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http://dx.doi.org/10.5369/JSST.2016.25.4.275

Evaluation Method for Graphene Grain Boundary by UV/ozone-oxidation Chemical-etching Process  

Kang, Jaewoon (School of Electronics Engineering, Kyungpook National University)
Park, Hongsik (School of Electronics Engineering, Kyungpook National University)
Publication Information
Journal of Sensor Science and Technology / v.25, no.4, 2016 , pp. 275-279 More about this Journal
Abstract
Chemical vapor deposited (CVD) polycrystalline graphene is widely used for various sensor application because of its extremely large surface-to-volume ratio. The electrical properties of CVD-graphene is significantly affected by the grain size and boundaries (GGBs), but evaluation of GGB of continuous monolayer graphene is difficult. Although several evaluation methods such as tunneling electron microscopy, confocal Raman, UV/ozone-oxidation are typically used, they still have issues in evaluation efficiency and accuracy. In this paper, we suggest an improved evaluation method for precise and simple GGB evaluation which is based on UV/ozone-oxidation and chemical etching process. Using this method, we could observe clear GGBs of CVD-graphene layers grown by different process conditions and statistically evaluate average grain sizes varying from $1.69{\sim}4.43{\mu}m$. This evaluation method can be used for analyzing the correlation between the electrical properties and grain size of CVD-graphene, which is essential for the development of graphene-based sensor devices.
Keywords
graphene grain boundary; UV/ozone oxidation; wet etching; grain size evaluation;
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