• Journal of information and communication convergence engineering
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• 제1권3호
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• pp.129-132
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• 2003

In this paper, cobalt (Co)-electrode FBAR devices fabricated on seven-layered Bragg Reflectors are presented along with their resonance characteristics. ZnO films are used as the resonating material in FBAR devices where the Co electrode is 3000${\AA}$ thick. All processes are preformed in an RF magnetron sputtering system. As a result of characterization, the resonance characteristics are observed to depend strongly on the quality of ZnO film and Bragg Reflectors. In addition, the FBAR devices with W/$SiO_2$ reflectors show good resonance characteristics in term of return loss and quality-factor (Q-factor).

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2007년도 추계종합학술대회
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• pp.204-207
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• 2007

Film bulk acoustic wave resonator (FBAR) technology has attracted a great attention as a promising technology to fabricate the next-generation RF filters mainly because the FBAR technology can be integrated with current Si processing. The RF filters are basically composed of several FBAR devices connected in parallel and in series, and their characteristics depend highly on the FBAR device characteristics. Thus, it is important to design high quality FBAR devices by device or process optimization. This kind of effort may enhance the FBAR device characteristics, eventually leading to FBAR filters of high performance. In this paper, we describe the methods to more effectively improve the resonance characteristics of the FBAR devices.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1991년도 하계학술대회 논문집
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• pp.611-614
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• 1991

In variable speed driving system of three phase induction motor controlled by an inverter, because of the switching of semiconductor devices in inverter, an appreciable amount of harmonic components of voltage waveform can cause the motor to generate losses, torque ripple, acoustic noise and oscillation of semiconductor devices. In this paper a new PAM type PWM inverter using IGBT is described. The output waveforms in the proposed PAM type PWM inverter are investigated both theoretiically and experimentally. The line-voltage waveform is composed of fundamental component and the sidebands of carrier frequency. The lower order harmonics are not included in the output wave form. As each inverter arm does not operate during two-thirds period, the heats, generated in the devices are reduced. That is, the size of the inverter system can he minimized because of the reduction in the heat dissipating equipment.

• Journal of information and communication convergence engineering
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• 제5권4호
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• pp.316-319
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• 2007

This paper presents some methods to improve the resonance characteristics of film bulk acoustic-wave resonator (FBAR) devices. The FBAR devices were fabricated on multilayer Bragg reflectors (BR) into which very thin chromium (Cr) adhesion layers were inserted, followed by several kinds of thermal annealing processes. These methods resulted in an excellent device improvement in terms of return loss and Q-factors.

• Journal of information and communication convergence engineering
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• 제6권1호
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• pp.34-37
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• 2008

Effects of the addition of Cr adhesion layer to $W/SiO_2$ multilayer Bragg reflectors on the resonance characteristics of film bulk acoustic wave resonator (FBAR) devices are presented. Main resonance peaks could be significantly shifted to higher frequency, mainly due to the addition of Cr adhesion layer to multilayer Bragg reflectors and control of the bottom electrode thickness as well. The FBAR devices with the Cr adhesion layer in Bragg reflectors could result in much more improved resonance characteristics at about 3 GHz in terms of return loss and Q-factor.

• Journal of Electrical Engineering and Technology
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• 제13권6호
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• pp.2434-2440
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• 2018

A new type of piezoelectric micromachined ultrasonic transducer (pMUT) with high resonant frequency was developed by using a thin lead zirconate titanate (PZT) as an insulation layer on a floating $10{\mu}m$ silicon membrane. The PZT insulation layer facilitated acoustic impedance matching at active pMUT, leading to a high performance in the acoustic conversion property compared with the transducer using $SiO_2$ insulation layer. The fabricated ultrasonic devices were wirelessly measured by connecting two identical acoustic transducers to two separate ports in a single network analyzer simultaneously. The acoustic wave emitted from a transducer induced a $3.16{\mu}W$ on the other side of the transducer at a distance of 2 cm. The transducer performances in terms of device diameters, PZT thickness, annealings, and different DC polings, etc. were investigated. COMSOL simulation was also performed to predict the device performances prior to fabrication. Based on the COMSOL simulation, the device was fabricated and the results were compared.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2011년도 춘계학술대회
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• pp.696-698
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• 2011

박막 벌크 음향 공진 소자 (Film Bulk Acoustic Resonator, FBAR) 기술은 현 실리콘 공정 기술과 호환되며 차세대 초소형 RF소자 구현을 가능하게 하는 기술로 각광받아 오고 있다. FBAR 소자 제작 시 박막 증착에 RF 스퍼터링 (sputtering) 방식을 이용하는 경우 산소 ($O_2$) 및 아르곤 (Ar)의 혼합가스 분위기에서 증착하는 것이 통상적이다. 본 논문에서는 아산화질소 ($N_2O$) 및 아르곤 (Ar)의 혼합가스 분위기에서 RF 스퍼터링 방식으로 증착된 고품위의 산화아연 (Zinc Oxide, ZnO) 압전(piezoelectric) 박막을 적용하여 FBAR 소자를 제작하는 새로운 방법을 제시한다. 이때 소자 제작과정에 다양한 조건에서의 열처리 과정 (thermal annealing treatments)이 수반되었으며, 이러한 공정조건이 제작된 FBAR 소자의 공진특성 (resonance characteristics)에 미치는 영향을 반사손실 (return loss)의 측면에서 조사하였다. 결과적으로, 공정 조건을 최적화함으로써 ~2.9 MHz 에서 매우 우수한 공진특성을 가지는 FBAR 소자를 제작할 수 있었다.

• 한국기계가공학회지
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• 제15권5호
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• pp.100-108
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• 2016

In various industries, many researches studies have been done in using nano thin film fabrication technology. In the field of printed electronics, various electronic devices can be fabricated using a direct printing process of on multiple functional materials. It has the advantages of low prices, environment-friendly environmentally friendly, flexibleility, large scale, mass production produced, simple process and so on. In this study, a viable thin film fabrication technology has beenwas introduced using the surface acoustic wave mechanism for thin film deposition. Fabrication of thin films using organic, inorganic and composite of organic/inorganic materials have been were analyzed through the experimental research. In this experiment, organic material MEH:PPV, inorganic material ZnO and composite material MEH:PPV/ZnO have been depo sited as thin films.

• 센서학회지
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• 제16권5호
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• pp.349-354
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• 2007

This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such as ethanol gas by measuring the phase shift of output signal. A delay-line with a center frequency of 400 MHz was fabricated on $128^{\circ}$ Y-Z $LiNbO_{3}$ substrates. Experimental results, which showed the phase change of the output signal under the absorption of volatile gas on sensor surface, were presented. The sensitivities of SAW delay lines coated with polyurethane films were greatly increased compared to those for uncoated devices. This SAW gas sensor system may be well suited for a high sensitivity electronic nose system.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.364-364
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• 2007

This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such as ethanol gas by measuring phase shift of output signal. A delay-line with a center frequency of 400MHz was fabricated on 128o Y-Z $LiNbO_3$ substrates. Experimental results, which show the phase change of output signal under the absorption of volatile gas on sensor surface, were presented. The sensitivities of SAW delay lines coated with polyurethane films are greatly increased compared to those for uncoated devices. This SAW gas sensor system may be well suited for a high sensitivity electronic nose system.