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Realization of FBAR Devices for Broadband WiMAX Applications  

Mai, Linh (School of Engineering, Information and Communications University (ICU))
Lee, Jae-Young (School of Engineering, Information and Communications University (ICU))
Pham, Van Su (School of Engineering, Information and Communications University (ICU))
Yoon, Gi-Wan (School of Engineering, Information and Communications University (ICU))
Publication Information
Journal of information and communication convergence engineering / v.6, no.1, 2008 , pp. 34-37 More about this Journal
Abstract
Effects of the addition of Cr adhesion layer to $W/SiO_2$ multilayer Bragg reflectors on the resonance characteristics of film bulk acoustic wave resonator (FBAR) devices are presented. Main resonance peaks could be significantly shifted to higher frequency, mainly due to the addition of Cr adhesion layer to multilayer Bragg reflectors and control of the bottom electrode thickness as well. The FBAR devices with the Cr adhesion layer in Bragg reflectors could result in much more improved resonance characteristics at about 3 GHz in terms of return loss and Q-factor.
Keywords
Bragg reflector; FBAR; Q-factor; resonator; return loss; WiMAX;
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