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A Method to Improve Bragg Reflectors Quality in FBAR Devices  

Mai, Linh (School of Engineering, Information and Communications University(ICU))
Lee, Jae-Young (School of Engineering, Information and Communications University(ICU))
Pham, Van Su (School of Engineering, Information and Communications University(ICU))
Yoon, Gi-Wan (School of Engineering, Information and Communications University(ICU))
Publication Information
Journal of information and communication convergence engineering / v.5, no.4, 2007 , pp. 316-319 More about this Journal
Abstract
This paper presents some methods to improve the resonance characteristics of film bulk acoustic-wave resonator (FBAR) devices. The FBAR devices were fabricated on multilayer Bragg reflectors (BR) into which very thin chromium (Cr) adhesion layers were inserted, followed by several kinds of thermal annealing processes. These methods resulted in an excellent device improvement in terms of return loss and Q-factors.
Keywords
Bragg reflector; FBAR; Q-factor; resonator; return loss;
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