• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.230-231
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• 2005

본 논문은 광 활성도가 가장 좋은 아나타제(anatase) 상의 광촉매 $TiO_2$ 분말을 상온에서 aerosol deposition 법을 사용하여 박막을 제조하였다. 이런 제조 방법은 aerosol 분말을 초음속으로 분사하여 기판에 증착시키는 방법으로, 저온에서 박막 증착이 가능하여 thermal stress를 줄일 수 있고, 공정 단가를 낮출 수 있다는 장점이 있다. 박막 제조시 aerosol bath의 압력은 500 torr이고, chamber의 압력은 0.4 torr였다. 이런 압력차는 0.4mm$\times$10mm의 크기의 노즐을 통해 $TiO_2$ 나노 분말을 초음속으로 가속하여 기판에 증착시켰다. 박막 제조를 위해 사용한 기판은 수질정화에 응용하기 위해 직경 50mm인 원판 SUS 멤브레인을 사용하였다. SUS 멤브레인 위에 증착되어 있는 $TiO_2$ 박막의 입자 크기와 조성을 알아보기 위해 주사 현미경 (SEM) 및 EDX 분석을 하였고, l$\mu$m 정도의 입자 크기와 수처리 후에도 표면에 증착 되어진 anatase 상의 $TiO_2$ 박막을 확인할 수 있었다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.4
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• pp.235-240
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• 2017

The effect of particle sizes on the aerosol deposition (AD) of Cu films is investigated in order to understand the deposition behaviors of metal powder during the AD process. The Cu coatings fabricated by using $2{\mu}m$ Cu powders had a dense microstructure, a high deposition rate ($1.6{\pm}0.2{\mu}m/min$), and low resistance ($9.42{\pm}0.4{\mu}{\Omega}{\cdot}cm$) compared to that from using Cu powder with a particle size greater than $5{\mu}m$. Also, from estimating the internal micro-strain of Cu films, the Cu coatings fabricated by using $2{\mu}m$ Cu particles exhibited a high micro-strain value of $3.307{\times}10^{-3}$. On the other hand, the strain of Cu coatings fabricated with $5{\mu}m$ particles was decreased to $2.76{\times}10^{-3}$. These results seem to show that the impacted Cu particles are compressed and flattened by shock waves, and that their bonding is associated with the high internal micro-strain caused by plastic deformation.

• Journal of Environmental Health Sciences
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• v.39 no.1
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• pp.56-70
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• 2013

Objectives: This paper aims to investigate the seasonal deposition characteristics of water-soluble ion species by comparing the deposition amount of two samples taken according to different sampling methods of deposition for ambient aerosol such as gases and particulate matters. Methods: Deposition samples were collected using two deposition gauges in the downtown area of Iksan City over approximately two weeks of each season in 2004. The type of deposition gauges consisted of two different sampling methods known as dry gauge and a wet gauge. The dry gauge was empty and used a dry PE bottle with an inlet diameter of 9.6 cm. Before the beginning of each deposition sampling, a volume of 30-50 ml distilled ionized water was added to the wet gauge to wet the bottom during the sampling period. Deposition samples were measured twice per day and analyzed for inorganic water-soluble ion species using ion chromatography. Results: The daily deposition amounts of all measured ions in the dry gauge and the wet gauge showed a significant increase when precipitation occurred, having no difference of deposition amount between in the wet gauge and in the dry gauge. By excluding two samples from rainy days during the sampling period, the mean daily deposition of all ions in dry gauge and wet gauge were $6.58mg/m^2/day$ and $18.16mg/m^2/day$, respectively. The mean deposition amounts of each ion species were higher in the wet gauge than in the dry gauge because of the surface difference of the sampling gauge, especially for $NH_4{^+}$ and ${SO_4}^{2-}$. The mean deposition amounts of $NH_4{^+}$ and ${SO_4}^{2-}$ in the wet gauge were found to be about 15.4 times and 5.2 times higher than that in dry gauge, with a pronounced difference between spring and summer, while the remaining ion species were 1.1-2.0 times higher in the wet gauge than in the dry gauge. Dominant species in the dry gauge were $Ca^{2+}$ and $NO_3{^-}$, accounting for 36.4% and 18.1% of the total ion deposition, whereas those in the wet gauge were $NH_4{^+}$ and ${SO_4}^{2-}$, accounting for 32.5% and 25.0% of the total ion deposition, respectively. Conclusion: The seasonal differences in deposition amounts of water-soluble ion species in ambient aerosol depending on the two types of different sampling methods were identified. This suggests that the removal of ambient aerosol is strongly influenced by the weather conditions of each season as well as the condition of earth's surface, such as dry ground and water.

• Journal of the Korean Magnetics Society
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• v.18 no.1
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• pp.9-13
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• 2008

Bismuth-substituted yttrium iron garnet($Bi_{0.5}Y_{2.5}Fe_5O_{12}$) films were deposited with the aerosol deposition method and their magnetic and optical properties were investigated as a function of the aerosol incident angle. The optical transmittance of Bi:YIG increased about 80% with increasing the aerosol incident angle from 0 degree to 30 degree, due to decrease of the defects which were formed from agglutinations of the Bi:YIG particles inside and/or surface of the film. The coercive force also decreased largely with increasing the aerosol incident angle due to the reduction of the collision energy between the particles and the substrate and the decrease of the defects.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.21.2-21.2
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• 2011

에어로졸 데포지션(Aerosol deposition) 기술은 상온에서 초음속 유동을 통해 분사된 미세 입자가 기판에 충돌하면서 강력한 결합을 형성하는 방식으로 코팅이 이루어진다. 이 방법은 별도의 소결과정 없이 상온에서도 조밀하고 균일한 박막을 형성할 수 있다. 또한 세라믹, 금속 재질의 다양한 입자를 사용할 수 있을 뿐만 아니라 금속, 유리 기판등에 적용이 가능하다. 본 논문은 이러한 에어로졸 데포지션 기술을 이용하여 광촉매 효과가 뛰어난 $TiO_2$ 입자를 대면적 코팅에 적용가능한 초음속 노즐을 통해 분사하여 ITO기판 위에 박막을 형성하였다. $TiO_2$ 입자의 크기, 기판의 이송 속도와 왕복횟수, 공급 유량 등이 코팅면의 특성과 조성 등에 미치는 영향을 분석하였다. $TiO_2$ 박막층의 형상과 두께는 주사전자현미경(SEM)을 통해 확인하였고, X-ray diffraction (XRD)를 이용하여 코팅 입자와 박막 층의 조성을 각각 확인하였다. 에어로졸 데포지션을 이용한 $TiO_2$ 코팅층은 염료감응형 태양전지(DSSC), 자정작용(self-cleaning), 살균작용(antibacterial effect) 등의 적용분야에 적용 가능할 것으로 판단된다.

• Particle and aerosol research
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• v.5 no.3
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• pp.111-122
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• 2009

This paper reviews about synthesis of nanoparticles by spark discharge and applications. A method of catalytic activation with Pd and Pt aerosol nanoparticles produced by spark discharge was introduced. After annealing, the catalytically activated substrate placed into a solution for electroless silver deposition. The silver was then formed only on the activated regions of the substrate. Silver line patterns having a width of $18{\mu}m$ and a height of $1{\mu}m$ were created with the ability to be effectively reproduced. Antimicrobial nanoparticles such as silver were used for removal of bioaerosols. Silver nanoparticles deposited air filters such as ACF filters were evaluated by antimicrobial test.

• Journal of Korean Society for Atmospheric Environment
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• v.20 no.E2
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• pp.61-68
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• 2004

Aerosol losses in a 100L Tedlar$^{(R)}$ bag were investigated for the aerosols with number median diameter of 0.05 ${\mu}{\textrm}{m}$ and number concentration of 6.4 ${\times}$ 10$^4$ cm$^{-3}$ . Over a 1 hr period, loss of particles in the bag is apparent, and the volume decrease with time is significant. The number concentration, surface area, and volume concentration of the aerosols decreased to 34, 50, and 52% of the initial value in 30 min, respectively. This indicates that deposition to the walls was the main loss process for aerosols in the Tedlar$^{(R)}$ bag. Theoretical calculations showed that coagulations and deposition by diffusion and gravitational sedimentation would not change aerosol characteristics significantly, and the electrical force was the dominant loss process for particles in the Tedlar$^{(R)}$ bag over a 1 hr period.eriod.

• Journal of the Korean GEO-environmental Society
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• v.11 no.1
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• pp.5-11
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• 2010

The objective of this study is to evaluate the effect of operational parameters such as rotation speed and vibrating milling time for the fabrication of photocatalytic $TiO_2$ thin film using aerosol deposition methods. $TiO_2$ powders produced in the range of 1,000-3,000 rpm of rotation speed of centrifugal separator are ineffective on the fabrication of $TiO_2$ thin film by aerosol deposition due to the problem of nozzle powder jam. $TiO_2$ powders controlled by vibrating milling had about 420 nm of average diameter after 2 hr of vibrating milling time. The result of XRD analysis indicated that $TiO_2$ powders had a anatase phase. Vibrating milling methods was considered to be an effective pre-treatment process for $TiO_2$ powder control. Consequently $TiO_2$ photocatalytic thin film with dispersion of anatase crystallites controled by vibrating milling was successfully fabricated by aerosol deposition. The permeation flux of $TiO_2$ photocatalytic thin film with the immobilized $TiO_2$ powder was higher than that of suspended $TiO_2$ powder. Therefore, $TiO_2$ photocatalytic thin film promises to be one of the effective methods for enhancing filtration performance for the treatment of organic pollutants.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.4
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• pp.608-613
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• 2000

The present study has proposed a novel aerosol CVD utilizing an internal jet in the conventional MCVD reactor for the purpose of enhancing the deposition efficiency(and rate) and the uniformity of deposited film. The use of impingement of high temperature jet through a thin inner tube ensures the reduction of non-uniform particle deposition zone as well as higher thermophoretic particle deposition. It is shown that significant improvements have been achieved for both aspects of deposition efficiency and uniformity. As jet temperatures increase, the tapered length is reduced and deposition efficiency is significantly increased.

• Particle and aerosol research
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• v.14 no.2
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• pp.41-47
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• 2018

Numerical analysis was conducted to characterize particle deposition onto a heated horizontal semiconductor wafer in vacuum environment. In order to calculate the properties of gas surrounding the wafer, the gas was assumed to obey the ideal gas law. Particle transport mechanisms considered in the present study were convection, Brownian diffusion, gravitational settling and thermophoresis. Averaged particle deposition velocities on the upper surface of the wafer were calculated with respect to particle size, based on the numerical results from the particle concentration equation in the Eulerian frame of reference. The deposition velocities were obtained for system pressures of 1000 Pa~1 atm, wafer heating of 0~5 K and particle sizes of $2{\sim}10^4nm$. The present numerical results showed good agreement with the available experimental ones.