• Title/Summary/Keyword: Silica film

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The effect of the surface activation treatment on the crystallization of amorphous silicon thin film (표면 활성화 처리가 비정질 규소 박막의 결정화에 미치는 영향)

  • 이의석;김영관
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.2
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    • pp.173-179
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    • 1999
  • The effect of the surface activation treatment on the crystallization of the amorphous silicon film was investigated. The amorphous silicon film was deposited on the silica substrate with LPCVD technique. Wet blasting with silica slurry or exposure with Nd:YAG laser beam was applied on the amorphous silicon film before annealing for the crystallization. For the analysis of the crystallinity, XRD, Raman, and SEM were employed. In this investigation, the prior surface activation treatment like silica wet blasting or Nd:YAG laser beam exposure before annealing for the crystallization were found to be effective in the enhancement of the crystallization. It is believed that these treatment lower the activation energy required for the crystallization of the amorphous silicon film.

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Improvement of PCR Preprocessing Efficiency through PEO-controlled Synthesis of Silica Nanofibers (PCR 전처리 효율 향상을 위한 PEO 제어 실리카 나노섬유 제작)

  • Seung-Min Lee;Hyeon-Ho Choi;Kwang-Ho Lee
    • Journal of Biomedical Engineering Research
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    • v.44 no.6
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    • pp.465-475
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    • 2023
  • In this study, we demonstrated a silica nanofibrous membrane based on the electrospinning process and evaluated its DNA isolation and purification performance in PCR pretreatment. Generally, silica membranes made of non-woven fabric are used for PCR pretreatment, but this study aimed to improve the efficiency of the pretreatment process by developing a nanofiber-type silica membrane with high specific surface area and porosity. In order to manufacture a nanofiber-shaped silica film while maintaining the original physical properties of silica, nanofiber membranes produced by adding various concentrations of PEO (5 wt%, 8 wt%, and 10 wt%) to silica prepared by the sol-gel method were compared. In terms of nanofiber membrane production, the higher the PEO concentration, the more effective it was in producing nanofiber membranes. The produced silica nanofiber membrane was inserted to a pretreatment device used in commercial PCR equipment, and the pretreatment performance was compared and verified using Salmonella bacteria. When Salmonella was used, samples containing 5 wt% PEO showed superior PCR efficiency compared to samples containing 8 wt% and 10 wt% PEO. These results show that adding 5 wt% of PEO can effectively improve DNA purification and separation by producing a nanofiber-shaped silica film while maintaining the physical properties of silica. We expect that this study will contribute to the development of effective PCR pretreatment technology essential for various molecular biology applications.

Effect of surface modifiers on the nano porous silica aerogels prepared by ambient drying process (상압건조 나노다공성 실리카 에어로젤에 대한 개질제 효과)

  • Kim, Tae-Jung;Oh, Young-Jei
    • Journal of Sensor Science and Technology
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    • v.16 no.1
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    • pp.77-83
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    • 2007
  • Nanoporous silica aerogels with various surface modifiers were prepared by ambient drying process. Tetraethylorthosilicate (TEOS) were used a raw material. Ambient drying process for various surface modifier was studied in the point of view of a crack-free monolith and thin films and low cost. Various kinds of surface modifiers like as hexamethyldisilazane (HMDSZ), trimethlychlorosilane (TMCS), methlytriethoxylsilane (MTES), and methlytrimethoxysilane (MTMS) were studied in order to enhance hydrophobicity for the silica aerogel. Surface modified aerogels were evaluated by FT-IR, TG, BET, SEM and wetting angle measurement. Homogeneous and crack-free aerogels were obtained by modifying the HMDSZ and the TMCS. However silica xerogel was obtained when modified with MTMS, MTES.

Dependence of Nanotopography Impact on Fumed Silica and Ceria Slurry Added with Surfactant for Shallow Trench Isolation Chemical Mechanical Polishing

  • Cho, Kyu-Chul;Jeon, Hyeong-Tag;Park, Jea-Gun
    • Korean Journal of Materials Research
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    • v.16 no.5
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    • pp.308-311
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    • 2006
  • The purpose of this study is to investigate the difference of the wafer nanotopography impact on the oxide-film thickness variation between the STI CMP using ceria slurry and STI CMP using fumed silica slurry. The nanotopography impact on the oxide-film thickness variation after STI CMP using ceria slurry is 2.8 times higher than that after STI CMP using fumed silica slurry. It is attributed that the STI CMP using ceria slurry follows non-Prestonian polishing behavior while that using fumed silica slurry follows Prestonian polishing behavior.

Titanium thin film modified silica substrate to enhance the bonding properties of nanosilver

  • Lin, H.M.;Liu, Y.T.;Lin, K.N.;Chang, W.S.;Wu, C.Y.;Liu, P.Y.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.1733-1736
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    • 2006
  • Nanosilver has intrinsic problem to adhesion on the surface of silica. To improve interfacial properties between nanosilver and silica substrate, a thin titanium film is introduced in this study. The titaniumcoated silica substrates are prepared by sputter technique. The commercial silver nanopaste with size around 3-7nm is used in this study. The results indicate thin layer of titanium can improve the bonding properties of nanosilver and expect to be used in fabrication of TFT display panel.

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An Etch-Stop Technique Using $Cr_2O_3$ Thin Film and Its Application to Silica PLC Platform Fabrication

  • Shin, Jang-Uk;Kim, Dong-June;Park, Sang-Ho;Han, Young-Tak;Sung, Hee-Kyung;Kim, Je-Ha;Park, Soo-Jin
    • ETRI Journal
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    • v.24 no.5
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    • pp.398-400
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    • 2002
  • Using $Cr_2O_3$ thin film, we developed a novel etch-stop technique for the protection of silicon surface morphology during deep ion coupled plasma etching of silica layers. With this technique we were able to etch a silica trench with a depth of over 20 ${\mu}m$ without any damage to the exposed silicon terrace surface. This technique should be well applicable to fabricating silica planar lightwave circuit platforms for opto-electronic hybrid integration.

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Process and characterization of an electrochromic film made of silica-polyaniline composite nanoparticle

  • Hwang, Tae-Jin;Lee, Heung-Yeol;Joo, Hyun-Jung;Yim, Tai-Hong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2008.11a
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    • pp.6-7
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    • 2008
  • Composite nanoparticles of silica-polyaniline were synthesized and tested as an electrochromic material. For the optical application, the size of the nanoparticle was intended to be less than 100 nm in diameter. The synthesis was done by using a microemulsion synthesis method where the silica-polyaniline composite nanoparticle was obtained by dispersing two acidic aqueous phases containing aniline and polymerization agent, respectively. Microstructure analysis such as TEM and BET surface area measurement showed the possibility that polyaniline is incorporated in porous silica structure. The composite structure of the particle was proved to enhance chemical stability of the prepared electrochromic film.

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A Study on Friction-induced Surface Fracture Behaviors of Carboxylic Acid Modified Styrenic Thermoplastic Elastomer as Additives (첨가제에 따른 변성 스티렌계 열가소성 엘라스토머의 마찰에 의한 표면 파괴 거동 연구)

  • Jeon, Jun-Ha;Park, Sang-Min;Lee, Jin- Hyok;Um, Gi-Yong
    • Journal of Adhesion and Interface
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    • v.16 no.3
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    • pp.95-100
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    • 2015
  • In this work, we observed the effect of silica, zinc oxide, zinc ion coated silica on carboxylic acid modified styrenic thermoplastic elastomer (m-TPS) film for friction-induced surface fracture. m-TPS film added general silica showed poor mechanical properties, anti-abrasion and friction-induced surface fracture, caused by strong filler-filler interaction of silica. In case of m-TPS films added zinc oxide or zinc ion coated silica, mechanical properties, anti-abrasion and friction-induced surface fracture were improved due to forming ionic cluster between carboxylic acid group of m-TPS and zinc ion. Ionic cluster were confirmed by FT-IR analysis that observed zinc carboxylated group stretch peak at $1550{\sim}1650cm^{-1}$.

Synthesis of Silica Aerogel and Thin Film Coating at Ambient (상입하에서의 실리카 에어로겔의 합성 및 박막코팅(I))

  • 양희선;최세영
    • Journal of the Korean Ceramic Society
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    • v.34 no.2
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    • pp.188-194
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    • 1997
  • Wet gel with surface modification by TMCS was redispersed in EtOH and redispersed silica sol for coat-ing was prepared. After spin coating of redispersed sol was conducted on silicon substrate, processes of drying(8$0^{\circ}C$) and heat treatment(>25$0^{\circ}C$) were, followed at ambient pressure. The influence of heat treat-ment of properties of film was observed, changing temperature at heat treatment. The optimum redisp-ersion condition for stable silica sol was wet gel:EtOH=1g:110$m\ell$ and the concentration and viscosity of redispersed silica sol with average particle size of 30nm were 0.11 M, 2.0-2.2 cP respectively. Crack-free thin film with the refractive index of 1.14 and thickness of 400 nm was obtained through drying at 8$0^{\circ}C$ and subsequent heat treatment at 45$0^{\circ}C$ for 2 hrs respectively after spin coating of 1500rpm, 10 times.

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