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Fabrication of $Pb(Zr,Ti)O_3$ Thin Film Capacitors by Damascene Process (Damascene 공정을 이용한 $Pb(Zr,Ti)O_3$ 캐패시터 제조 연구)

  • Ko, Pil-Ju;Lee, Woo-Sun
    • Proceedings of the KIEE Conference
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    • 2006.10a
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    • pp.105-106
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    • 2006
  • The ferroelectric materials of the PZT, SBT attracted much attention for application to ferroelectric random access memory (FRAM) devices. Through the last decade, the lead zirconate titanate (PZT) is one of the most attractive perovskite-type materials for the ferroelectric products due to its higher remanant polarization and the ability to withstand higher coercive fields. FRAM has been currently receiving increasing attention for one of future memory devices due to its ideal memory properties such as non-volatility, high charge storage, and faster switching operations. In this study, we first applied the damascene process using chemical mechanical polishing (CMP) to the fabricate the $Pb_{1.1}(Zr_{0.52}Ti_{0.48})O_3$ thin film capacitor in order to solve the problems of plasma etching such as low etching profile and ion charging. The structural characteristics were compared with specimens before and after CMP process of PZT films. The scanning electron microscopy (SEM) analysis was performed to compare the morphology surface characteristics of $Pb_{1.1}(Zr_{0.52}Ti_{0.48})O_3$ capacitors. The densification by the vertical sidewall patterning and charging-free ferroelectric capacitor could be obtained by the damascene process without remarkable difference of the characteristics.

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Effect of vehicle flexibility on the vibratory response of bridge

  • Lalthlamuana, R.;Talukdar, Sudip
    • Coupled systems mechanics
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    • v.3 no.2
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    • pp.147-170
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    • 2014
  • In the recent times, dimensions of heavy load carrying vehicle have changed significantly incorporating structural flexibility in vehicle body. The present paper outlines a procedure for the estimation of bridge response statistics considering structural bending modes of the vehicle. Bridge deck roughness has been considered to be non homogeneous random process in space. Influence of pre cambering of bridge surface and settlement of approach slab on the dynamic behavior of the bridge has been studied. A parametric study considering vehicle axle spacing, mass, speed, vehicle flexibility, deck unevenness and eccentricity of vehicle path have been conducted. Dynamic amplification factor (DAF) of the bridge response has been obtained for several of combination of bridge-vehicle parameters. The present study reveals that flexible modes of vehicle can reduce dynamic response of the bridge to the extent of 30-37% of that caused by rigid vehicle model. However, sudden change in the bridge surface profile leads to significant amount of increment in the bridge dynamic response even if flexible bending modes remain active. The eccentricity of vehicle path and flexural/torsional rigidity ratios plays a significant role in dynamic amplification of bridge response.

A Study on the Etching Characteristics of $YMnO_3$ Thin Films in High Density $Cl_2$/Ar Plasma (고밀도 $Cl_2$/Ar 플라즈마를 이용한 $YMnO_3$ 박막의 식각 특성에 관한 연구)

  • 민병준;김창일;장의구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.21-24
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    • 2000
  • Ferroelectric YMnO$_3$ thin films are excellent dielectric materials for high integrated ferroelectric random access memory (FRAM) with metal-ferroelectric-silicon field effect transistor (MFSFET) structure. In this study, YMnO$_3$ thin films were etched with C1$_2$/Ar gas chemistries in inductively coupled plasma (ICP). The maximum etch rate of YMnO$_3$ thin films is 285 $\AA$/min under C1$_2$/Ar of 10/0, 600 W/-200 V and 15 mTorr. The selectivities of YMnO$_3$ over CeO$_2$ and $Y_2$O$_3$ are 2.85, 1.72, respectively. The results of x-ray photoelectron spectroscopy (XPS) reflect that Y is removed dominantly by chemical reaction between Y and Cl, while Mn is removed more effective by Ar ion bombardment than chemical reaction. The results of secondary ion mass spectrometer (SIMS) were equal to these of XPS. The etch profile of the etched YMnO$_3$ film is approximately 65$^{\circ}$and free of residues at the sidewall.

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Ferroelectric characteristics of PZT capacitors fabricated by using chemical mechanical polishing process with change of process parameters (화학적기계적연마 공정으로 제조한 PZT 캐패시터의 공정 조건에 따른 강유전 특성 연구)

  • Jun, Young-Kil;Jung, Pan-Gum;Ko, Pil-Ju;Kim, Nam-Hoon;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.66-66
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    • 2007
  • Lead zirconate titanate (PZT) is one of the most attractive perovskite-type materials for ferroelectric random access memory (FRAM) due to its higher remanant polarization and the ability to withstand higher coercive fields. We first applied the damascene process using chemical mechanical polishing (CMP) to fabricate the PZT thin film capacitor to solve the problems of plasma etching including low etching profile and ion charging. The $0.8{\times}0.8\;{\mu}m$ square patterns of silicon dioxide on Pt/Ti/$SiO_2$/Si substrate were coated by sol-gel method with the precursor solution of PZT. Damascene process by CMP was performed to pattern the PZT thin film with the vertical sidewall and no plasma damage. The polarization-voltage (P-V) characteristics of PZT capacitors and the current-voltage characteristics (I-V) were examined by change of process parameters. To examine the CMP induced damage to PZT capacitor, the domain structure of the polished PZT thin film was also investigated by piezoresponse force microscopy (PFM).

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High density plasma etching of CoFeB and IrMn magnetic films with Ti hard mask

  • Xiao, Y.B.;Kim, E.H.;Kong, S.M.;Chung, C.W.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.233-233
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    • 2010
  • Magnetic random access memory (MRAM), based on magnetic tunnel junction (MTJ) and CMOS, is a prominent candidate among prospective semiconductor memories because it can provide nonvolatility, fast access time, unlimited read/write endurance, low operating voltage and high storage density. The etching of MTJ stack with good properties is one of a key process for the realization of high density MRAM. In order to achieve high quality MTJ stack, the use of CoFeB and IrMn magnetic films as free layers was proposed. In this study, inductively coupled plasma reactive ion etching of CoFeB and IrMn thin films masked with Ti hard mask was investigated in a $Cl_2$/Ar gas mix. The etch rate of CoFeB and IrMn films were examined on varying $Cl_2$ gas concentration. As the $Cl_2$ gas increased, the etch rate monotonously decreased. The effective of etch parameters including coil rf power, dc-bais voltage, and gas pressure on the etch profile of CoFeB and IrMn thin film was explored, At high coil rf power, high dc-bais voltage, low gas pressure, the etching of CoFeB and IrMn displayed better etch profiles. Finally, the clean and vertical etch sidewall of CoFeB and IrMn free layers can be achieved by means of thin Ti hard mask in a $Cl_2$/Ar plasma at the optimized condition.

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Acanthamoeba sohi, n. sp., a pathogenic Korean isolate YM-4 from a freshwater fish

  • Im, Kyung-Il;Shin, Ho-Joon
    • Parasites, Hosts and Diseases
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    • v.41 no.4
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    • pp.181-188
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    • 2003
  • A new species of Acanthamoeba was isolated from a freshwater fish in Korea and tentatively named Acanthamoeba sp. YM-4 (Korean isolate YM-4). The trophozoites were $11.0-23.0{\;}{\mu\textrm{m}}$ in length and had hyaline filamentous projections. Cysts were similar to those of A. culbertsoni and A. royreba, which were previously designated as Acanthamoeba group III. Acanthamoeba YM-4 can survive at $40^{\circ}C$, and its generation time was 19.6 hr, which was longer than that of A. culbertsoni. In terms of the in vitro cytotoxicity of lysates, Acanthamoeba YM-4 was weaker than A. culbertsoni, but stronger than A. polyphaga. On the basis of the mortality of experimentally infected mice, Acanthamoeba YM-4 was found to be highly virulent. The isoenzymes profile of Acanthamoeba YM-4 was similar to that of A. royreba. An anti-Acanthamoeba YM-4 monoclonal antibody, McAY7, was found to react only with Acanthamoeba YM-4, and not with A. culbertsoni. Random amplified polymorphic DNA marker analysis and RFLP analysis of mitochondrial DNA and of 18S small subunit ribosomal RNA, placed Acanthamoeba YM-4 in a separate cluster on the basis of phylogenetic distances. Thus the Acanthamoeba Korean isolate YM-4 was identified as a new species, and assigned as Acanthamoeba sohi.

Numerical Simulation of Welding Residual Stress Distribution on T-joint Fillet Structure

  • Hwang, Se-Yun;Lee, Jang-Hyun;Kim, Sung-Chan;Viswanathan, Kodakkal Kannan
    • International Journal of Ocean System Engineering
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    • v.2 no.2
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    • pp.82-91
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    • 2012
  • Fillet welding is widely used in the assembly of ships and offshore structures. The T-joint configuration is frequently reported to experience fatigue damage when a marine structure meets extreme loads such as storm loads. Fatigue damage is affected by the magnitude of residual stresses on the weld. Recently, many shipping registers and design guides have required that the fatigue strength assessment procedure of seagoing structures under wave-induced random loading and storm loading be compensated based on the effect of residual stresses. We propose a computational procedure to analyze the residual stresses in a T-joint. Residual stresses are measured by the X-ray diffraction (XRD) method, and a 3-D finite element analysis (FEA) is performed to obtain the residual stress profile in the T-joint. The proposed finite element model is validated by comparing experiments with computational results, and the characteristics of the residual stresses in the T-joint are discussed.

Geostatistical algorithm for evaluation of primary and secondary roughness

  • Nasab, Hojat;Karimi-Nasab, Saeed;Jalalifar, Hossein
    • Geomechanics and Engineering
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    • v.24 no.4
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    • pp.359-370
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    • 2021
  • Joint roughness is combination of primary and secondary roughness. Ordinarily primary roughness is a geostatistical part of a joint surface that has a periodic nature but secondary roughness or unevenness is a statistical part of that which have a random nature. Using roughness generating algorithms is a useful method for evaluation of joint roughness. In this paper after determining geostatistical parameters of the joint profile, were presented two roughness generating algorithms using Mount-Carlo method for evaluation of primary (GJRGAP) and secondary (GJRGAS) roughness. These based on geostatistical parameters (range and sill) and statistical parameters (standard deviation of asperities height, SDH, and standard deviation of asperities angle, SDA) for generation two-dimensional joint roughness profiles. In this study different geostatistical regions were defined depending on the range and SDH. As SDH increases, the height of the generated asperities increases and asperities become sharper and at a specific range (a specific curve) relation between SDH and SDA is linear. As the range in GJRGAP becomes larger (the base of the asperities) the shape of asperities becomes flatter. The results illustrate that joint profiles have larger SDA with increase of SDH and decrease of range. Consequencely increase of SDA leads to joint roughness parameters such Z2, Z3 and RP increases. The results showed that secondary roughness or unevenness has a great influence on roughness values. In general, it can be concluded that the shape and size of asperities are appropriate parameters to approach the field scale from the laboratory scale.

Predicting Session Conversion on E-commerce: A Deep Learning-based Multimodal Fusion Approach

  • Minsu Kim;Woosik Shin;SeongBeom Kim;Hee-Woong Kim
    • Asia pacific journal of information systems
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    • v.33 no.3
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    • pp.737-767
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    • 2023
  • With the availability of big customer data and advances in machine learning techniques, the prediction of customer behavior at the session-level has attracted considerable attention from marketing practitioners and scholars. This study aims to predict customer purchase conversion at the session-level by employing customer profile, transaction, and clickstream data. For this purpose, we develop a multimodal deep learning fusion model with dynamic and static features (i.e., DS-fusion). Specifically, we base page views within focal visist and recency, frequency, monetary value, and clumpiness (RFMC) for dynamic and static features, respectively, to comprehensively capture customer characteristics for buying behaviors. Our model with deep learning architectures combines these features for conversion prediction. We validate the proposed model using real-world e-commerce data. The experimental results reveal that our model outperforms unimodal classifiers with each feature and the classical machine learning models with dynamic and static features, including random forest and logistic regression. In this regard, this study sheds light on the promise of the machine learning approach with the complementary method for different modalities in predicting customer behaviors.

Preliminary Study on the Development of a Platform for the Optimization of Beach Stabilization Measures Against Beach Erosion III - Centering on the Effects of Random Waves Occurring During the Unit Observation Period, and Infra-Gravity Waves of Bound Mode, and Boundary Layer Streaming on the Sediment Transport (해역별 최적 해빈 안정화 공법 선정 Platform 개발을 위한 기초연구 III - 단위 관측 기간에 발생하는 불규칙 파랑과 구속모드의 외중력파, 경계층 Streaming이 횡단표사에 미치는 영향을 중심으로)

  • Chang, Pyong Sang;Cho, Yong Jun
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.31 no.6
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    • pp.434-449
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    • 2019
  • In this study, we develop a new cross-shore sediment module which takes the effect of infra-gravity waves of bound mode, and boundary layer streaming on the sediment transport into account besides the well-known asymmetry and under-tow. In doing so, the effect of individual random waves occurring during the unit observation period of 1 hr on sediment transport is also fully taken into account. To demonstrate how the individual random waves would affect the sediment transport, we numerically simulate the non-linear shoaling process of random wavers over the beach of uniform slope. Numerical results show that with the consistent frequency Boussinesq Eq. the application of which is lately extended to surf zone, we could simulate the saw-tooth profile observed without exception over the surf zone, infra-gravity waves of bound mode, and boundary-layer streaming accurately enough. It is also shown that when yearly highest random waves are modeled by the equivalent nonlinear uniform waves, the maximum cross-shore transport rate well exceeds the one where the randomness is fully taken into account as much as three times. Besides, in order to optimize the free parameter K involved in the long-shore sediment module, we carry out the numerical simulation to trace the yearly shoreline change of Mang-Bang beach from 2017.4.26 to 2018.4.20 as well, and proceeds to optimize the K by comparing the traced shoreline change with the measured one. Numerical results show that the optimized K for Mang-Bang beach would be 0.17. With K = 0.17, via yearly grand circulation process comprising severe erosion by consecutively occurring yearly highest waves at the end of October, and gradual recovery over the winter and spring by swell, the advance of shore-line at the northern and southern ends of Mang-Bang beach by 18 m, and the retreat of shore-line by 2.4 m at the middle of Mang-Bang beach can be successfully duplicated in the numerical simulation.