• Title/Summary/Keyword: Sol-gel film

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Preparation of Glass Thin Film onto Plastic Surface by Sol-Gel Process (Sol-Gel 공정으로 Plastic표면에 Glass박막 제조에 관한 연구)

  • 양천회
    • Journal of the Korean Society of Safety
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    • v.13 no.1
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    • pp.85-91
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    • 1998
  • Sol-gel derived silica films were prepared by dip-coating onto polymethylmethacylate with Tetraethoxysilane(TEOS) as starting materials. Film properties such as viscosity and thickness were investigated as a function of dip speed, waterprecursor ratio, sol aging time. IR spectra of the gel films prepared from TEOS at various R are given. At small values of R the absorption peaks assignable to C-H vibration in $-OC_2H_5$ groups are observed around 3000 and 1500-1300 $cm^{-1}$. These bands indicate that the -$-OC_2H_5$ groups are retained in the gel at small values of R because of incomplete hydrolysis of TEOS. Film behaviour was interpreted in terms of the dependence of hydrolysis and condensation rates on the interplay between sol pH and waterprecursor ratio. Film thickness was found to increase by approximately a factor of two as waterprecursor ratio increased from two to six. Film thickness also increased with sol prepolymerization time. Surface quality was correlated with processing conditions.

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A Study on Preparation and Characterization of Mullite Coated Film by Sol-Gel Process (졸-겔법에 의한 Mullite 코팅막의 제조 및 특성에 관한 연구)

  • 이용택;최영우;양중식
    • Journal of the Korean Ceramic Society
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    • v.34 no.6
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    • pp.611-619
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    • 1997
  • Optimal Mullite sol was synthesized by sol-gel process using Aluminium sec-butoxide(ASB), Tetraethoxysilane(TEOS) and then, Mullite films were dip-coated with various holding time in sol bath and heat-treated at 130$0^{\circ}C$ above for crystallization. The thickness of coated film increased linearly with holding time in sol bath and average pore size was controllable within 20~30$\AA$.

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Preparation and Characteristics of PLT(28) Thin Film Using Sol-Gel Method (Sol-Gel 법을 이용한 PLT(28) 박막의 제작과 특성)

  • Kang Seong Jun;Joung Yang Hee;Yoo Jae-hung
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.9 no.7
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    • pp.1491-1496
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    • 2005
  • We fabricated the $Pb_{0.72}La_{0.28}TiO_3$ (PLT(28)) thin film successfully by using the sol-gel method and characterized it to evaluate its potential for being utilized as the capacitor dielectrics of ULSI DRAMs. In our sol-gel process, the acetates were used as the starting materials. Through the TGA-DTA analysis, we established the excellent fabrication conditions of the sol-gel method for the PLT(28) thin film. We obtained the dense and crack-free PLT(28) thin film of $100\%$ perovskite phase by drying at $350^{\circ}C$ after each coating and final annealing at $650^{\circ}C$. Electrical properties of PLT(28) thin film were measured through formation on the $Pt/Ti/SiO_2/Si$ substrate and its dielectric constant and leakage current density were measured as 936 and $1.1{\mu}A/cm^2$, respectively.

Preparation and Characteristics of PLT(28) Thin Film Using Sol-Gel Method (Sol-Gel 법을 이용한 PLT(28) 박막의 제작과 특성)

  • Kang, Seong-Jun;Joung, Yang-Hee;Yoo, Jae-Hung
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • v.9 no.2
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    • pp.865-868
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    • 2005
  • We fabricated the $Pb_{0.72}La_{0.28}TiO_3 (PLT(28))$ thin film successfully by using the sol-gel method and characterized it to evaluate its potential for being utilized as the capacitor dielectrics of ULSI DRAMs. In our sol-gel process, the acetates were used as the starting materials. Through the TGA-DTA analysis, we established the excellent fabrication conditions of the sol-gel method for the PLT(28) thin film. We obtained the dense and crack-free PLT(28) thin film of 100% perovskite phase by drying at 350$^{\circ}C$ after each coating and final annealing at 650$^{\circ}C$. Electrical properties of PLT(28) thin film were measured through formation on the Pt/Ti/SiO$_2$/Si substrate and its dielectric constant and leakage current density were measured as 936 and 1.1${\mu}$A/cm$^2$, respectively

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Effective Positive Bias Recovery for Negative Bias Stressed sol-gel IGZO Thin-film Transistors (음 바이어스 스트레스를 받은 졸-겔 IGZO 박막 트랜지스터를 위한 효과적 양 바이어스 회복)

  • Kim, Do-Kyung;Bae, Jin-Hyuk
    • Journal of Sensor Science and Technology
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    • v.28 no.5
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    • pp.329-333
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    • 2019
  • Solution-processed oxide thin-film transistors (TFTs) have garnered great attention, owing to their many advantages, such as low-cost, large area available for fabrication, mechanical flexibility, and optical transparency. Negative bias stress (NBS)-induced instability of sol-gel IGZO TFTs is one of the biggest concerns arising in practical applications. Thus, understanding the bias stress effect on the electrical properties of sol-gel IGZO TFTs and proposing an effective recovery method for negative bias stressed TFTs is required. In this study, we investigated the variation of transfer characteristics and the corresponding electrical parameters of sol-gel IGZO TFTs caused by NBS and positive bias recovery (PBR). Furthermore, we proposed an effective PBR method for the recovery of negative bias stressed sol-gel IGZO TFTs. The threshold voltage and field-effect mobility were affected by NBS and PBR, while current on/off ratio and sub-threshold swing were not significantly affected. The transfer characteristic of negative bias stressed IGZO TFTs increased in the positive direction after applying PBR with a negative drain voltage, compared to PBR with a positive drain voltage or a drain voltage of 0 V. These results are expected to contribute to the reduction of recovery time of negative bias stressed sol-gel IGZO TFTs.

Al-doped ZnO via Sol-Gel Spin-coating as a Transparent Conducting Thin Film

  • Nam, Gil-Mo;Kwon, Myoung-Seok
    • Journal of Information Display
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    • v.10 no.1
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    • pp.24-27
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    • 2009
  • A simple nonalkoxide sol-gel route for depositing an Al-doped ZnO thin film on a glass substrate was derived in this study. The initial Al dopant concentration in the sol-gel preparation varied and ranged from 0 to 5%. The sol-gel-derived thin films showed c-plane preferred crystallization of their hexagonal phase, with nanosized grain structures. First and second post-heat-treatments were carried out to improve the film’s electrical resistivity. The carrier density and the Hall mobility were measured and discussed to explain the electrical resistivity. The optical transmittance within the visible range showed compatible properties, which indicates the possible use of A1-doped ZnO as a transparent electrode in flat panel displays.

Transparent Conducting Ga-doped ZnO Thin Film for Flat-Panel Displays with a Sol-gel Spin Coating

  • Nam, Gil-Mo;Kwon, Myoung-Seok
    • Journal of Information Display
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    • v.9 no.3
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    • pp.8-11
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    • 2008
  • A novel non-alkoxide sol-gel process for synthesizing Ga-doped ZnO thin film on glass was derived for possible use as a transparent electrode in flat-panel displays, using zinc acetate dehydrate as the starting material. The structural and electrical properties of thin films have been characterized as functions of Ga addition and post-heat-treatments. Their carrier density, Hall mobility, and optical transmittance were measured and discussed herein to explain the characteristics of the sol-gel-derived Ga-doped ZnO thin film on glass.

Aging Effects on Electrical Characteristics of Sol-gel Processed CuO Thin Film Transistors (Aging 효과가 Sol-gel 공정 기반 CuO 박막 트랜지스터의 전기적 특성에 미치는 영향)

  • Jang, Jaewon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.9
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    • pp.527-531
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    • 2016
  • In this study, p-type thin film transistors consisting of CuO channels were fabricated by sol-gel process, with copper (II) acetate monohydrate precursors. At $500^{\circ}C$, the deposited films were fully converted into monoclinic phase CuO. The fabricated CuO thin film transistors deliver field effect mobility in saturation regime of $0.015cm^2/Vs$, and $I_{on}/I_{off}$ of ${\sim}10^3$. The degradation of the performance of the fabricated CuO thin film transistor caused by the exposure to air has been studied.

A study on the crystalline orientation and electric properties of sol-gel PZT thin film for piezoelectric sensors (졸겔 법으로 제조한 압전 센서용 PZT 박막의 결정 배향 및 전기적 특성 연구)

  • Byun, Jin-Moo;Lee, Ho-Nyun;Lee, Hong-Kee;Lee, Seong-Eui;Lee, Hee-Chul
    • Journal of Sensor Science and Technology
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    • v.19 no.3
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    • pp.202-208
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    • 2010
  • This study examined the dependency of crystalline orientation and electric properties of sol-gel PZT film on hydrolysis, a $PbTiO_3$ seed layer and a concentration of sol-gel solution. The PZT thin films were prepared by using 2-Methoxyethanol-based sol-gel method and spin-coating on Pt/Ti/$SiO_2$/Si substrates. The 1-${\mu}m$-thick PZT films were coated and then fired in a furnace by direct insert method. The highly (111) oriented PZT film of pure perovskite structure could be obtained. We could control the degree of orientation by various parameters such as hydrolysis, a $PbTiO_3$ seed layer and a concentration of sol-gel solution. The highest measured remanent polarization, dielectric constant and piezoelectric coefficient are $24.16\;{\mu}C/cm^2$, 2808, and 159 pC/N, respectively.

Comparision of Immobilized TiO2 Catalyst for Water Purification (정수처리용 TiO2 고정화 촉매 비교)

  • Jeon, En Ju;Kang, Sung Hwan;Kim, Byung Ug;Rim, Jay Myung
    • Journal of Korean Society of Water and Wastewater
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    • v.13 no.3
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    • pp.101-106
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    • 1999
  • This research aims to compare immobilized catalysts prepared by various methods and determine suitable $TiO_2$ catalyst for water purification. Sol-gel method by Anderson and powder coation method by Tanaka ate famous in the methods to immobilize catalyst. Therefore, the $TiO_2$ catalyst for this research was prepared by sol-gel method and powder coating method. Its structure was tested by X-ray diffractometer (XRD), Scanning electron microseope (SEM). Durability of a catalyst-support couple in an solution was investigated. too. Experimental results were summarized as following; i) Optimum ratio of Ti : $H_2O$ : $H^+$ to obtain stable sol was 1 : 10 : 0.1 and the XRD patterns of $TiO_2$ film immobilized by sol-gel method which were fired at $700^{\circ}C$ showed that the catalyst had an anatase structure. ii) The particle size of $TiO_2$ prepared by sol-gel method was less than $5{\mu}$, but it was observed that coated side was not unifiom. iii) Sol-gel method was very effective to obtain $TiO_2$ catalyst of thin film, but spreadability and durability of a catalyst-support couple in a solution were than $TiO_2$ film immobilized by powder coating method. iv) The particle size of $TiO_2$ immobilized by powder coating method was a little larger than it prepared by sol-gel method, but spreadability and uniformity of $TiO_2$ film and durability of a catalyst-support couple in a solution were better than it immobilized by sol-gel method.

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