Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Improved sensitivity of surface acoustic wave gas sensors by using polyurethane absorption layer

폴리우레탄 감지막에 의한 표면탄성파 가스 센서의 감지능 향상

  • Yoo, Beom-Keun (Thin Film Material Research Center, Korea Institute of Science and Technology) ;
  • Park, Yong-Wook (Dept. of Electronic Engineering, Namseoul University) ;
  • Choi, Doo-Jin (Dept. of Ceramic Engineering, Yonsei University) ;
  • Kim, Jin-Sang (Thin Film Material Research Center, Korea Institute of Science and Technology) ;
  • Yoon, Seok-Jin (Thin Film Material Research Center, Korea Institute of Science and Technology) ;
  • Kim, Hyun-Jai (Thin Film Material Research Center, Korea Institute of Science and Technology)
  • 유범근 (한국과학기술연구원 박막재료연구센터) ;
  • 박용욱 (남서울대학교 전자공학과) ;
  • 최두진 (연세대학교 신소재공학과) ;
  • 김진상 (한국과학기술연구원 박막재료연구센터) ;
  • 윤석진 (한국과학기술연구원 박막재료연구센터) ;
  • 김현재 (한국과학기술연구원 박막재료연구센터)
  • Published : 2007.09.29
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Abstract

This paper presents characteristics of surface acoustic wave (SAW) gas sensor for detecting volatile gases such as ethanol gas by measuring the phase shift of output signal. A delay-line with a center frequency of 400 MHz was fabricated on $128^{\circ}$ Y-Z $LiNbO_{3}$ substrates. Experimental results, which showed the phase change of the output signal under the absorption of volatile gas on sensor surface, were presented. The sensitivities of SAW delay lines coated with polyurethane films were greatly increased compared to those for uncoated devices. This SAW gas sensor system may be well suited for a high sensitivity electronic nose system.

Keywords

References

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