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http://dx.doi.org/10.12656/jksht.2011.24.2.087

Fabrication and Characterization of the ITO/Au/ITO Thin Film Gas Sensor by RF Magnetron Sputtering and electron Irradiation  

Heo, Sung-Bo (Department of Materials Science and Engineering, Ulsan University)
Lee, Hak-Min (Department of Materials Science and Engineering, Ulsan University)
Kim, Yu-Sung (New Optics LTD., R&D Division)
Chae, Ju-Hyun (New Optics LTD., R&D Division)
You, Yong-Zoo (Department of Materials Science and Engineering, Ulsan University)
Kim, Dae-Il (Department of Materials Science and Engineering, Ulsan University)
Publication Information
Journal of the Korean Society for Heat Treatment / v.24, no.2, 2011 , pp. 87-91 More about this Journal
Abstract
Single layer Sn doped $In_2O_3$ (ITO) films and ITO 50 nm / Au 10 nm / ITO 40 nm (IAI) multilayer films were prepared with electron beam assisted magnetron sputtering on glass substrates. The effects of the Au interlayer, post-deposition atmosphere annealing and intense electron irradiation on the methanol gas sensitivity were investigated at room temperature. As deposited ITO films did not show any diffraction peaks in the XRD pattern, while the IAI films showed the diffraction peak for $In_2O_3$ (400). In this study, the gas sensitivity of ITO and IAI films increased proportionally with the methanol vapor concentration and an intense electron beam irradiated IAI film shows the higher sensitivity than the others film. From the XRD pattern, it is supposed that increased crystallization promotes the gas sensitivity. This approach is promising in gaining improvement in the performance of IAI gas sensors used for the detection of methanol vapor at room temperature.
Keywords
Film sensor; Indium tin oxide; Au; XRD; Sensitivity; Electron irradiation;
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Times Cited By KSCI : 4  (Citation Analysis)
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