Numerical Investigation of Ion and Radical Density Dependence on Electron Density and Temperature in Etching Gas Discharges |
An, Choong-Gi
(School of Electrical Engineering, Chungbuk National University)
Park, Min-Hae (School of Electrical Engineering, Chungbuk National University) Son, Hyung-Min (School of Electrical Engineering, Chungbuk National University) Shin, Woo-Hyung (School of Electrical Engineering, Chungbuk National University) Kwon, Deuk-Chul (Convergence Plasma Research Center, National Fusion Research Institute) You, Shin-Jae (Center for Vacuum Technology, Korea Research Institute for Standard and Science) Kim, Jung-Hyung (Center for Vacuum Technology, Korea Research Institute for Standard and Science) Yoon, Nam-Sik (School of Electrical Engineering, Chungbuk National University) |
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