Journal of the Korean Society for Heat Treatment (열처리공학회지)

The Korean Society for Heat Treatment (한국열처리공학회)
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Fabrication and Characterization of the ITO/Au/ITO Thin Film Gas Sensor by RF Magnetron Sputtering and electron Irradiation

RF 스퍼터와 전자빔 조사를 이용한 ITO/Au/ITO 가스센서 제조 및 특성 평가

  • Heo, Sung-Bo (Department of Materials Science and Engineering, Ulsan University) ;
  • Lee, Hak-Min (Department of Materials Science and Engineering, Ulsan University) ;
  • Kim, Yu-Sung (New Optics LTD., R&D Division) ;
  • Chae, Ju-Hyun (New Optics LTD., R&D Division) ;
  • You, Yong-Zoo (Department of Materials Science and Engineering, Ulsan University) ;
  • Kim, Dae-Il (Department of Materials Science and Engineering, Ulsan University)
  • 허성보 (울산대학교 첨단소재공학부) ;
  • 이학민 (울산대학교 첨단소재공학부) ;
  • 김유성 (뉴옵틱스, 공정연구개발팀) ;
  • 채주현 (뉴옵틱스, 공정연구개발팀) ;
  • 유용주 (울산대학교 첨단소재공학부) ;
  • 김대일 (울산대학교 첨단소재공학부)
  • Received : 2011.02.05
  • Accepted : 2011.03.28
  • Published : 2011.03.30
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Abstract

Single layer Sn doped $In_2O_3$ (ITO) films and ITO 50 nm / Au 10 nm / ITO 40 nm (IAI) multilayer films were prepared with electron beam assisted magnetron sputtering on glass substrates. The effects of the Au interlayer, post-deposition atmosphere annealing and intense electron irradiation on the methanol gas sensitivity were investigated at room temperature. As deposited ITO films did not show any diffraction peaks in the XRD pattern, while the IAI films showed the diffraction peak for $In_2O_3$ (400). In this study, the gas sensitivity of ITO and IAI films increased proportionally with the methanol vapor concentration and an intense electron beam irradiated IAI film shows the higher sensitivity than the others film. From the XRD pattern, it is supposed that increased crystallization promotes the gas sensitivity. This approach is promising in gaining improvement in the performance of IAI gas sensors used for the detection of methanol vapor at room temperature.

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References

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