• Journal of the Korean Vacuum Society
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• v.19 no.6
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• pp.495-500
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• 2010

In this study, $Al_2O_3$ and $TiO_2$ films was deposited on to PES (poly(ethersulfon) substrate by using atomic layer deposition as functions of deposition temperature and plasma power. The density and carbon contents of $Al_2O_3$ and $TiO_2$ films was changed by varying process conditions. High density thin films was achieved through optimizing the process conditions. Buffer layer was deposited prior to the processing of upper thin films to avoid PES surface destruction during the high power plasma process and to enhances the tortuous path for water vapor permeation for the defect decoupling effect. The water vapor transmission rate by using MOCON test was investigated to analyze the effect. Water vaper permeation properties was improved by using the inorganic multi-layer passivation layer and activation energy of the water vapor permeation was increased.

• Clean Technology
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• v.28 no.2
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• pp.131-137
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• 2022

The semiconductor process currently emits various by-products and unused gases. Emissions containing pollutants are generally classified into categories such as organic, acid, alkali, thermal, and cabinet exhaust. They are discharged after treatment in an atmospheric prevention facility suitable for each exhaust type. The main components of organic exhaust are volatile organic compounds (VOC), which is a generic term for oxygen-containing hydrocarbons, sulfur-containing hydrocarbons, and volatile hydrocarbons, while the main components of alkali exhaust include ammonia and tetramethylammonium hydroxide. The purpose of this study was to determine the combustion characteristics and analyze the NO_X reduction rate by maintaining a direct combustion and temperature to process organic and alkaline exhaust gases simultaneously. Acetone, isopropyl alcohol (IPA), and propylene glycol methyl ether acetate (PGMEA) were used as VOCs and ammonia was used as an alkali exhaust material. Independent and VOC-ammonia mixture combustion tests were conducted for each material. The combustion tests for the VOCs confirmed that complete combustion occurred at an equivalence ratio of 1.4. In the ammonia combustion test, the NO_X concentration decreased at a lower equivalence ratio. In the co-combustion of VOC and ammonia, NO was dominant in the NO_X emission while NO₂ was detected at approximately 10 ppm. Overall, the concentration of nitrogen oxide decreased due to the activation of the oxidation reaction as the reaction temperature increased. On the other hand, the concentration of carbon dioxide increased. Flameless combustion with an electric heat source achieved successful combustion of VOC and ammonia. This technology is expected to have advantages in cost and compactness compared to existing organic and alkaline treatment systems applied separately.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.5
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• pp.835-842
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• 2002

In this paper, static and fatigue bending strengths and failure mechanisms of CFRP (carbon fiber reinforced plastics) laminates having impact damages have been evaluated. Composite laminates used for this experiment are CF/EPOXY orthotropy laminated plates, which have two-interfaces $[0^0_ 4/90^0_4]_{ sym}$. A steel ball launched by the air gun collides against CFRP laminates to generate impact damages. The damage growth during bending fatigue test is observed by the scanning acoustic microscope (SAM) and also, the fracture surfaces were observed by using the SEM (scanning electron microscope). In the case of impacted-side compression, fracture is propagated from the transverse crack generated near impact point. On the other hand, fracture is developed toward the impact point from the edge of interface-B delamination in the case of impacted-side tension. Eventually, failure mechanisms have been confirmed based on the observed delamination areas and fracture surfaces.

• Advances in nano research
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• v.1 no.2
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• pp.71-82
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• 2013

A simple chemical precipitation technique is reported for the synthesis of a hybrid nanostructure of single-wall carbon nanotubes (SWCNT) and titania ($TiO_2$) nanocrystals of average size 5 nm, which may be useful as a prominent photocatalytic material with improved functionality. The synthesized hybrid structure has been characterized by transmission electron microscopy (HRTEM), energy-dispersive X-ray analysis (EDAX), powder X-ray diffractometry (XRD), Fourier transform infrared spectroscopy (FTIR) and Raman spectroscopy. It is clearly revealed that nearly monodispersed titania nanocrystals (anatase phase) of average size 5 nm decorate the surfaces of SWCNT bundles. The UV-vis absorption study shows a blue shift of 16 nm in the absorbance peak position of the composite material compared to the unmodified SWCNTs. The photoluminescence study shows a violet-blue emission in the range of 325-500 nm with a peak emission at 400 nm. The low temperature electrical transport property of the synthesized nanomaterial has been studied between 77-300 K. The DC conductivity shows semiconductor-like characteristics with conductivity increasing sharply with temperature in the range of 175-300 K. Such nanocomposites may find wide applications as improved photocatalyst due to transfer of photo-ejected electrons from $TiO_2$ to SWCNT, thus reducing recombination, with the SWCNT scaffold providing a firm and better positioning of the catalytic material.

• Journal of Korean Society of Water and Wastewater
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• v.12 no.1
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• pp.88-95
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• 1998

The Electron/Hole Pair is generated when the Activation Energy produces by Ultraviolet Ray illumination to the Semiconductor. And $OH^-$ ion produces by Water Photo-Cleavage reacts with Positive Hole. As a result, OH Radical acting as strong oxidant is generated and then Photocatalytic Oxidation Reaction occurs. The Photocatalytic Oxidation can oxidize the chlorophenol to Chloride and Carbon Dioxide easier, safer and shorter than conventional Water Treatment Process With the same degree of chlorination, the $Cl^-$ ion at para (C4) position is most easily replaced by the OH radical. And then, the blocking effect of $OH^-$ ion between the $Cl^-$ ions and $Cl^-$ ions at symmetrical location is easily replaced by the OH radical. For mono-, di-, tri-chlorophenols, there is no obvious difference in decomposition rate, decomposition efficiency and completeness of the decomposition reaction except for 2,3-dichloropheno, 2,4,5-, 2,3,4-trichlorophenol. The decomposition efficiency is higher than 75% and completeness of the decomposition reaction is higher than 70%. Therefore, continuous flow photocatalytic reactor is promising process to remove the chlorinated aromatic compounds which is more toxic than non-chlorinated aromatic compound.

• Ceramist
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• v.21 no.3
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• pp.249-269
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• 2018

In conventional MALDI-TOF mass spectrometry, analyte molecules are known to be ionized by mixing with organic matrix molecules. As the organic matrix molecules are made into small fragments, they generate unreproducible mass peaks such that MALDI-TOF mass spectrometry is nearly impossible in the low mass-to-charge (m/z) range (< 1000). Additionally, the dried sample mixed with matrix were made as inhomogeneous crystal on metal plate. When the laser radiation was made on the sample crystal, the amount of generated sample ion was observed to be quite different according to the radiation point. Therefore, the quantitative analysis was very difficult even for the sample spots at the same concentration for the conventional MALDI-TOF mass spectrometry. In this work, we present laser desorption/ionization (LDI) mass spectrometry based on solid-matrices for the quantitative analysis of small molecules in the low m/z range by using MALDI-TOF mass spectrometry: (1) Carbon based nanostructures; (2) Semiconductor based nanomaterials; (3) Metal based nanostructures.

• Journal of Sensor Science and Technology
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• v.29 no.2
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• pp.112-117
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• 2020

Xylene is a hazardous volatile organic compound that should be precisely measured to monitor indoor air quality. However, the selective and sensitive detection of ppm-level xylene using oxide-semiconductor gas sensors remains a challenge. In this study, pure and Cr-doped Co₃O₄ nanoparticles (NPs) were prepared using flame spray pyrolysis, and their gas-sensing characteristics to 5-ppm xylene at 250 ℃ were investigated. The 4 at% Cr-doped Co₃O₄ NPs exhibited a high gas response to 5-ppm xylene (resistance ratio to gas and air = 39.1) and negligible cross-responses to other representative and ubiquitous indoor pollutants such as ethanol, benzene, formaldehyde, carbon monoxide, and ammonia. In this paper, the enhancement of the gas response and selectivity of Co₃O₄ NPs to xylene by Cr doping was discussed in relation to the catalytic promotion of the gas-sensing reaction. This sensor can be used to monitor indoor xylene.

• Journal of Korean Society of Water and Wastewater
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• v.28 no.4
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• pp.391-396
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• 2014

Ultrapure water (UPW) is water containing nothing but water molecule ($H_2O$). The use of UPW is increasing in many industries such as the thermal and nuclear power plants, petrochemical plants, and semiconductor manufacturers. In order to produce UPW, several unit processes such as ion exchange, reverse osmosis (RO), ultraviolet (UV) oxidation should be efficiently arranged. In particular, RO process should remove not only ions but also low molecular weight (LMW) organic matters in UPW production system. But, the LMW organic matter removal data of RO membranes provided by manufacturers does not seem to be reasonable because they tested the removal in high concentration conditions like 1,000 ppm of isopropyl alcohol (IPA, MW=60.1). In this study, bench-scale experiments were carried out using 4-inches RO modules. IPA was used as a model LMW organic matter with low concentration conditions less than 1 ppm as total organic carbon (TOC). As a result, the IPA removal data by manufacturers turned out to be trustable because the effect of feed concentration on the IPA removal was negligble while the IPA removal efficiency became higher at higher permeate flux.

• Transactions on Electrical and Electronic Materials
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• v.15 no.4
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• pp.207-212
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• 2014

Aluminum-doped zinc oxide (AZO) films were deposited on SiOC/Si wafer by an RF-magnetron sputtering system, by varying the deposition parameters of radio frequency power from 50 to 200 W. To assess the correlation of the optical properties between the substrate and AZO thin film, photoluminescence was measured, and the origin of deep level emission of AZO thin films grown on SiOC/Si wafer was studied. AZO formed on SiOC/Si substrates exhibited ultraviolet emission due to exciton recombination, and the visible emission was associated with intrinsic and extrinsic defects. For the AZO thin film deposited on SiOC at low RF-power, the deep level emission near the UV region is attributed to an increase of the variations of defects related to the AZO and SiOC layers. The applied RF-power influenced an energy gap of localized trap state produced from the defects, and the gap increased at low RF power due to the formation of new defects across the AZO layer caused by lattice mismatch of the AZO and SiOC films. The optical properties of AZO films on amorphous SiOC compared with those of AZO film on Si were considerably improved by reducing the roughness of the surface with low surface ionization energy, and by solving the problem of structural mismatch with the AZO film and Si wafer.

• Transactions on Electrical and Electronic Materials
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• v.14 no.5
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• pp.246-249
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• 2013

Graphene was obtained on Cu foil by thermal decomposition method. A gas mixture of $H_2$ and $CH_4$ and an ambient annealing temperature of $1,000^{\circ}C$ were used during the deposition for 30 Min., and for the transfer onto $SiO_2/Si$ and Si substrates. The physical properties of graphene were investigated with regard to the effect ofnitrogen atom doping and the various substrates used. The G/2D ratio decreased when the graphene became monolayer graphene. The graphene grown on $SiO_2/Si$ substrate showed a low intensity of the G/2D ratio, because the polarity of the $SiO_2$ layer improved the quality of graphene. The intensity of the G/2D ratio of graphene doped with nitrogen atoms increased with the doping time. The quality of graphene depended on the concentration of the nitrogen doping and chemical properties of substrates. High-quality monolayer graphene was obtained with a low G/2D ratio. The increase in the intensity of the G/2D ratios corresponded to a blue shift in the 2D peaks.