Fabrication and Characterization of the ITO/Au/ITO Thin Film Gas Sensor by RF Magnetron Sputtering and electron Irradiation |
Heo, Sung-Bo
(Department of Materials Science and Engineering, Ulsan University)
Lee, Hak-Min (Department of Materials Science and Engineering, Ulsan University) Kim, Yu-Sung (New Optics LTD., R&D Division) Chae, Ju-Hyun (New Optics LTD., R&D Division) You, Yong-Zoo (Department of Materials Science and Engineering, Ulsan University) Kim, Dae-Il (Department of Materials Science and Engineering, Ulsan University) |
1 | C. H. Shin, J. H. Chae, Y. S. Kim, C. W. Jeong, and D. Kim, Kor. J. Mater. Res., 20 (2010) 267. DOI |
2 | A. Salehi, Sens. Actuators B., 96 (2003) 88. DOI ScienceOn |
3 | T. Seiyaku, A. Kato, and N. Nagatani, Anal. Chem., 34 (1962) 1502. DOI |
4 | N. Taguchi, Japanese Patent Application No. 45-38200 (1962). |
5 | P. S. Cho, Kor. J. Mater. Res., 18(2) (2008) 69. DOI |
6 | N. G. Partel and V. S. Vaishnav, Sens. Actuators B., 180 (2003) 96. |
7 | Y. B. Kim, W. Y. Lee, and J. S. Park, J. Kor. Sens. Soc., 17 (2008) 361. |
8 | Y. S. Kim, J. H. Park, and D. Kim, Vacuum, 82 (2008) 574. DOI ScienceOn |
9 | B. D. Cullity, Elements of X-ray Diffractions, Addition-Wesley, Reading, MA, 1978, pp. 102. |
10 | J. B. Kwon, K. K. Jung, and K. S. Yoo, J. Kor. Ceram. Soc., 39 (2002) 840. DOI |