Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2011.02a
- /
- Pages.193-193
- /
- 2011
Fabrication of PZT Film by a Single-Step Spin Coating Process
- Oh, Seung-Min (Electronic Materials Center, Korea Institute of Science and Technology) ;
- Kang, Min-Gyu (Electronic Materials Center, Korea Institute of Science and Technology) ;
- Do, Young-Ho (Electronic Materials Center, Korea Institute of Science and Technology) ;
- Kang, Chong-Yun (Electronic Materials Center, Korea Institute of Science and Technology) ;
- Nahm, Sahn (Department of Materials Science and Engineering, Korea University) ;
- Yoon, Seok-Jin (Electronic Materials Center, Korea Institute of Science and Technology)
- Published : 2011.02.09
Abstract
To obtain ceramic films, the sol-gel coating technique has been broadly used with heat treatment, but crack formation tend to occur during heat treatment in thick sol-gel films. We prepared PZT thin films by sol-gel method with single-step spin coating process. The PZT solution have been synthesized using lead acetate (