• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part 1
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• pp.358-359
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• 2006

Ru-C nano-composite films were prepared by MOCVD, and their microstructures and their electrode properties for oxygen gas sensors were investigated. Deposited films contained Ru particles of 5-20 nm in diameter dispersed in amorphous C matrix. The AC conductivities associating to the interface charge transfer between Ru-C composite electrode and YSZ electrolyte were 100-1000 times higher than that of conventional paste-Pt electrodes. The emf values of the oxygen gas concentration cell constructed from the nano-composite electrodes and YSZ electrolyte showed the Nernstian theoretical values at low temperatures around 500 K. The response time of the concentration cell was 900 s at 500 K.

• 전기전자학회논문지
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• 제23권3호
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• pp.1033-1037
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• 2019

GaN-based sensors have been widely investigated thanks to its potential in detecting the presence of hydrogen. In this study, we fabricated hydrogen gas sensors with AlGaN/GaN heterojunction and investigated how the sensing performance to be affected by SiN surface passivation. The gas sensor employed a high electron mobility transistors (HEMTs) with 30 nm platinum catalyst as a gate to detect the hydrogen presence. SiN layer was deposited by inductively-coupled chemical vapor deposition as post-passivation. The sensors with SiN passivation exhibited hydrogen sensing characteristics with various gas flow rates and concentrations of hydrogen in inert background gas at $200^{\circ}C$ similar to the ones without passivation. Aside from quick response time for both sensors, there are differences in sensitivity and recovery time because of the existence of the passivation layer. The results also confirmed the dependence of sensing performance on gas flow rate and gas concentration.

• 마이크로전자및패키징학회지
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• 제12권3호
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• pp.227-233
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• 2005

알루미나 기판에 빗살 모양의 금 전극을 형성한 후 플라즈마 화학기상법으로 탄소 나노튜브를 성장하여 이산화질소 감지 특성을 조사하였다. 탄소 나노튜브 센서의 전기저항은 온도 증가에 따라 감소하는 반도체 특성을 보였으며, 또한 이산화질소의 농도가 증가하면 센서의 전기 저항은 감소하였다. 이산화질소의 흡착에 따라 탄소 나노튜브 센서의 전기저항은 초기 3분 이내에서는 급격히 감소하였으며 $20\~30$분 후에는 일정한 값을 유지하였다. 탄소 나노튜브 센서의 감도는 공기속에서 산화 열처리하면 증가되었다. $450^{\circ}C$에서 30분간 산화 열처리한 탄소 나노튜브 센서는 작동온도 $v$에서 낮은 이산화질소 농도인 250 ppb 에서도 $27\%$의 큰 감도를 보였다. 그러나 이산화질소 검출 후 재사용하기 위하여는 20분 이상의 회복 시간이 요구되고 있다.

• 대기
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• 제19권2호
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• pp.213-226
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• 2009

In order to investigate the characteristics of Changma over the Korean peninsula, KEOP-2007 IOP (Intensive Observing Period) was conducted from 15 June 2007 to 15 July 2007. KEOP-2007 IOP is high spatial and temporal radiosonde observations (RAOB) which consisted of three special stations (Munsan, Haenam, and Ieodo) from National Institute of Meteorological Research, five operational stations (Sokcho, Baengnyeongdo, Pohang, Heuksando, and Gosan) from Korea Meteorological Administration (KMA), and two operational stations (Osan and Gwangju) from Korean Air Force (KAF) using four different types of radiosonde sensors. The error statistics of the sensor of radiosonde were investigated using quality control check. The minimum and maximum error frequency appears at the sensor of RS92-SGP and RS1524L respectively. The error frequency of DFM-06 tends to increase below 200 hPa but RS80-15L and RS1524L show vice versa. Especially, the error frequency of RS1524L tends to increase rapidly over 200 hPa. Systematic biases of radiosonde show warm biases in case of temperature and dry biases in case of relative humidity compared with ECMWF (European Center for Medium-Range Weather Forecast) analysis data and precipitable water vapor from GPS. The maximum and minimum values of systematic bias appear at the sensor of DFM-06 and RS92-SGP in case of temperature and RS80-15L and DFM-06 in case of relative humidity. The systematic warm and dry biases at all sensors tend to increase during daytime than nighttime because air temperature around sensor increases from the solar heating during daytime. Systematic biases of radiosonde are affected by the sensor type and the height of the sun but random errors are more correlated with the moisture conditions at each observation station.

• 센서학회지
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• 제25권4호
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• pp.275-279
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• 2016

Chemical vapor deposited (CVD) polycrystalline graphene is widely used for various sensor application because of its extremely large surface-to-volume ratio. The electrical properties of CVD-graphene is significantly affected by the grain size and boundaries (GGBs), but evaluation of GGB of continuous monolayer graphene is difficult. Although several evaluation methods such as tunneling electron microscopy, confocal Raman, UV/ozone-oxidation are typically used, they still have issues in evaluation efficiency and accuracy. In this paper, we suggest an improved evaluation method for precise and simple GGB evaluation which is based on UV/ozone-oxidation and chemical etching process. Using this method, we could observe clear GGBs of CVD-graphene layers grown by different process conditions and statistically evaluate average grain sizes varying from $1.69{\sim}4.43{\mu}m$. This evaluation method can be used for analyzing the correlation between the electrical properties and grain size of CVD-graphene, which is essential for the development of graphene-based sensor devices.

• 센서학회지
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• 제26권2호
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• pp.122-127
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• 2017

Graphene grown on copper-foil substrates by chemical vapor deposition (CVD) has been attracting interest for sensor applications due to an extraordinary high surface-to-volume ratio and capability of large-scale device fabrication. However, CVD graphene has a polycrystalline structure and a high density of grain boundaries degrading its electrical properties. Recently, processes such as electropolishing for flattening copper substrate has been applied before growth in order to increase the grain size of graphene. In this study, we systemically analyzed the effects of the process condition of electropolishing copper foil on the quality of CVD graphene. We observed that electropolishing process can reduce surface roughness of copper foil, increase the grain size of CVD graphene, and minimize the density of double-layered graphene regions. However, excessive process time can rather increase the copper foil surface roughness and degrade the quality of CVD graphene layers. This work shows that an optimized electropolishing process on copper substrates is critical to obtain high-quality and uniformity CVD graphene which is essential for practical sensor applications.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2004년도 학술대회지
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• pp.130-136
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• 2004

Presence of water in the lubricating oils could be one of the first indicators of potentially expensive and possibly catastrophic failure of the machine as it may cause displace the oil films to prevent the lubrication function of the oil or chemically react with many oil additives resulting in the oil degradation. In order to detect water content quantitatively in lubricating oils many methods and sensors has been developed. Among these, capacitive sensors including sensitive layer, whose dielectric factor changes according to the water content absorbed in the layer, are proposed mainly in the market. But these sensors are not sensitive to a high water content. Besides, the absorbing layer soils in time. In this work, an evaporation of water moisture from oil into air volume above lubricant surface and condensation of water vapor at a cooling surface was used to measure water content quantitatively in an lubricating oil. Laboratory test results of a prototype sensor were presented. Test results showed that the proposed method could be avaliable to measure a low levels of oil moisture.

• 통합자연과학논문집
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• 제3권2호
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• pp.117-121
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• 2010

Silicon quantum dots base on photoluminescent porous silicon were prepared from an electrochemical etching of n-type silicon wafer (boron-dopped<100> orientation, resistivity of 1~10 ${\Omega}-cm$) and used as a alcohol sensor. Silicon quantum dots displayed an emission band at the wavelength of 675 nm with an excitation wavelength of 480 nm. Photoluminescence of silicon quantum dots was quenched in the presence of alcohol vapors such as methanol, ethanol, and isopropanol. Quenching efficiencies of 21.5, 32.5, and 45.8% were obtained for isopropanol, ethanol, and methanol, respectively. A linear relationship was obtained between quenching efficiencies and vapor pressure of analytes used. Quenching photoluminescence was recovered upon introducing of fresh air after the detection of alcohol. This provides easy fabrication of alcohol sensor based on porous silicon.

• 열처리공학회지
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• 제24권2호
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• pp.87-91
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• 2011

Single layer Sn doped $In_2O_3$ (ITO) films and ITO 50 nm / Au 10 nm / ITO 40 nm (IAI) multilayer films were prepared with electron beam assisted magnetron sputtering on glass substrates. The effects of the Au interlayer, post-deposition atmosphere annealing and intense electron irradiation on the methanol gas sensitivity were investigated at room temperature. As deposited ITO films did not show any diffraction peaks in the XRD pattern, while the IAI films showed the diffraction peak for $In_2O_3$ (400). In this study, the gas sensitivity of ITO and IAI films increased proportionally with the methanol vapor concentration and an intense electron beam irradiated IAI film shows the higher sensitivity than the others film. From the XRD pattern, it is supposed that increased crystallization promotes the gas sensitivity. This approach is promising in gaining improvement in the performance of IAI gas sensors used for the detection of methanol vapor at room temperature.

• Spatial Information Research
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• 제18권4호
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• pp.33-41
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• 2010

우리나라에는 100여개의 GPS 상시관측소가 설치되어 있으나 대략 10개의 관측소만이 GPS 전용 기상센서를 보유하고 있다. 따라서 전국을 대상으로 하는 GPS 가강수량 산출을 위해서는 주변 AWS의 가상자료 보간에 의한 GPS 관측소 기상정보의 생성이 필요하다. 이 연구에서는 가상자료 보간 방법인 역해면경정과 크리깅의 보간 정확도를 분석하였다. 그 결과 역해변경정법의 RMSE가 기압의 경우 약 7배, 기온의 경우 약 2배 더 정확함을 확인하였다. PWV 정확도 분석을 위해 역해면경정법으로 보간된 기상자료와 GPS 관측자료를 이용해 2008년 여름철에 대한 GPS PWV를 산출하였다. 보간 기상 자료를 이용한 GPS PWV를 GPS 전용 기상센서의 값을 사용한 PWV, 라디오존데 PWV와 비교하였다. 비교 결과 보간 기상자료를 이용한 GPS PWV 가 요구 정확도 3mm이내를 만족함을 확인하였다.