    • pp.1-10
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    • 2009
  • As a demand for the portable device requiring smaller size and better performance is in hike, reducing the size of conventionally used planar 2 dimensional chip cannot be a solution for the enhancement of the semiconductor chip technology due to an increase in RC delay among interconnects. To address this problem, a new technology - "3 dimensional (3D) IC chip stack" - has been emerging. For the integration of the technology, several new key unit processes (e.g., silicon through via, wafer thinning and wafer alignment and bonding) should be developed and much effort is being made to achieve the goal. As a result of such efforts, 4 and 8 chip-stacked DRAM and NAND structures and a system stacking CPU and memory chips vertically were successfully developed. In this article, basic theory, configurations and key unit processes for the 3D IC chip integration, and a current tendency of the technology are explained. Future opportunities and directions are also discussed.

Technologies for 3D Assembly and Chip-level Stack

  • Bonkohara, Manabu
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2003.09a
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    • pp.65-89
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    • 2003
  • Next Highly sophisticated communication generation of the Advanced Electronics and Imaging processing society will require a vast information volume and super high speed signal transport and information instruction. This means that super high technology should be created for satisfying the demand. It's also required the high reliability of the communication system itself, It will be supported the new advanced packaging technology of the 3 Dimensional structured system and system integration technology. Here is introduced the new 3 Dimensional technology for IC nnd LSI packaging and Opt-electronics Packaging of ASET activity in Japan.

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Development of an Embedded Bluetooth Audio Streaming Solution on SoC Platform (SoC 플랫폼 상에서 임베디드 블루투스 오디오 스트리밍 솔루션 개발)

  • Kim, Tae-Hyoun
    • The KIPS Transactions:PartA
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    • v.13A no.7 s.104
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    • pp.589-598
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    • 2006
  • In this paper, we describe the development and optimization of an embedded Biuetooth solution on an SoC platform for real-time audio streaming over a Bluetooth wireless link. The solution includes embedded Bluetooth protocol stack and profile simplemented on a virtual operating system for portability, and other optimization techniques to fully exploit the benefits of multimedia-oriented SoC. The optimization techniques implemented in this paper are memory access minimization by using on-chip scratch pad memory, codec library optimization with DSP and parallel memory access instruction set, and dynamic audio quality adjustment regarding current wireless link status. Experimental results show that the optimized solution presented in this paper can support high-qualify audio streaming without the support of external memory.

Integration Technologies for 3D Systems

  • Ramm, P.;Klumpp, A.;Wieland, R.;Merkel, R.
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2003.09a
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    • pp.261-278
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    • 2003
  • Concepts.Wafer-Level Chip-Scale Concept with Handling Substrate.Low Accuracy Placement Layout with Isolation Trench.Possible Pitch of Interconnections down to $10{\mu}{\textrm}{m}$ (Sn-Grains).Wafer-to-Wafer Equipment Adjustment Accuracy meets this Request of Alignment Accuracy (+/-1.5 ${\mu}{\textrm}{m}$).Adjustment Accuracy of High-Speed Chip-to-Wafer Placement Equipment starts to meet this request.Face-to-Face Modular / SLID with Flipped Device Orientation.interchip Via / SLID with Non-Flipped Orientation SLID Technology Features.Demonstration with Copper / Tin-Alloy (SLID) and W-InterChip Vias (ICV).Combination of reliable processes for advanced concept - Filling of vias with W as standard wafer process sequence.No plug filling on stack level necessary.Simultanious formation of electrical and mechanical connection.No need for underfiller: large area contacts replace underfiller.Cu / Sn SLID layers $\leq$ $10{\mu}{\textrm}{m}$ in total are possible Electrical Results.Measurements of Three Layer Stacks on Daisy Chains with 240 Elements.2.5 Ohms per Chain Element.Contribution of Soldering Metal only in the Range of Milliohms.Soldering Contact Resistance ($0.43\Omega$) dominated by Contact Resistance of Barrier and Seed Layer.Tungsten Pin Contribution in the Range of 1 Ohm

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Mold-Flow Simulation in 3 Die Stack Chip Scale Packaging

  • Rhee Min-Woo
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2005.09a
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    • pp.67-88
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    • 2005
  • Mold-Flow 3 Die Stack CSP of Mold array packaging with different Gate types. As high density package option such as 3 or 4 die stacking technologies are developed, the major concerning points of mold related qualities such as incomplete mold, exposed wires and wire sweeping issues are increased because of its narrow space between die top and mold surface and higher wiring density. Full 3D rheokinetic simulation of Mold flow for 3 die stacking structure case was done with the rheological parameters acquired from Slit-Die rheometer and DSC of commercial EMC. The center gate showed severe void but corner gate showed relatively better void performance. But in case of wire sweeping related, the center gate type showed less wire sweeping than corner gate types. From the simulation results, corner gate types showed increased velocity, shear stress and mold pressure near the gate and final filling zone. The experimental Case study and the Mold flow simulation showed good agreement on the mold void and wire sweeping related prediction. Full 3D simulation methodologies with proper rheokinetic material characterization by thermal and rheological instruments enable the prediction of micro-scale mold filling behavior in the multi die stacking and other complicated packaging structures for the future application.

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The Low Height Looping Technology for Multi-chip Package in Wire Bonder (와이어 본더에서의 초저 루프 기술)

  • Kwak, Byung-Kil;Park, Young-Min;Kook, Sung-June
    • Journal of the Semiconductor & Display Technology
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    • v.6 no.1 s.18
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    • pp.17-22
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    • 2007
  • Recent new packages such as MCP(Multi-Chip Package), QDP(Quadratic Die Package) and DDP(Dual Die Package) have stack type configuration. This kind of multi-layer package is thicker than single layer package. So there is need for the low height looping technology in wirebonder to make these packages thinner. There is stiff zone above ball in wirebonder wire which is called HAZ(Heat Affect Zone). When making low height loop (below $80\;{\mu}m$) with traditional forward loop, stiff wire in HAZ(Heat Affected Zone) above ball is bended and weakened. So the traditional forward looping method cannot be applied to low height loop. SSB(stand-off stitch) wire bonding method was applied to many packages which require very low loops. The drawback of SSB method is making frequent errors at making ball, neck damage above ball on lead and the weakness of ball bonding on lead. The alternative looping method is BNL(ball neckless) looping technology which is already applied to some package(DDP, QDP). The advantage of this method is faster in bonding process and making little errors in wire bonding compared with SSB method. This paper presents the result of BNL looping technology applied in assembly house and several issues related to low loop height consistence and BNL zone weakness.

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