• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.366-367
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• 2006

In general, HF chemistry lifts off the particles during scrubbing after polishing and effectively removes particles. It is sometimes impossible to apply HF chemistry on W plug due to the degradation of electrical characteristics of a device. In this paper, a post W CMP cleaning process is proposed to remove residue particles without applying HF chemistry. After W CMP, recessed plugs are created, therefore they easily trap slurry particles during CMP process. These particles in recessed plug are not easy to remove by brush scrubbing when $NH_4OH$ chemistry is used for the cleaning because the brush surface can not reach the recessed area of plugs. Buffing with oxide slurry was followed by W CMP due to its high selectivity to W. The buffing polishes only oxide slightly which creates higher plug profiles than surrounding oxide. Higher profiles make the brush contact much more effectively and result in a similar particle removal efficiency even in $NH_4OH$ cleaning to that in HF brush scrubbing.

• Tribology and Lubricants
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• 제27권6호
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• pp.344-350
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• 2011

Friction and wear behavior of tungsten oxide nanorods (TONs) was investigated using friction force microscopy(FFM) employing colloidal probes instead of conventional sharp tips. Vertically well-ordered TONs with 40 nm diameter, 130 nm length and 100 nm pitch width were synthesized on an anodic aluminium oxide substrate using two step electrochemical anodizing processes. The colloidal probe (diameter 20 ${\mu}m$) attached at the free end of tipless cantilever was oscillated(scanned) against a stationary surface of vertically aligned TONs with various scan speeds (1.2 ${\mu}m/s$, 3.0 ${\mu}m/s$ and 6.0 ${\mu}m/s$) and sliding cycles (100, 200 and 400) under normal load of 800 nN. The friction force and wear depth decreased with the increase of the scan speed. Plastically deformed thin layers were formed and sparsely deposited on the worn nonorod surface. The lower wear rate of the TONs with the longer oscillating cycles was attributed to the decreased real contact pressure due to the increase of real contact area between the colloidal probe and the TONs.

• 전자공학회논문지
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• 제51권3호
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• pp.177-184
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• 2014

화학기상증착의 텅스텐 실리사이드 듀얼 폴리 게이트 구조에서 플로린이 게이트 산화막에 미치는 영향을 전기적 물리적 측정 방법을 사용하여 연구하였다. 플로린을 많이 함유한 텅스텐 실리사이드 NMOS 트랜지스터에서 채널길이가 감소함에 따라 게이트 산화막 두께는 감소하여 트랜지스터의 롤업(roll-off) 특성이 심화된다. 이는 게이트 재 산화막 열처리 공정에 의해 수직방향으로의 플로린 확산과 더불어 수평방향인 게이트 측면 산화막으로의 플로린 확산에 기인한다. 채널길이가 짧아질수록 플로린의 측면방향 확산거리가 작아져 수평방향 플로린 확산이 증가하고 그 결과 게이트 산화막의 두께는 감소하게 된다. 반면에 PMOS 트랜지스터에서는 P형 폴리를 만들기 위한 높은 농도의 붕소가 플로린의 게이트 산화막으로의 확산을 억제하여 채널길이에 따른 산화막 두께 변화 특성이 보이지 않는다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2000년도 하계종합학술대회 논문집(2)
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• pp.64-67
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• 2000

Tungsten silicide(WSi$_2$) is proposed for the alternate gate electrode of ULSI MOS devices. Good structural property and low resistivity of WSi$_2$ deposited by a low pressure chemical vapor deposition(LPCVD) method directly on SiO$_2$ is obtained after annealing. Especially, WSi$_2$-SiO2 interface remains flat after annealing tungsten silicide at high temperature. Electrical characteristics of annealed WSi$_2$-SiO$_2$-Si(MOS) capacitors were improved in view of charge trapping.

• 공업화학
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• 제10권2호
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• pp.247-251
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• 1999

분말 $Zr(OH)_4$를 ammonium metatungstate수용액에 넣어서 증발 건조시킨 후 공기중 높은 온도에서 소성하여 zirconia에 담지된 $WO_3$촉매를 제조하였다. $ZrO_2$에 소량 (1 wt %)의 $WO_3$를 첨가하면 촉매의 산의 양과 세기가 급격하게 증가하였으며 촉매는 Lewis산과 $Br{\ddot{o}}nsted$산 모두를 가지고 있었다. 이와 같은 $WO_3$/$ZrO_2$촉매의 큰 산의 세기와 많은 산의 양은 $WO_3$와 $ZrO_2$의 상호작용으로 생성된 W=O결합의 성질에 기인하였다. 2-propanol의 탈수반응에서는 $WO_3$함량이 20 wt %이고 973 K에 소성한 촉매가 최대의 촉매활성을 보였으며 cumene의 탈알킬화 반응에서는 $WO_3$함량이 15 wt %이고 1023 K에서 소성한 촉매가 최대 촉매활성을 나타내었다. 2-propanol의 탈수반응에서 촉매활성의 변화는 대략적으로 촉매의 산의 양의 변화와 상호 관련되었다.

• Bulletin of the Korean Chemical Society
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• 제30권1호
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• pp.133-136
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• 2009

A newly designed Ag/$Ag^+$ reference electrode in a quartz tube with a tungsten tip junction (W-tip-Quartz- REF) was fabricated and its electrochemical performance was compared with a conventional Pyrex tube-based Ag/$Ag^+$ reference electrode (Py-REF). The results of the electrochemical potential measurements with the W-tip-Quartz- REF and the Py-REF in the LiCl-KCl eutectic melts for a wide temperature range proved that the oxide layer on the surface of the tungsten metal tip provided a high ionic conduction. Stability of our newly designed W-tip- Quartz-REF was tested by measuring a junction potential for 12 hours at 700${^{\circ}C}$. The results of the cyclic voltammetric measurement indicated that the Ag/$Ag^+$ reference electrode in the quartz tube with a tungsten tip junction can provide a good performance for a wide temperature range.

• Journal of Electrochemical Science and Technology
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• 제10권1호
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• pp.89-97
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• 2019

As a promising candidate for anode materials in lithium ion battery (LIB), tungsten trioxide ($WO_3$) and tungsten disulfide ($WS_2$) nanocrystals were synthesized, and their electrochemical properties were comprehensibly studied using a half cell. One-dimensional $WO_3$ nanowires with uniform diameter of 10 nm were synthesized by hydrothermal method, and two-dimensional (2D) $WS_2$ nanosheets by unique gas phase sulfurization of $WO_3$ using $H_2S$. $WS_2$ nanosheets exhibits uniformly 10 nm thickness. The $WO_3$ nanowires and $WS_2$ nanosheets showed maximum capacities of 552 and $633mA\;h\;g^{-1}$, respectively, after 100 cycles. Especially, the capacity of $WS_2$ is significantly larger than the theoretical capacity ($433mA\;h\;g^{-1}$). We also examined the cycling performance using a larger size $WO_3$ and $WS_2$ nanocrystals, showing that the smaller size plays an important role in enhancing the capacity of LIBs. The larger capacity of $WS_2$ nanosheets than the theoretical value is ascribed to the lower charge transfer resistance of 2D nanostructures.

• Structural Engineering and Mechanics
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• 제85권1호
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• pp.29-53
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• 2023

High-strength shielding concrete against gamma radiation is a priority for many medical and industrial facilities. This paper aimed to investigate the gamma-ray shielding properties of high-strength hematite concrete mixed with silica fume (SF) with nanoparticles of lead dioxide (PbO₂), tungsten oxide (WO₃), and bismuth oxide (Bi₂O₃). The effect of mixing steel fibres with the aforementioned binders was also investigated. The reference mixture was prepared for high-strength concrete (HSCC) containing 100% hematite coarse and fine aggregate. Thirteen mixtures containing 5% SF and nanoparticles of PbO₂, WO₃, and Bi₂O₃ (2%, 5%, and 7% of the cement mass, respectively) were prepared. Steel fibres were added at a volume ratio of 0.28% of the volume of concrete with 5% of nanoparticles. The slump test was conducted to workability of fresh concrete Unit weight water permeability, compressive strength, splitting tensile strength, flexural strength, and modulus of elasticity tests were conducted to assess concrete's engineering properties at 28 days. Gamma-ray radiation of 137Cs emits photons with an energy of 662 keV, and that of 60Co emits two photons with energies of 1173 and 1332 keV were applied on concrete specimens to assess radiation shielding properties. Nanoparticles partially replacing cement reduced slump in workability of fresh concrete. The compressive strength of mixtures, including nanoparticles was shown to be greater, achieving 94.5 MPa for the mixture consisting of 7.5 PbO2. In contrast, the mixture (5PbO₂-F) containing steel fibres achieved the highest values for splitting tensile, flexural strength, and modulus of elasticity (11.71, 15.97, and 42,840 MPa, respectively). High-strength shielded concrete (7.5PbO2) showed the best radiation protection. It also showed the minimum concrete thickness required to prevent the transmission of radiation.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2001년도 추계 학술발표강연 및 논문개요집
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• pp.177-177
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• 2001

• 접착 및 계면
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• 제19권3호
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• pp.113-117
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• 2018

보론카바이드는 하드니스가 다이아몬드나 보론 나이트라이드 보단 낮지만 30 GPa이상의 높은 경도를 갖고 있으며, 높은 경도로 인해 탱크 장갑, 탄피 제조에 사용되고 있다. 또한 중성자를 흡수하는 능력이 있어 중성자 흡수제로 많이 사용되고 있어, 핵 발전 관련 사업에 활용도가 증가하고 있다. 중성자는 전자와의 상호작용이 없으며, 물질을 통과하는 과정에서도 상호작용 없이 통과하는 것으로 알려져 있다. 보론 카바이드와 함께 중성자와 상호작용이 높은 원자는 수소이며, 보론을 포함하는 수소 농도가 높은 폴리에스터, 에폭시 고분자 등이 원자력 발전 폐기물 보관을 위한 제품 제조를 위한 소재로 사용되고 있다. 본 논문에서는 보론 카바이드의 표면을 철산화물과 텅스텐으로 처리하여, 개질된 보론 카바이드와 에폭시 소재와의 상호작용을 향상시켰다. XRD, XPS를 이용하여 표면개질 되었음을 확인하였고, 처리된 보론카바이드의 함량에 따른 기계적 강도는 만능시험기(UTM)로 측정하였으며, 동역학 분석기(DMA)를 사용하여 경화물의 동적 특성을 관찰하였다.