• Title/Summary/Keyword: Vacuum condition

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Comparison between the Electrical Properties and Structures after Atmosphere Annealing and Vacuum Annealing of IGZO Thin Films (IGZO 박막 증착 후 진공과 대기 중에서 열처리한 후 결합구조와 전기적인 특성의 비교)

  • Ann, Young Deuk;Yeon, Jae Ho;Oh, Teresa
    • Industry Promotion Research
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    • v.1 no.1
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    • pp.7-11
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    • 2016
  • It was the electrical properties of IGZO prepared by the annealing in a vaccum and an atmosphere conditions to research the current-voltage characteristics. The IGZO film annealed in a vaccum became an amorphous structure but films annealed in an atmosphere condition had a crystal structure. Because of the content of oxygen vacancies during the annealing processes was changed, and the annealing in an atmosphere condition increased the oxygen vacancy in IGZO. Oxygen vacancy in IGZO increased the current and then it was observed the Ohmic contact at IGZO annealed in an atmosphere conditions. However, the IGZO prepared in a vaccum showed the Schottky contact.

Development of particle focusing device to monitor various low pressure processes (다양한 조건의 저압 공정 모니터링을 위한 입자 집속 장치 개발)

  • Kim, Myungjoon;Kim, Dongbin;Kang, Sang-Woo;Kim, Taesung
    • Particle and aerosol research
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    • v.13 no.2
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    • pp.53-63
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    • 2017
  • As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

Analysis of On-Line Partial Discharge in Air-Coolded Gas Turbine Generator (공랭식 가스터빈 발전기의 운전중 부분방전 분석)

  • Lee, Eun-Chun;Kong, Tae-Sik;Kim, Jae-Chul;Kim, Hee-Dong
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.28 no.7
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    • pp.41-47
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    • 2014
  • The on-line partial discharge (PD) in stator windings of air-cooled gas turbine (GT) generator (119.2MVA, 13.8kV) is measured and analyzed in this paper. This generator was designed by global vacuum pressure impregnation (VPI). The generator failed two times at top bar (16T) of phase B in the stator slot. Six epoxy-mica capacitors were installed in three phases of GT generator. On-line PD test was performed on GT generator using turbine generator analyzer (TGA). TGA showed that the normalized quantity number (NQN) and the PD magnitude($Q_m$) were high in phase B. Internal discharges were generated in phases A, B and C. The trend analysis of NQN and $Q_m$ value are obtained in order to monitor the insulation condition in GT generator stator windings. Phases A and C were in good condition. But phase B had deteriorated significantly

On the equivalence of reaction rate in energy collapsing of fast reactor code SARAX

  • Xiao, Bowen;Wei, Linfang;Zheng, Youqi;Zhang, Bin;Wu, Hongchun
    • Nuclear Engineering and Technology
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    • v.53 no.3
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    • pp.732-740
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    • 2021
  • Scattering resonance of medium mass nuclides leads complex spectrum in the fast reactor, which requires thousands of energy groups in the spectrum calculation. When the broad-group cross sections are collapsed, reaction rate cannot be completely conserved. To eliminate the error from energy collapsing, the Super-homogenization method in energy collapsing (ESPH) was employed in the fast reactor code SARAX. An ESPH factor was derived based on the ESPH-corrected SN transport equation. By applying the factor in problems with reflective boundary condition, both the effective multiplication factor and reaction rate were conserved. The fixed-source iteration was used to ensure the stability of ESPH iteration. However, in the energy collapsing process of SARAX, the vacuum boundary condition was adopted, which was necessary for fast reactors with strong heterogeneity. To further reduce the error caused by leakage, an additional conservation factor was proposed to correct the neutron current in energy collapsing. To evaluate the performance of ESPH with conservation factor, numerical benchmarks of fast reactors were calculated. The results of broad-group calculation agreed well with the direct full-core Monte-Carlo calculation, including the effective multiplication factor, radial power distribution, total control rod worth and sodium void worth.

The Effects of Improvement in Clay with High Moisture Contents Using the Filter Type Vacuum Consolidation Method (필터형 진공압밀공법을 이용한 고함수비 점토지반의 개량효과)

  • Oh, Sewook
    • Journal of the Korean GEO-environmental Society
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    • v.11 no.9
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    • pp.55-60
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    • 2010
  • This study are carried out to an lab model tests to develop a construction method that solidifies high-water content cohesive soil by using filter type drain and vacuum pressure, and that stabilizes the ground by accelerating horizontal drain at incline or in tunnel. The calibration chamber was designed within length of 1.5m and height of 50cm, and a drainage hole for preconsolidation, a switchgear and a piezometer were installed at the bottom part of the chamber. Also, a settlement gage was installed at the top part so that it can measure the settlement by time. The calibration ground basis was made in a form of thin layer from kaolinite and bentonite in 9:1 ratio stirred at 130% water content condition. A filter type drain was installed at chamber center and a vacuum pressure of 0.8MPa was applied through a hose linked to the cap at the top part, then, the settlement was measured in every 1 hour interval. After experiment, the moisture contents were measured by position, then, verified the increase of solidity of the ground through a triaxial compression test on undisturbed profile. After 11 days from the effective date, it was observed that the settlement decreased by maximum 35mm and the water content ratio was reduced by 38% at most while the solidity of the ground increased by 5~8 times greater than before preconsolidation.

Residual Liquid Behavior Calculation for Vacuum Distillation of Multi-component Chloride System (다성분 염화물계 진공 증류의 잔류 액체 거동 계산)

  • Park, Byung Heung
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.12 no.3
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    • pp.179-189
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    • 2014
  • Pyroprocessing has been developed for the purpose of resolving the current spent nuclear fuel management issue and enhancing the recycle of valuable resources. An electrolytic reduction of the pyroprocessing is a process to reduce oxides into metals using LiCl as an electrolyte and requires a post-treatment process due to the inclusion of residual salt in porous metal products. A vacuum distillation has been adopted for various molten salt systems and could be applied to the post-treatment process of the electrolytic reduction. The residual salt in the metal products includes LiCl, alkali chlorides, and alkaline earth chlorides. In this paper, vapor pressures of chlorides have been estimated and the composition changes on the residual liquid during the vacuum distillation process have been calculated. A model combining a material balance and vapor-liquid equilibrium relations has been proposed under a constant vapor discharging flow rate and liquid composition changes have been calculated using the vapor pressures with respect to a dimensionless time. The behaviors have been compared with temperature and molten salt composition changes to simulate the process condition variation. The distillation of the residual salt has been dominated by LiCl which is the main component of the salt and CsCl of which vapor pressure is higher than that of LiCl would be readily removed. RbCl exhibits similar vapor pressure with LiCl and maintains its composition. However, $SrCl_2$ and $BaCl_2$ of which vapor pressures are much lower than that of LiCl are concentrated with time and expected to be possibly precipitated during the distillation when the initial compositions are increased.

Modelling and Preliminary Prediction of Thermal Balance Test for COMS (통신해양기상위성의 열평형 시험 모델 및 예비 예측)

  • Jun, Hyoung-Yoll;Kim, Jung-Hoon;Han, Cho-Young
    • Journal of Astronomy and Space Sciences
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    • v.26 no.3
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    • pp.403-416
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    • 2009
  • COMS (Communication, Ocean and Meteorological Satellite) is a geostationary satellite and developed by KARl for communication, ocean and meteorological observations. It will be tested under vacuum and very low temperature conditions in order to verify thermal design of COMS. The test will be performed by using KARI large thermal vacuum chamber, which was developed by KARI, and the COMS will be the first flight satellite tested in this chamber. The purposes of thermal balance test are to correlate analytical model used for design evaluation and predicting temperatures, and to verify and adjust thermal control concept. KARI has plan to use heating plates to simulate space hot condition especially for radiator panels of satellite such as north and south panels. They will be controlled from 90 K to 273 K by circulating GN2 and LN2 alternatively according to the test phases, while the main shroud of the vacuum chamber will be under constant temperature, 90 K, during all thermal balance test. This paper presents thermal modelling including test chamber, heating plates and the satellite without solar array wing and Ka-band reflectors and discusses temperature prediction during thermal balance test.

Optimization of Vacuum Drying Conditions for a Steamed (Pumpkin-) Sweet Potato Slab by Response Surface Methodology (반응표면분석법을 이용한 증절간 (호박)고구마의 최적 진공건조조건 설정)

  • Shin, Mi-Young;Youn, Kwang-Sup;Lee, Su-Won;Moon, Hye-Kyung;Lee, Won-Young
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.40 no.9
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    • pp.1314-1320
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    • 2011
  • Vacuum drying was conducted for a steamed pumpkin-sweet potato slab to improve its quality, convenience and preference as snack. Steamed sweet potato was dried from 30 to $60^{\circ}C$ for 12 hr, after which moisture contents, colors, and taste were evaluated. The lowest moisture content was 0.22% upon vacuum drying at $60^{\circ}C$ for 12 hr. Lightness decreased while other color values (a, b and ${\Delta}E$) increased with increasing drying temperature and drying time. Reducing sugar and soluble solid contents ranged from 98.7~268.11 mg/g and $19{\sim}72^{\circ}Brix$, respectively. Sensory score of the sample was the highest when dried at $50^{\circ}C$ for 6 hr. The optimum drying conditions were predicted to be $48.5{\sim}62^{\circ}C$ and 5.1~7.1 hr by response surface methodology.

Numerical Investigation of Ion and Radical Density Dependence on Electron Density and Temperature in Etching Gas Discharges (식각공정용 가스방전에서 이온 및 활성종 밀도의 전자밀도 및 온도 의존성에 대한 수치해석적 분석)

  • An, Choong-Gi;Park, Min-Hae;Son, Hyung-Min;Shin, Woo-Hyung;Kwon, Deuk-Chul;You, Shin-Jae;Kim, Jung-Hyung;Yoon, Nam-Sik
    • Journal of the Korean Vacuum Society
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    • v.20 no.6
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    • pp.422-429
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    • 2011
  • Dependence of radical and ion density on electron density and temperature is numerically investigated for $Cl_2$/Ar, $CF_4$, $CF_4/O_2$, $CF_4/H_2$, $C_2F_6$, $C_4F_8$ and $SF_6$ discharges which are widely used for etching process. We derived a governing equation set for radical and ion densities as functions of the electron density and temperature, which are easier to measure relatively, from continuity equations by assuming steady state condition. Used rate coefficients of reactions in numerical calculations are directly produced from collisional cross sections or collected from various papers. If the rate coefficients have different values for a same reaction, calculation results were compared with experimental results. Then, we selected rate coefficients which show better agreement with the experimental results.

Cooling Performance Deficiency of Air Conditioning System According to Air Quantity Included in Refrigerant (냉매 내 공기혼입에 따른 에어컨 시스템의 냉각성능 저하)

  • Moon, Seong-Won;Min, Young-Bong;Chung, Tae-Sang
    • Journal of Biosystems Engineering
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    • v.34 no.6
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    • pp.470-475
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    • 2009
  • This study was performed to present the diagnosis basis of cooling performance deficiency according to air quantity included in refrigerant of air-conditioner by detecting the temperatures and pressures of refrigerant pipeline. The car air-conditioner of SONATA III (Hyundai motor Co., Korea) was tested by maximum cooling condition at 1500 rpm of engine speed in the room with controlled air condition at $33\sim35^{\circ}C$ and 55~57% RH. Measured variables were temperature differences between inlet and outlet pipe surface of the compressor (Tcom), condenser (Tcon), receive dryer (Trec) and evaporator (Teva), and high pressure (HP) and low pressure (LP) in the refrigerant pipeline, and temperature difference (Tcoo) between inlet and outlet air of the cooling vent of evaporator. Control variables were the refrigerant charging weight and the vacuum degree in the refrigerant pipeline before charging refrigerant. From the test, it was represented that the measuring values of (Tcom), LP and (Tcoo) were enabled to make the diagnosis of cooling performance deficiency according to quantity included in refrigerant of air-conditioner. The ranges of Tcom, LP and Tcoo to make the diagnosis of cooling performance deficiency were respectively less than $55^{\circ}C$, more than 166.7 kPa-g(1.7 kgf/$cm^2$) and less than $13.7^{\circ}C$. In the case of using only external sensors and the condition under the normal performances of air conditioner, it was considered that the ranges of LP and Tcoo to make the diagnosis of cooling performance deficiency were respectively more than 166.7 Pa and less than $12^{\circ}C$.