Preparation of Ru-C Nano-composite Film by MOCVD and Electrode Properties for Oxygen Gas Sensor

  • Kimura, Teiichi (Institute for Materials Research, Tohoku University) ;
  • Goto, Takashi (Institute for Materials Research, Tohoku University)
  • 발행 : 2006.09.24

초록

Ru-C nano-composite films were prepared by MOCVD, and their microstructures and their electrode properties for oxygen gas sensors were investigated. Deposited films contained Ru particles of 5-20 nm in diameter dispersed in amorphous C matrix. The AC conductivities associating to the interface charge transfer between Ru-C composite electrode and YSZ electrolyte were 100-1000 times higher than that of conventional paste-Pt electrodes. The emf values of the oxygen gas concentration cell constructed from the nano-composite electrodes and YSZ electrolyte showed the Nernstian theoretical values at low temperatures around 500 K. The response time of the concentration cell was 900 s at 500 K.

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