Measurement of Thermal Characteristics of Thin Film Patterned Heating Heater on Silicon Semiconductor Substrate (실리콘 반도체 기판에 제작된 박막 패턴 발열 히터의 열특성 측정)
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- Journal of the Korea Academia-Industrial cooperation Society
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- v.20 no.6
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- pp.9-13
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- 2019