Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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A study on the crystalline orientation and electric properties of sol-gel PZT thin film for piezoelectric sensors

졸겔 법으로 제조한 압전 센서용 PZT 박막의 결정 배향 및 전기적 특성 연구

  • Byun, Jin-Moo (Department of Advanced Materials Engineering, Korea Polytechnic University) ;
  • Lee, Ho-Nyun (Department of Advanced Materials Engineering, Korea Polytechnic University) ;
  • Lee, Hong-Kee (Heat Treatment & Plating Technology Service Center, Korea Institute of Industrial Technology) ;
  • Lee, Seong-Eui (Heat Treatment & Plating Technology Service Center, Korea Institute of Industrial Technology) ;
  • Lee, Hee-Chul (Department of Advanced Materials Engineering, Korea Polytechnic University)
  • 변진무 (한국산업기술대학교 신소재공학과) ;
  • 이호년 (한국생산기술연구원 열.표면기술지원센터) ;
  • 이홍기 (한국생산기술연구원 열.표면기술지원센터) ;
  • 이성의 (한국산업기술대학교 신소재공학과) ;
  • 이희철 (한국산업기술대학교 신소재공학과)
  • Received : 2009.12.16
  • Accepted : 2010.04.13
  • Published : 2010.05.31
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Abstract

This study examined the dependency of crystalline orientation and electric properties of sol-gel PZT film on hydrolysis, a $PbTiO_3$ seed layer and a concentration of sol-gel solution. The PZT thin films were prepared by using 2-Methoxyethanol-based sol-gel method and spin-coating on Pt/Ti/$SiO_2$/Si substrates. The 1-${\mu}m$-thick PZT films were coated and then fired in a furnace by direct insert method. The highly (111) oriented PZT film of pure perovskite structure could be obtained. We could control the degree of orientation by various parameters such as hydrolysis, a $PbTiO_3$ seed layer and a concentration of sol-gel solution. The highest measured remanent polarization, dielectric constant and piezoelectric coefficient are $24.16\;{\mu}C/cm^2$, 2808, and 159 pC/N, respectively.

Keywords

References

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