A Three-Dimensional CFD Study on the Air Flow Characteristics in a Wax Spin Coater for Silicon Wafer Manufacturing
![]() |
Kim, Yong-Ki
(금오공과대학교 대학원 기계시스템공학과)
Kim, Dong-Joo (금오공과대학교 기계공학과) Umarov, Alisher (금오공과대학교 대학원 기계공학과) Kim, Kyoung-Jin (금오공과대학교 기계시스템공학과) Park, Jun-Young (금오공과대학교 기계설계공학과) |
1 | Pei, Z. J., Fisher, G. R., and Liu, J., "Grinding of Silicon Wafers: A View from Historical Perspectives", International Journal of Machine Tools and Manufacture, Vol. 48, pp. 1297-1307, 2008. DOI ScienceOn |
2 | Sun, W., Pei, Z. J., and Fisher, G. R., "Fine Grinding of Silicon Wafers: Effects of Chuck Shape on Grinding Marks", International Journal of Machine Tools and Manufacture, Vol. 45, pp. 673-686, 2005. DOI ScienceOn |
3 | Kim, K., Kim, D., and Park, J. Y., "CFD Analysis on the Internal Air Flow Control in a Wax Spin Coater of Silicon Wafer Polishing Station", Journal of the Semiconductor & Display Equipment Technology, Vol. 10, pp. 1-6, 2011. |
4 | Kim, K., Kwak, H. S., and Park, K. S., "An Experimental Study on Wafer Demounting by Water Jet in a Waxless Silicon Wafer Mounting System", Journal of the Semiconductor & Display Equipment Technology, Vol. 8, pp. 31-35, 2009. |
5 | Bornside, D. E., Brown, R. A., Ackmann, P. W., Frank, J. R., Tryba, A. A., and Geyling, F. T., "The Effects of Gas Phase Convection on Mass Transfer in Spin Coating", Journal of Applied Physics, Vol. 73, pp. 585-600, 1993. DOI |
6 | Oztekin, A., Bornside, D. E., Brown, R. A., and Seidel, P. K., "The Connection between Hydrodynamic Stability of Gas Flow in Spin Coating and Coated Film Uniformity", Journal of Applied Physics, Vol. 77, pp. 2297-2308, 1995. DOI ScienceOn |
7 | Yang, Y.-K. and Chang, T.-C., "Experimental Analysis and Optimization of a Photo Resist Coating Process for Photolithography in Wafer Fabrication", Microelectronics Journal, Vol. 37, pp. 746-751, 2006. DOI ScienceOn |
8 | Gupta, A. and Ranganathan, K., "Three Dimensional Turbulent Swirling Flow in a Cylinder: Experiments and Computations", International Journal of Heat and Fluid Flow, Vol. 28, pp. 249-261, 2007. DOI ScienceOn |
![]() |