Journal of information and communication convergence engineering

The Korea Institute of Information and Commucation Engineering (한국정보통신학회)
권호 표지

A Method to Improve Bragg Reflectors Quality in FBAR Devices

  • Mai, Linh (School of Engineering, Information and Communications University(ICU)) ;
  • Lee, Jae-Young (School of Engineering, Information and Communications University(ICU)) ;
  • Pham, Van Su (School of Engineering, Information and Communications University(ICU)) ;
  • Yoon, Gi-Wan (School of Engineering, Information and Communications University(ICU))
  • Published : 2007.12.30
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents some methods to improve the resonance characteristics of film bulk acoustic-wave resonator (FBAR) devices. The FBAR devices were fabricated on multilayer Bragg reflectors (BR) into which very thin chromium (Cr) adhesion layers were inserted, followed by several kinds of thermal annealing processes. These methods resulted in an excellent device improvement in terms of return loss and Q-factors.

Keywords

References

  1. J.H. Collins, 'A short history of microwave acoustics,' IEEE Trans Microwave Theory Tech MTT-32, 9, 1984, pp. 1127-1140
  2. S.V. Krishnaswamy, J.F. Rosenbaum, S.S. Horwitz, and R.A. Moore, 'Film bulk acoustic wave resonator and filter technology,' IEEE MTT-S Dig., 1992, pp. 153-155
  3. K.M. Lakin, K.T. McCarron, and R.E. Rose, 'Solidly mounted resonators and filter,' IEEE Proc Ultrasonics Symposium, 1995, pp. 905-908
  4. M. Yim, D.H. Kim, D. Chai, and G. Yoon 'Significant resonance characteristic improvements by combined used of thermal annealing and Co electrode in ZnO-based FBARs,' lET Electron Lett, Vol. 39, 2003, pp. 1638-1640 https://doi.org/10.1049/el:20031029
  5. M. Yim, D.H. Kim, D. Chai, and G. Yoon, 'Effects of thermal annealing of W/SiO2 multilayer Bragg reflectors on resonance characteristics of film bulk acoustic resonator devices with cobalt electrodes,' J. Vac.Sci. Technol. A, Vol. 22(3), 2004, pp. 465-471 https://doi.org/10.1116/1.1690248
  6. D.H. Kim, M. Yim, D. Chai, and G. Yoon, 'Improvements of resonance characteristics due to thermal annealing of Bragg reflectors in ZnO-based FBAR devices,' lET Electronics Lett., Vol.39(13), 2003, pp. 962-964 https://doi.org/10.1049/el:20030638
  7. L. Mai, H-I. Song, L.M. Tuan, P.V. Su, and G. Yoon, 'A comprehensive investigation of thermal treatment effects on resonance characteristics in FBAR devices,' MOTLs, Vol. 47(5), 2005, pp. 459-462
  8. K.M. Lakin, G.R. KLINE, and K.T. MCCARRON, 'High-Q microwave acoustic resonators and filters,' IEEE Trans. Microw. Theory Tech., Vol. 41, 1993, pp. 2139 - 2146 https://doi.org/10.1109/22.260698
  9. S.H. Park, B.C. Seo, H.D. Park, and G. Yoon, 'Film bulk acoustic resonator fabrication for radio frequency filter applications,' Jpn. J. Appl. Phys., Vol. 39, 2000, pp. 4115-4119 https://doi.org/10.1143/JJAP.39.4115