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http://dx.doi.org/10.5762/KAIS.2019.20.6.9

Measurement of Thermal Characteristics of Thin Film Patterned Heating Heater on Silicon Semiconductor Substrate  

Park, Hyun-Sik (Department of Electrical, Electronic and Control Engineering, Institute for Information technology Convergence, Hankyong National University)
Publication Information
Journal of the Korea Academia-Industrial cooperation Society / v.20, no.6, 2019 , pp. 9-13 More about this Journal
Abstract
In this study, a miniature thin film-patterned heater was fabricated on a silicon substrate using semiconductor process technology and the thermal characteristics of the applied voltage, power, and temperature of the thin film heater were measured and analyzed. The temperature of the thin film pattern heater increased with increasing power, but the temperature increase rate was gradual at high power intervals. The characteristics of the high temperature section of the platinum thin film-patterned heater were analyzed using the heat resistance model under atmospheric and vacuum conditions. The thermal resistance measured in a vacuum atmosphere was 0.79 [K/mW] higher than the heat resistance value 0.69 [K/mW] in air. The temperature of the thin film pattern heater can be maintained at a low power in a vacuum rather than in air, and these results are expected to be utilized in the structural design of a thin film-patterned heater element.
Keywords
Embedded; Power; Semiconductor; Sensor; Thermal; Thin Film;
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