• 제목/요약/키워드: Schottky contact

검색결과 164건 처리시간 0.036초

전달 행렬 방법을 이용한 Schottky 다이오드 자외선 광검출기의 물질특성 추출과 설계 (Extraction of Material Parameters and Design of Schottky Diode UV Detectors Using a Transfer Matrix Method)

  • 김진형;김상배
    • 대한전자공학회논문지SD
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    • 제43권5호
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    • pp.25-33
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    • 2006
  • 전달 행렬 방법과 capacitance-voltage 특성, 그리고 측정된 광응답 스펙트럼을 이용하여 Schottky 다이오드 UV-A와 B 광검출기에 사용되는 GaN, $Al_{0.2}Ga_{0.8}N$ 등의 반도체 및 Schottky 접촉 금속 Ni의 물질특성인 흡수계수(absorption coefficient)를 추출하였다. 입사된 빛이 반도체의 공핍영역에서 흡수되는 양을 구하고, 이로부터 각 파장에서의 광응답 특성을 얻는 과정을 컴퓨터 프로그램으로 구현하였다. 그리고, 계산 값을 측정치와 비교하여 각 파장에서 GaN, $Al_{0.2}Ga_{0.8}N$, Ni의 흡수계수를 얻을 수 있었다. 추출된 흡수계수를 이용하여 자외선 광검출기의 광응답을 높이는 설계 방안을 모색하였다. Ni의 흡수계수가 크기 때문에 광응답을 결정하는 주요 요소는 Ni 전극의 두께이다. 따라서 Schottky 접촉 금속 Ni의 두께를 줄이고, 공핍 영역의 크기를 늘릴 수 있다면 광응답 특성이 더욱 향상된 광검출기의 실현이 가능해질 것이다.

Cr- 및 Ni- 소스/드레인 쇼트키 박막 트랜지스터의 장벽 특성에 대한 실험 및 모델링 연구 (Experimental and Simulation Study of Barrier Properties in Schottky Barrier Thin-Film Transistors with Cr- and Ni- Source/Drain Contacts)

  • 정지철;문경숙;구상모
    • 한국전기전자재료학회논문지
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    • 제23권10호
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    • pp.763-766
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    • 2010
  • By improving the conducting process of metal source/drain (S/D) in direct contact with the channel, schottky barrier metal-oxide-semiconductor field effect transistors (SB MOSFETs) reveal low extrinsic parasitic resistances, offer easy processing and allow for well-defined device geometries down to the smallest dimensions. In this work, we investigated the arrhenius plots of the SB MOSFETs with different S/D schottky barrier (SB) heights between simulated and experimental current-voltage characteristics. We fabricated SB MOSFETs using difference S/D metals such as Cr (${\Phi}_{Cr}$ ~4.5 eV) and Ni (${\Phi}_{Ni}$~5.2 eV), respectively. Schottky barrier height (${\Phi}_B$) of the fabricated devices were measured to be 0.25~0.31 eV (Cr-S/D device) and 0.16~0.18 eV (Ni-S/D device), respectively in the temperature range of 300 K and 475 K. The experimental results have been compared with 2-dimensional simulations, which allowed bandgap diagram analysis.

A Study on the Leakage Current Voltage of Hybrid Type Thin Films Using a Dilute OTS Solution

  • Kim Hong-Bae;Oh Teresa
    • 반도체디스플레이기술학회지
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    • 제5권1호
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    • pp.21-25
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    • 2006
  • To improve the performance of organic thin film transistor, we investigated the properties of gate insulator's surface according to the leakage current by I-V measurement. The surface was treated by the dilute n-octadecyltrichlorosilane solution. The alkyl group of n-octadecyltrichlorosilane induced the electron tunneling and the electron tunneling current caused the breakdown at high electric field, consequently shifting the breakdown voltage. The 0.5% sample with an electron-rich group was found to have a large leakage current and a low barrier height because of the effect of an energy barrier lowered by, thermionic current, which is called the Schottky contact. The surface properties of the insulator were analyzed by I-V measurement using the effect of Poole-Frankel emission.

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Current Density Equations Representing the Transition between the Injection- and Bulk-limited Currents for Organic Semiconductors

  • Lee, Sang-Gun;Hattori, Reiji
    • Journal of Information Display
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    • 제10권4호
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    • pp.143-148
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    • 2009
  • The theoretical current density equations for organic semiconductors was derived according to the internal carrier emission equation based on the diffusion model at the Schottky barrier contact and the mobility equation based on the field dependence model, the so-called "Poole-Frenkel mobility model." The electric field becomes constant because of the absence of a space charge effect in the case of a higher injection barrier height and a lower sample thickness, but there is distribution in the electric field because of the space charge effect in the case of a lower injection barrier height and a higher sample thickness. The transition between the injection- and bulk-limited currents was presented according to the Schottky barrier height and the sample thickness change.

High Dose $^{60}Co\;{\gamma}$-Ray Irradiation of W/GaN Schottky Diodes

  • Kim, Jihyun;Ren, F.;Schoenfeld, D.;Pearton, S.J.;Baca, A.G.;Briggs, R.D.
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제4권2호
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    • pp.124-127
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    • 2004
  • W/n-GaN Schottky diodes were irradiated with $^{60}Co\;{\gamma}-rays$ to doses up to 315Mrad. The barrier height obtained from current-voltage (I-V) measurements showed minimal change from its estimated initial value of ${\sim}0.4eV$ over this dose range, though both forward and reverse I-V characteristics show evidence of defect center introduction at doses as low as 150 Mrad. Post irradiation annealing at $500^{\circ}C$ increased the reverse leakage current, suggesting migration and complexing of defects. The W/GaN interface is stable to high dose of ${\gamma}-rays$, but Au/Ti overlayers employed for reducing contact sheet resistance suffer from adhesion problems at the highest doses.

다결정 NiO박막의 전극물질이 resistance switching 현상에 미치는 영향

  • 노영수;김영은;박동희;김태환;최원국
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.224-224
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    • 2010
  • Pt와 ITO 상부전극의 top-electode/NiO/Pt 구조에서 resistance switching현상을 연구하였다. 하부전극물질이 resistance switching현상에 미치는 영향은 이미 연구되었다. Ohmic 이나 low Schottky contact은 NiO 박막의 resistance switching 현상은 높은 전기장의 인가에 의해 것이 나타나는 것은 알 수 있었다. Ohmic contact에서는 유도전기장에 의한 resistance switching 현상들을 관찰할 수 있다. low Schottky barrier를 가지는 ITO/NiO/Pt 구조에서 resistances switching현상은 관찰되지 않고 Pt/ITO구조로 Ohmic 접촉은 유도전기장에 의한 resistance switching 현상이 나타나지 않음을 알 수 있었다.

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ZTO 박막의 쇼키접합에 기인하는 자기저항특성 (Magnetoresistance Characteristics due to the Schottky Contact of Zinc Tin Oixide Thin Films)

  • 이향강;오데레사
    • 반도체디스플레이기술학회지
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    • 제18권4호
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    • pp.120-123
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    • 2019
  • The effect of surface plasmon on ZTO thin films was investigated. The phenomenon of depletion occurring in the interface of the ZTO thin film created a potential barrier and the dielectric layer of the depletion formed a non-mass particle called plasmon. ZTO thin film represents n-type semiconductor features, and surface current by plasma has been able to obtain the effect of improving electrical efficiency as a result of high current at positive voltage and low current at negative voltage. It can be seen that the reduction of electric charge due to recombination of electronic hole pairs by heat treatment of compound semiconductors induces higher surface current in semiconductor devices.

IGZO 박막의 CO2 가스 반응에 대한 안정성 (Stability of Gas Response Characteristics of IGZO)

  • 오 데레
    • 반도체디스플레이기술학회지
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    • 제17권3호
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    • pp.17-20
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    • 2018
  • IGZO thin films were prepared on n-type Si substrates to research the interface characteristics between IGZO and substrate. After the annealing processes, the depletion layer was formed at the interface to make a Schottky contact owing to the electron-hall fair recombination. The carrier density was decreased by the effect of depletion layer and the hall mobility decreased during the deposition processes. But the annealing effect of depletion layer increased the hall mobility because of the increment of potential barrier and the extension of depletion layer. It was confirmed that it is useful to observe the depletion effect and Schottky contact's properties by complementary using the Hall measurement and I-V measurement.

Field Oxide를 이용한 고전압 SiC 쇼트키 diode 제작 (Fabrication of SiC Schottky Diode with Field oxide structure)

  • 송근호;방욱;김상철;서길수;김남균;김은동;박훈수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.350-353
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    • 2002
  • High voltage SiC Schottky barrier diodes with field plate structure have been fabricated and characterized. N-type 4H-SiC wafer with an epilayer of ∼10$\^$15/㎤ doping level was used as a starting material. Various Schottky metals such as Ni, Pt, Ta, Ti were sputtered and thermally-evaporated on the low-doped epilayer. Ohmic contact was formed at the backside of the SiC wafer by annealing at 950$^{\circ}C$ for 90 sec in argon using rapid thermal annealer. Field oxide of 550${\AA}$ in thickness was formed by a wet oxidation process at l150$^{\circ}C$ for 3h and subsequently heat-treated at l150$^{\circ}C$ for 30 min in argon for improving oxide quality. The turn-on voltages of the Ni/4H-SiC Schottky diode was 1.6V which was much higher than those of Pt(1.0V), Ta(0.7V) and Ti(0.7). The voltage drop was measured at the current density of 100A/$\textrm{cm}^2$ showing 2.1V for Ni Schottky diode, 1.45V for Pt 1.35V, for Ta, and 1.25V for Ti, respectively. The maximum reverse breakdown voltage was measured 1100V in the file plated Schottky diodes with 101an thick epilayer.

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N형 Ge-on-Si 기판에 형성된 Pd Germanide의 열안정성 및 Schottky 장벽 분석 (Analysis of Thermal Stability and Schottky Barrier Height of Pd Germanide on N-type Ge-on-Si Substrate)

  • 오세경;신홍식;강민호;복정득;정의정;권혁민;이가원;이희덕
    • 한국전기전자재료학회논문지
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    • 제24권4호
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    • pp.271-275
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    • 2011
  • In this paper, thermal stability of palladium germanide (Pd germanide) is analyzed for high performance Schottky barrier germanium metal oxide semiconductor field effect transistors (SB Ge-MOSFETs). Pd germanide Schottky barrier diodes were fabricated on n-type Ge-on-Si substrates and the formed Pd germanide shows thermal immunity up to $450^{\circ}C$. The barrier height of Pd germanide is also characterized using two methods. It is shown that Pd germanide contact has electron Schottky barrier height of 0.569~0.631 eV and work function of 4.699~4.761 eV, respectively. Pd germanide is promising for the nanoscale Schottky barrier Ge channel MOSFETs.