Water Vapor Permeation Properties of Al2O3/TiO2 Passivation Layer Deposited by Atomic Layer Deposition
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Kwon, Tae-Suk
(Department of Nanoscale Semiconductor Engineering, Hanyang University)
Moon, Yeon-Keon (Department of Materials Science and Engineering, Hanyang University) Kim, Woong-Sun (Department of Materials Science and Engineering, Hanyang University) Moon, Dae-Yong (Department of Nanoscale Semiconductor Engineering, Hanyang University) Kim, Kyung-Taek (Department of Materials Science and Engineering, Hanyang University) Shin, Sae-Young (Department of Materials Science and Engineering, Hanyang University) Han, Dong-Suk (Department of Nanoscale Semiconductor Engineering, Hanyang University) Park, Jae-Gun (Department of Electrical and Computer Engineering, Hanyang University) Park, Jong-Wan (Department of Materials Science and Engineering, Hanyang University) |
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