Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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An Aerosol CVD Method Using Internal Jet for Optical Fiber Synthesis

내부제트 분사를 이용한 새로운 광섬유제조 화학증착 방법에 관한 연구

  • 홍춘근 (서울대학교 대학원) ;
  • 최만수 (서울대학교 기계항공공학부 정밀기계설계공동연구소 나노입자제어기술연구단)
  • Published : 2000.04.01
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Abstract

The present study has proposed a novel aerosol CVD utilizing an internal jet in the conventional MCVD reactor for the purpose of enhancing the deposition efficiency(and rate) and the uniformity of deposited film. The use of impingement of high temperature jet through a thin inner tube ensures the reduction of non-uniform particle deposition zone as well as higher thermophoretic particle deposition. It is shown that significant improvements have been achieved for both aspects of deposition efficiency and uniformity. As jet temperatures increase, the tapered length is reduced and deposition efficiency is significantly increased.

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References

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