• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권9호
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• pp.429-433
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• 2006

PZT(80/0) powder was prepared by a sol-gel method and PZT thick films were fabricated by the screen-printing method on the alumina substrates. The coating and drying procedure was repeated 4 times. And then the PZT(20/80) precusor solution was spin-coated on the PZT thick films. A concentration of a coating solution was 0.5mol/L and the number of coating was varied from 0 to 6. The porosity decreased and the grain size increased with increasing the number of coatings. The thickness of the PZT-6(6: number of coatings) films was about $60{\mu}m$. The relative dielectric constant increased and the dielectric loss decreased with increasing the number of PZT(20/80) sol coatings. The relative dielectric constant and dielectric loss of the PZT-6 thick film were 275 and 3.5%, respectively. The remanent polarization, coercive field and breakdown strength of the PZT-6 film were $19.8{\mu}C/cm^2$, 13.7kV/cm and 130kV/cm, respectively.

• 전자공학회논문지
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• 제50권7호
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• pp.102-108
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• 2013

용액 공정 기반으로 유기 전자소자를 제작할 시, 회전 도포 방법을 이용하는데 이 방법의 단점 중의 하나는 후속 회전 도포할 때 용액 속의 용매에 의해 이미 제작된 유기 박막을 물리적 또는 화학적인 손상을 입힐 수 있다는 것이다. 이러한 문제들로 인해 후속적인 박막 제조에 사용될 수 있는 용매의 종류는 매우 제한적일 수 밖에 없다. 본 논문에서는 기존에 알려진 용매들의 적절한 조합으로 인해 다층 박막 제작이 가능함을 보이고, 이를 이용하여 용액 공정 기반 유기 트랜지스터를 제작하여 성능의 향상을 보일 것이다. 트랜지스터의 구조는 하부 게이트 하부 접촉 (bottom gate, bottom contact) 구조로 제작되었고 게이트 절연체는 강유전체 고분자로 제작되었는데 한 번의 회전 도포 방법과 두 번의 회전 도포 방법으로 동일 두께를 형성하여 두 트랜지스터를 제작, 드레인 전압에 따른 소스-드레인 전류를 비교하였다. 그 결과 소스-게이트 누설 전류 감소 효과가 있었고, ON 상태에서의 소스-드레인 전류의 상승효과도 관찰되었다. 전류-전압 그래프로부터 계산된 이동도는 약 2.7배 증가되었다. 그러므로 용액 공정 기반 전계효과 트랜지스터를 제작할 시, 게이트 절연체를 다층 구조로 제작하면 성능 향상에 이점이 많다는 것을 알 수 있었다.

• 한국재료학회지
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• 제25권4호
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• pp.171-176
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• 2015

We present the detection characteristics of nitrogen monoxide(NO) gas using p-type copper oxide(CuO) thin film gas sensors. The CuO thin films were fabricated on glass substrates by a sol-gel spin coating method using copper acetate hydrate and diethanolamine as precursors. Structural characterizations revealed that we prepared the pure CuO thin films having a monoclinic crystalline structure without any obvious formation of secondary phase. It was found from the NO gas sensing measurements that the p-type CuO thin film gas sensors exhibited a maximum sensitivity to NO gas in dry air at an operating temperature as low as $100^{\circ}C$. Additionally, these CuO thin film gas sensors were found to show reversible and reliable electrical response to NO gas in a range of operating temperatures from $60^{\circ}C$ to $200^{\circ}C$. It is supposed from these results that the p-type oxide semiconductor CuO thin film could have significant potential for use in future gas sensors and other oxide electronics applications using oxide p-n heterojunction structures.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.135-135
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• 2003

This paper presents the preparation of SnO$_2$ films by Sol-Gel process and using spin coating method, and their sensing properties in CO gas. Experimental procedure consisted of following steps: (1) Tin chloride(SnCl$_4$) and Ammonium hydrogen carbonate (NH$_4$HCO$_3$) were used as precursors; (2) the Sol solution with concentration of about 10wt% SnO$_2$ was prepared from washed Gel-precipitate for spin coating step; (3) thereafter, the coating solution was dropped onto the alumina (Al$_2$O$_3$) substrate that was then spun, the spin coating was carried out with total 10 times; (4) finally, the films were calcined for 3 hours at 50$0^{\circ}C$ or higher temperature (600, 700, 800 or 90$0^{\circ}C$) in order to obtain various gram sizes. The average grain size was calculated by Scherrer's equation using main peaks in XRD spectra; meanwhile the thickness, microstructure and surface morphology of the films were observed by FE-SEM.

• 한국기계가공학회지
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• 제10권6호
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• pp.146-151
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• 2011

Wax spin coating is a part of several wafer handling processes in the silicon wafer polishing station. It is important to ensure the wax layer free of contamination to achieve the high degree of planarization on wafers after wafer polishing. Three-dimensional air flow characteristics in a wax spin coater are numerically investigated using computational fluid dynamics techniques. When the bottom of the wax spin coater is closed, there exists a significant recirculation zone over the rotating ceramic block. This recirculation zone can be the source of wax layer contamination at any rotational speed and should be avoided to maintain high wafer polishing quality. Thus, four air suction ducts are installed at the bottom of the wax spin coater in order to control the air flow pattern over the ceramic block. Present computational results show that the air suction from the bottom is quite an effective method to remove or minimize the recirculation zone over the ceramic block and the wax coating layer.

• 한국전기전자재료학회논문지
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• 제19권11호
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• pp.1014-1019
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• 2006

The influence of the number of solution coatings on the densification of the PZT thick films was studied. PZT powder and PZT precursor solution was prepared by a sol-gel method and PZT thick films were fabricated by the screen-printing method on the alumina substrates. The powder and solution of composition were (A) PZT(80/20)/PZT(20/80), (B) PZT(70/30)/PZT(30/70) and (C) PZT(60/40)/PZT(40/60), (D) PZT(52/48)/PT. The coating and drying procedure was repeated 4 times. And then the PZT precursor solution was spin-coated on the PZT thick films. A concentration of a coating solution was 0.5 moth and the number of coating was repeated from 0 to 6. The porosity of the thick films was decreased with increasing the number of coatings and the PZT thick films with 6-times coated showed the dense microstructure and thickness of about $60{\mu}m$. A grain size was increased with increasing the coating number. All PZT thick films showed the typical XRD patterns of a typical perovskite polycrystalline structure. The relative dielectric constant of PZT thick films was improved 30-100% as the number of coatings.

• Journal of Magnetics
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• 제12권2호
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• pp.77-80
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• 2007

Recently there was a proposal for a spin filter by using the spin superlattice structure. In a certain energy range, the proposed structure exhibits a high spin filtering efficiency close to 100%. Unfortunately such energy range turns out to be narrow. In this paper, we report a method to widen the energy range by using an analogy to optical anti-reflection coating. In optics, it is well known that a stack of alternating layers of two dielectric materials can function as a highly transmissive or reflective filter for wide range of wavelength. Since electrons also have wave character as light, it would be possible to make an electronic analog of an optical filter. We demonstrate that alternating layers of two materials with different g-factors can function as a spin filter that allows electrons to be transmitted only when their spins point towards a certain particular direction. This spin-superlattice-based spin filter operates in wide energy ranges, curing the problem in the previous proposal.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.193-193
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• 2011

To obtain ceramic films, the sol-gel coating technique has been broadly used with heat treatment, but crack formation tend to occur during heat treatment in thick sol-gel films. We prepared PZT thin films by sol-gel method with single-step spin coating process. The PZT solution have been synthesized using lead acetate ($Pb(CH_3COO)_2$), zirconium acetylacetonate ($Zr(OC_3H_7^n)_4$), and titanium diisopropoxide bis(acetylacetonate) 75wt% in isopropanol ($Ti(OC_3H_7^i)_2(OC_3H_7^n)_2$) as starting materials and n-propanol was selected as a solvent. The poly(vynilpyrrolidone) (PVP) was added with 0, 0.25, 0.5, 0.75, and 1 molar ratios to control viscosity of solution. We investigated influence of the viscosity on thickness, microstructure, and electrical properties of final PZT films. Thermo-gravimetric analysis and differential scanning calorimeter (TGA/DSC) was carried out from room temperature to $800^{\circ}C$ in order to measure pyrolysis temperature. Structural characteristics were analyzed by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Ferroelectric and dielectric properties were measured by RT66A (Radiant) and impedance analyzer (Agilent), respectively. The thicknesses of PZT films depended on incorporation of an excess amount of PVP. Finally, we obtained PZT films of good quality without crack formation via single-step spin coating.

• 한국결정성장학회지
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• 제30권1호
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• pp.7-11
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• 2020

TiZrN 코팅의 도핑 공정에서 탄소 페이스트 증착 방식에 따른 탄소의 용해성 변화를 격자왜곡(lattice distortion)과 원자농도(atomic concentration)를 통해 비교 및 고찰하였다. 딥코팅, 스핀코팅과 스크린프린팅 방식을 이용하여 탄소 페이스트를 도포한 후, 레이저를 조사하여 탄소 구배층(carbon gradient layer)을 형성시켰다. 모든 구배층은 탄소가 도핑되는 구조였으며, 두께 및 탄소 도핑량은 페이스트 도포 방식에 의존하였다. 결정 구조 분석 결과, 딥코팅에 의해 코팅층을 도핑할 때 보다 스핀코팅과 스크린프린팅에 의해 코팅층을 도핑하였을 때, 더 큰 격자 팽창이 일어남을 확인할 수 있었다. 또한 XPS depth profile을 통해 딥코팅에 의한 탄소 구배층 두께는 약 30 nm, 스핀코팅과 스크린프린팅의 경우 대략 100 nm로 더 깊은 구배층이 형성됨을 확인하였다. 침탄 전 코팅의 경도는 약 30 GPa였으며, 침탄 후에는 딥코팅 시편의 평균 경도가 약 31 GPa였고 스핀코팅과 스크린프린팅의 평균 경도는 대략 37 GPa로 증가한 것으로 보아 탄소 도핑을 통한 격자팽창 및 구배층의 영향을 확인하였다.

• 한국전기전자재료학회논문지
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• 제22권11호
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• pp.987-991
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• 2009

We report growth of vertically well-aligned zinc oxide (ZnO) nanorods on indium-tin oxide (ITO)/glass substrates using a simple aqueous solution method at low temperature via control of the ZnO seed layer morphology. ZnO nanoparticles acting as seeds are pre-coated on ITO-coated glass substrates. by spin coating to control distribution and density of the ZnO seed nanoparticles. ZnO nanorods were synthesized on the seed-coated substrates in a dipping process into a main growth solution. It was found that the alignment of ZnO nanorods can be effectively manipulated by the spin-coating speed of the seed layer. A grazing incidence X-ray diffraction pattern shows that the ZnO seed layer prepared using the higher spin-coating speed is of uniform seed distribution and a flat surface, resulting in the vertical growth of ZnO nanorods aligned toward the [0001] direction in the main growth process.