Transactions on Electrical and Electronic Materials

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지
DOI QR코드

DOI QR Code

CVD Graphene Synthesis on Copper Foils and Doping Effect by Nitric Acid

  • Oh, Teresa (Department of Semiconductor Engineering, Cheongju University)
  • Received : 2013.02.19
  • Accepted : 2013.07.30
  • Published : 2013.10.25
Download PDF
⟨ Previous Next ⟩

Abstract

Graphene was obtained on Cu foil by thermal decomposition method. A gas mixture of $H_2$ and $CH_4$ and an ambient annealing temperature of $1,000^{\circ}C$ were used during the deposition for 30 Min., and for the transfer onto $SiO_2/Si$ and Si substrates. The physical properties of graphene were investigated with regard to the effect ofnitrogen atom doping and the various substrates used. The G/2D ratio decreased when the graphene became monolayer graphene. The graphene grown on $SiO_2/Si$ substrate showed a low intensity of the G/2D ratio, because the polarity of the $SiO_2$ layer improved the quality of graphene. The intensity of the G/2D ratio of graphene doped with nitrogen atoms increased with the doping time. The quality of graphene depended on the concentration of the nitrogen doping and chemical properties of substrates. High-quality monolayer graphene was obtained with a low G/2D ratio. The increase in the intensity of the G/2D ratios corresponded to a blue shift in the 2D peaks.

Keywords

References

  1. Q. Yu, J. Lian, S. Siriponglert, H. Li, Y. P. Chen and S.S. Pei, Appl. Phys. Lett., 93(11), 113103 (2008) [DOI: http://dx.doi.org/10.1063/1.2982585].
  2. T. Oh and C. H. Kim, IEEE Trans. Plasma Science, 38, 1598 (2010) [DOI: http://dx.doi.org/10.1109/TPS.2010.2049665]
  3. A. Ismach, C. Druzgalski, S. Penwell, A. Schwartzberg, M. Zheng, A. Javey, J. Bokor and Y. Zhang, Nano, Letters, 10, 1542 (2010) [DOI: http://dx.doi.org/10.1021/nl9037714].
  4. F. Schedin, A. K. Geim, S. V. Morozov, E. W. Hill, P.Blake, M. I. Katsnelson and K. S. Novoselov, Nat. Mater., 6(9), 652 (2007) [DOI: http://dx.doi.org/10.1038/nmat1967].
  5. Inanc Meric, Melinda Y. Han, Andrea F. Young, Barbaros Ozyilmaz, Philip Kim & Kenneth L. Shepard, Nature Nanotechnology, 3, 654 (2008) [DOI: http://dx.doi.org/10.1038/nnano.2008.268].
  6. T. Ohta, A. Bostwick, T. Seyller, K. Horn, and E. Rotenberg, Science, 313(5789), 951 (2006) [DOI: http://dx.doi.org/10.1126/science.1130681].
  7. A. Reina, X. Jia, J. Ho, D. Nezich, H. Son, V. Bulovic, M. S. Dresselhaus and J. Kong, Nano Letters, 9, 30 (2009) [DOI: http://dx.doi.org/10.1021/nl801827v]
  8. Y. Zhang, J. P. Smal l , W. V. Pontius and P. Kim, Appl . Phys. Lett., 86(7), 073104 (2005) [DOI: http://dx.doi.org/10.1063/1.1862334]
  9. Byung-Jae Kim,1 Chongmin Lee,1 Younghun Jung,1 Kwang Hyeon Baik,2 Michael A. Mastro,3 Jennifer K. Hite,3 Charles R. Eddy, Jr.,3 and Jihyun Kim, Appl. Phys. Lett., 99, 143101 (2011) [DOI: http://dx.doi.org/10.1063/1.3644496].
  10. L. Adamska, R. Addou, M. Batzill, and I. I. Oleynik, Appl. Phys. Lett., 101, 051602 (2012) [DOI: http://dx.doi.org/10.1063/1.4739475].
  11. C. Berger, Z. Song, X. Li, X. Wu, N. Brown, C. Naud, D. Mayou, T. Li, J. Hass, A. N. Marchenkov, E. H. Conrad, P. N. First and W. A. de Heer, Science, 26, 1191 (2006) [DOI: http://dx.doi.org/10.1126/science.1125925].
  12. 4. S. H. Song, O. S. Kwon, H. K. Jeong and Y. G. Kang, Kor. J. Mater. Res., 20(2), 104 (2010) [DOI: http://dx.doi.org/10.3740/MRSK.2010.20.2.104].
  13. A. K. Geim and K. S. Novoselov, Nat. Mater., 6, 183 (2007) [DOI: http://dx.doi.org/10.1038/nmat1849].

Cited by

  1. Novel transparent conductor with enhanced conductivity: hybrid of silver nanowires and dual-doped graphene vol.419, 2017, https://doi.org/10.1016/j.apsusc.2017.04.129
  2. Highly sensitive chemiresistive H 2 S gas sensor based on graphene decorated with Ag nanoparticles and charged impurities vol.257, 2018, https://doi.org/10.1016/j.snb.2017.10.128
  3. Influence of hydrophobicity on the chemical treatments of graphene vol.72, pp.1, 2018, https://doi.org/10.3938/jkps.72.107
  4. Raman spectroscopy vol.108, pp.20, 2016, https://doi.org/10.1063/1.4950969