Browse > Article

Al-doped ZnO via Sol-Gel Spin-coating as a Transparent Conducting Thin Film  

Nam, Gil-Mo (Department of Materials Science and Engineering, University of Seoul)
Kwon, Myoung-Seok (Department of Materials Science and Engineering, University of Seoul)
Publication Information
Abstract
A simple nonalkoxide sol-gel route for depositing an Al-doped ZnO thin film on a glass substrate was derived in this study. The initial Al dopant concentration in the sol-gel preparation varied and ranged from 0 to 5%. The sol-gel-derived thin films showed c-plane preferred crystallization of their hexagonal phase, with nanosized grain structures. First and second post-heat-treatments were carried out to improve the film’s electrical resistivity. The carrier density and the Hall mobility were measured and discussed to explain the electrical resistivity. The optical transmittance within the visible range showed compatible properties, which indicates the possible use of A1-doped ZnO as a transparent electrode in flat panel displays.
Keywords
ZnO; TCO; Sol-Gel; Spin-coating; Al;
Citations & Related Records
연도 인용수 순위
  • Reference
1 U. Ozgur, Y.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Dogan, V. Avrutin, S.J. Cho and H. Morkoc, J. Appl. Phys 98, 041301 (2005)   DOI   ScienceOn
2 B.G. Lewis and D.C. Plain, MRS Bulletin 25(8), 22 (2000)   DOI
3 Y.-S. Kim and W.-P. Tai, Appl. Surf. Sci. 253, 4911 (2007)   DOI   ScienceOn
4 G.M. Nam and M.S. Kwon, J. Information Display 9, 8 (2008)   DOI
5 M. Ohyama, H. Kozuka, and T. Yoko, J. Am. Ceram. Soc. 81, 1622 (1998)   DOI   ScienceOn
6 D.S. Ginley and C. Bright, MRS Bulletin 25(8), 15 (2000)   DOI
7 R. B. H. Tahar, J. Eur. Cer. Soc. 25, 3301 (2005)   DOI   ScienceOn
8 D.C. Plain, H.Y. Yeom and B. Yaglioglu, in Flexible Flat Panel Displays Edited by G.P. Crawford (John Wiley & Sons, Ltd, Singapore, 2005), p. 94
9 T. Schuler and M.A. Aegerter, Thin Solid Films 351, 125 (1999)   DOI   ScienceOn
10 K.-M. Lin and P. Tsai, Thin Solid Films 515, 8601 (2007)   DOI   ScienceOn
11 G.G. Valle, P. Hammer, S.H. Pulcinelli, and C.V. Santilli, J. Eur. Cer. Soc. 24, 1009 (2004)   DOI   ScienceOn
12 T. Minami, MRS Bulletin 25(8), 38 (2000)   DOI