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http://dx.doi.org/10.4313/JKEM.2006.19.11.1014

Effect of Composition and Coating of Precursor Solution on a Micro Structural Properties of PZT Thick Films  

Park, Sang-Man (경상대학교 공학연구원 세라믹공학과, i-cube 사업단)
Noh, Hyun-Ji (경상대학교 공학연구원 세라믹공학과, i-cube 사업단)
Lee, Sung-Gap (경상대학교 공학연구원 세라믹공학과, i-cube 사업단)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.19, no.11, 2006 , pp. 1014-1019 More about this Journal
Abstract
The influence of the number of solution coatings on the densification of the PZT thick films was studied. PZT powder and PZT precursor solution was prepared by a sol-gel method and PZT thick films were fabricated by the screen-printing method on the alumina substrates. The powder and solution of composition were (A) PZT(80/20)/PZT(20/80), (B) PZT(70/30)/PZT(30/70) and (C) PZT(60/40)/PZT(40/60), (D) PZT(52/48)/PT. The coating and drying procedure was repeated 4 times. And then the PZT precursor solution was spin-coated on the PZT thick films. A concentration of a coating solution was 0.5 moth and the number of coating was repeated from 0 to 6. The porosity of the thick films was decreased with increasing the number of coatings and the PZT thick films with 6-times coated showed the dense microstructure and thickness of about $60{\mu}m$. A grain size was increased with increasing the coating number. All PZT thick films showed the typical XRD patterns of a typical perovskite polycrystalline structure. The relative dielectric constant of PZT thick films was improved 30-100% as the number of coatings.
Keywords
Densification; Thick films; Precursor; Screen-printing; Spin-coaling;
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